Patents by Inventor James D. Hurst

James D. Hurst has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for varying the transmission of an attenuated phase shift mask
    Patent number: 6436588
    Abstract: A system for varying the transmission of an attenuated phase shift mask (14) is provided that includes an attenuated phase shift mask (14), a transparent support (16) and a modulation system (18). The mask (14) comprises a variable transmission material. The transparent support (16) supports the mask (14). The modulation system (18) is operable to apply a variable force at the mask (14) to control the transmission of the mask (14).
    Type: Grant
    Filed: November 9, 2000
    Date of Patent: August 20, 2002
    Assignee: Texas Instruments Incorporated
    Inventors: Mark E. Mason, Steven D. Carlson, James D. Hurst