Patents by Inventor James Dietz
James Dietz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11958168Abstract: A tool bit for driving a fastener includes a shank including a tool coupling portion configured to be coupled to a tool, a head portion configured to engage the fastener, and a nickel coating on the head portion. The head portion is composed of powdered metal (PM) steel having carbide particles distributed uniformly throughout the head portion.Type: GrantFiled: March 21, 2023Date of Patent: April 16, 2024Assignee: MILWAUKEE ELECTRIC TOOL CORPORATIONInventors: James J. Van Essen, Michael J. Zimmermann, Smith C. Theiler, Zachary J. Geschke, Carl Dietz
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Publication number: 20190078696Abstract: Fluid supply packages of varying types are described, which are useful for delivery of fluids to fluid-utilizing facilities such as semiconductor manufacturing facilities, solar panel manufacturing facilities, and flat-panel display manufacturing facilities. The fluid supply packages include fluid supply vessels and valve heads of varied configuration, as useful to constitute fluid supply packages that are pressure-regulated and/or adsorbent-based in character.Type: ApplicationFiled: July 8, 2016Publication date: March 14, 2019Inventors: Glenn M. Tom, Karl W. Olander, James A. Dietz, Michael J. Wodjenski, Edward A. Sturm, Susan K. Dimascio, Luping Wang, James V. McManus, Steven M. Lurcott, Jose I. Amo, Paul J. Marganski, Joseph D. Sweeney, Shaun M. Wilson, Steven E. Bishop, Greg Nelson, Donald J. Carruthers, Sharad N. Yedave, Ying Tang, Joseph Despres, Barry Chambers, Richard Ray, Daniel Elzer
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Publication number: 20160041136Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.Type: ApplicationFiled: October 19, 2015Publication date: February 11, 2016Applicant: Entegris, Inc.Inventors: James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim, Frank DiMeo, JR.
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Patent number: 9170246Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.Type: GrantFiled: October 15, 2013Date of Patent: October 27, 2015Assignee: ENTEGRIS, INC.Inventors: James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim, Frank DiMeo, Jr.
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Patent number: 9097611Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel.Type: GrantFiled: June 7, 2011Date of Patent: August 4, 2015Assignee: ENTEGRIS, INC.Inventors: James V. McManus, James Dietz, Steven M. Lurcott
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Publication number: 20140041440Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.Type: ApplicationFiled: October 15, 2013Publication date: February 13, 2014Applicant: Advanced Technology Materials, Inc.Inventors: James DIETZ, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim, Frank Dimeo, JR.
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Patent number: 8603252Abstract: A method and apparatus for cleaning residue from components of semiconductor processing systems used in the fabrication of microelectronic devices. To effectively remove residue, the components are contacted with a gas-phase reactive material for sufficient time and under sufficient conditions to at least partially remove the residue. When the residue and the material from which the components are constructed are different, the gas-phase reactive material is selectively reactive with the residue and minimally reactive with the materials from which the components of the ion implanter are constructed. When the residue and the material from which the components are constructed is the same, then the gas-phase reactive material may be reactive with both the residue and the component part.Type: GrantFiled: April 26, 2007Date of Patent: December 10, 2013Assignee: Advanced Technology Materials, Inc.Inventors: Frank Dimeo, James Dietz, W. Karl Olander, Robert Kaim, Steven Bishop, Jeffrey W. Neuner, Jose Arno, Paul J. Marganski, Joseph D. Sweeney, David Eldridge, Sharad Yedave, Oleg Byl, Gregory T. Stauf
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Patent number: 8555705Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.Type: GrantFiled: June 28, 2011Date of Patent: October 15, 2013Assignee: Advanced Technology Materials, Inc.Inventors: James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim, Frank Dimeo, Jr.
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Publication number: 20110252883Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.Type: ApplicationFiled: June 28, 2011Publication date: October 20, 2011Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim, Frank Dimeo, JR.
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Publication number: 20110232367Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel.Type: ApplicationFiled: June 7, 2011Publication date: September 29, 2011Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: James V. McManus, James A. Dietz, Steven M. Lurcott
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Patent number: 7966879Abstract: A monitoring system (100) for monitoring fluid in a fluid supply vessel (22, 24, 26, 28, 108) during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors (114, 126) for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module (40, 132, 146) operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor (50, 150) and display (52, 150) operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.Type: GrantFiled: October 24, 2005Date of Patent: June 28, 2011Assignee: Advanced Technology Materials, Inc.Inventors: James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim, Frank Dimeo, Jr.
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Patent number: 7955797Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel.Type: GrantFiled: October 25, 2004Date of Patent: June 7, 2011Assignee: Advanced Technology Materials, Inc.Inventors: James V. McManus, James A. Dietz, Steven M. Lurcott
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Patent number: 7819981Abstract: A method and apparatus for cleaning residue from components of an ion source region of an ion implanter used in the fabrication of microelectronic devices. To effectively remove residue, the components are contacted with a gas-phase reactive halide composition for sufficient time and under sufficient conditions to at least partially remove the residue. The gas-phase reactive halide composition is chosen to react selectively with the residue, while not reacting with the components of the ion source region or the vacuum chamber.Type: GrantFiled: October 26, 2004Date of Patent: October 26, 2010Assignee: Advanced Technology Materials, Inc.Inventors: Frank DiMeo, Jr., James Dietz, W. Karl Olander, Robert Kaim, Steven E. Bishop, Jeffrey W. Neuner, Jose I. Arno
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Publication number: 20100180955Abstract: A gas cabinet including an enclosure containing at least one gas supply vessel and flow circuitry coupled to the gas supply vessel(s). The flow circuitry is constructed and arranged to flow dispensed gas from an on-stream gas supply vessel to multiple sticks of the flow circuitry, with each of the multiple sticks being joined in gas flow communication to a respective gas-utilizing process unit. The flow circuitry is valved to enable sections of the flow circuitry associated with respective ones of the multiple sticks to be isolated from other sections of the flow circuitry, so that process gas can be flowed to one or more of the sticks, while other sticks are being evacuated and purged, or otherwise are closed to dispensed gas flow therethrough.Type: ApplicationFiled: March 30, 2010Publication date: July 22, 2010Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: Michael J. Wodjenski, James Dietz
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Publication number: 20100154835Abstract: A method and apparatus for cleaning residue from components of semiconductor processing systems used in the fabrication of microelectronic devices. To effectively remove residue, the components are contacted with a gas-phase reactive material for sufficient time and under sufficient conditions to at least partially remove the residue. When the residue and the material from which the components are constructed are different, the gas-phase reactive material is selectively reactive with the residue and minimally reactive with the materials from which the components of the ion implanter are constructed. When the residue and the material from which the components are constructed is the same, then the gas-phase reactive material may be reactive with both the residue and the component part.Type: ApplicationFiled: April 26, 2007Publication date: June 24, 2010Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: Frank Dimeo, James Dietz, Karl W. Olander, Robert Kaim, Steven Bishop, Jeffrey W. Neuner, Jose Arno, Paul J. Marganski, Joseph D. Sweeney, David Eldridge, Sharad Yedave, Oleg Byl, Gregory T. Stauf
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Publication number: 20100112795Abstract: A first method for producing a doped region in a semiconductor substrate includes performing a first implant step in which a carborane cluster molecule is implanted into a semiconductor substrate to form a doped region. A second method for producing a semiconductor device having a shallow junction region includes providing a first gas and a second gas in a container. The first gas includes a first dopant and the second gas includes a second dopant. The second method also includes implanting the first and second dopants into a semiconductor substrate using an ion. The ion source is not turned off between the steps of implanting the first dopant and implanting the second dopant.Type: ApplicationFiled: September 30, 2009Publication date: May 6, 2010Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: Robert KAIM, Jose I. ARNO, James A. DIETZ
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Patent number: 7694691Abstract: A gas cabinet including an enclosure containing at least one gas supply vessel and flow circuitry coupled to the gas supply vessel(s). The flow circuitry is constructed and arranged to flow dispensed gas from an on-stream gas supply vessel to multiple sticks of the flow circuitry, with each of the multiple sticks being joined in gas flow communication to a respective gas-utilizing process unit. The flow circuitry is valved to enable sections of the flow circuitry associated with respective ones of the multiple sticks to be isolated from other sections of the flow circuitry, so that process gas can be flowed to one or more of the sticks, while other sticks are being evacuated and purged, or otherwise are closed to dispensed gas flow therethrough.Type: GrantFiled: August 5, 2008Date of Patent: April 13, 2010Assignee: Advanced Technology Materials, Inc.Inventors: Michael J. Wodjenski, James Dietz
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Publication number: 20090095713Abstract: A method and apparatus for cleaning residue from components of an ion source region of an ion implanter used in the fabrication of microelectronic devices. To effectively remove residue, the components are contacted with a gas-phase reactive halide composition for sufficient time and under sufficient conditions to at least partially remove the residue. The gas-phase reactive halide composition is chosen to react selectively with the residue, while not reacting with the components of the ion source region or the vacuum chamber.Type: ApplicationFiled: October 21, 2005Publication date: April 16, 2009Applicant: Advanced Technology Materials, Inc.Inventors: Frank Dimeo, Jr., James Dietz, W. Karl Olander, Robert Kaim, Steven E. Bishop, Jeffrey W. Neuner, Jose I. Arno
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Patent number: 7518231Abstract: A multi-chip package comprising at least a first die and a second die, wherein each die comprises an integrated circuit (IC) disposed thereon. Each of the first die and the second die comprise a plurality of contact pads coupled with the respective IC. The contact pads on the first IC comprise a first mode pad coupled to a first device formed on the first die, and the contact pads on the second IC comprise a second mode pad coupled to a second device formed on the second die. The first mode pad is coupled to a first potential and causes the first device to operate in a first mode. The second mode pad is coupled to a second potential and causes the second device to operate in a second mode. The first and second mode are selected based on the relative position of the first and second die.Type: GrantFiled: August 15, 2005Date of Patent: April 14, 2009Assignee: Infineon Technologies AGInventors: James Dietz, Petros Negussu, Thoai Thai Le
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Publication number: 20080289712Abstract: A gas cabinet including an enclosure containing at least one gas supply vessel and flow circuitry coupled to the gas supply vessel(s). The flow circuitry is constructed and arranged to flow dispensed gas from an on-stream gas supply vessel to multiple sticks of the flow circuitry, with each of the multiple sticks being joined in gas flow communication to a respective gas-utilizing process unit. The flow circuitry is valved to enable sections of the flow circuitry associated with respective ones of the multiple sticks to be isolated from other sections of the flow circuitry, so that process gas can be flowed to one or more of the sticks, while other sticks are being evacuated and purged, or otherwise are closed to dispensed gas flow therethrough.Type: ApplicationFiled: August 5, 2008Publication date: November 27, 2008Applicant: Advanced Technology Materials, Inc.Inventors: Michael J. WODJENSKI, James DIETZ