Patents by Inventor James E. Green

James E. Green has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8426305
    Abstract: The invention includes methods of fabricating integrated circuitry. In one implementation, at least two different elevation conductive metal lines are formed relative to a substrate. Then, interconnecting vias are formed in a common masking step between, a) respective of the at least two different elevation conductive metal lines, and b) respective conductive nodes. Interconnecting conductive metal is provided within the interconnecting vias. Other aspects and implementations are contemplated.
    Type: Grant
    Filed: March 22, 2011
    Date of Patent: April 23, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Hasan Nejad, James E. Green
  • Publication number: 20110171825
    Abstract: The invention includes methods of fabricating integrated circuitry. In one implementation, at least two different elevation conductive metal lines are formed relative to a substrate. Then, interconnecting vias are formed in a common masking step between, a) respective of the at least two different elevation conductive metal lines, and b) respective conductive nodes. Interconnecting conductive metal is provided within the interconnecting vias. Other aspects and implementations are contemplated.
    Type: Application
    Filed: March 22, 2011
    Publication date: July 14, 2011
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Hasan Nejad, James E. Green
  • Patent number: 7932173
    Abstract: The invention includes methods of fabricating integrated circuitry. In one implementation, at least two different elevation conductive metal lines are formed relative to a substrate. Then, interconnecting vias are formed in a common masking step between, a) respective of the at least two different elevation conductive metal lines, and b) respective conductive nodes. Interconnecting conductive metal is provided within the interconnecting vias. Other aspects and implementations are contemplated.
    Type: Grant
    Filed: May 15, 2008
    Date of Patent: April 26, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Hasan Nejad, James E. Green
  • Patent number: 7821052
    Abstract: A method for use during fabrication of a semiconductor device comprises the formation of buried digit lines and contacts. During formation, a buried bit line layer may be used as a mask to etch one or more openings in a dielectric layer. A conductive layer is then formed in the one or more openings in the dielectric layer, and is then planarized to form one or more individual contact plugs. Next, the buried bit line layer is etched to recess the buried bit line layer, and a capacitor plate is formed to contact the contact plug.
    Type: Grant
    Filed: March 20, 2008
    Date of Patent: October 26, 2010
    Assignee: Micron Technology, Inc.
    Inventors: James E. Green, Terrence B. McDaniel
  • Patent number: 7709877
    Abstract: A high surface area capacitor structure includes a storage electrode with recesses. An upper surface of the storage electrode has a maze-like appearance. Low elevation regions of a hemispherical grain polysilicon layer may remain on the upper surface of the storage electrode. The storage electrode or portions thereof may be lined or coated with dielectric material. The dielectric material may space a cell electrode of the high surface area capacitor structure apart from the storage electrode. One or both of the storage electrode and the cell electrode may be formed from polysilicon. Intermediate structures, which include mask material over contiguous low elevation regions of a layer of hemispherical grain polysilicon, which may have a maze-like appearance, and apertures located laterally between the low elevation regions of the layer of hemispherical grain polysilicon, are also disclosed.
    Type: Grant
    Filed: July 8, 2005
    Date of Patent: May 4, 2010
    Assignee: Micron Technology, Inc.
    Inventors: James E. Green, Darwin A. Clampitt
  • Patent number: 7666776
    Abstract: The invention includes methods of forming pluralities of electrically conductive structures. The methods can include formation of a gradient-containing material across a substrate and in direct physical contact with conductive surfaces of nodes. The gradient-containing material can consist essentially of tantalum nitride at a lowermost portion in contact with the conductive surfaces, consist essentially of tantalum at an uppermost portion, and have a TaN/Ta gradient extending between the lowermost and uppermost portions. Alternatively, the gradient-containing material can have a Co/W gradient extending therethrough. Conductive structures can be formed over the gradient-containing material. The invention also includes constructions comprising electrically conductive lines over a material having a TaN/Ta gradient, or a W/Co gradient, extending therethrough.
    Type: Grant
    Filed: September 1, 2005
    Date of Patent: February 23, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Dale W. Collins, Rita J. Klein, James E. Green
  • Publication number: 20100018131
    Abstract: A transportable, modular, self-contained shipping container building which has an optional means to collect, store, and distribute power from natural resources and a means to collect store, distribute and/or purify potable and/or non-potable water.
    Type: Application
    Filed: July 23, 2008
    Publication date: January 28, 2010
    Inventor: James E. Green
  • Publication number: 20080227289
    Abstract: The invention includes methods of fabricating integrated circuitry. In one implementation, at least two different elevation conductive metal lines are formed relative to a substrate. Then, interconnecting vias are formed in a common masking step between, a) respective of the at least two different elevation conductive metal lines, and b) respective conductive nodes. Interconnecting conductive metal is provided within the interconnecting vias. Other aspects and implementations are contemplated.
    Type: Application
    Filed: May 15, 2008
    Publication date: September 18, 2008
    Inventors: Hasan Nejad, James E. Green
  • Publication number: 20080164566
    Abstract: A method for use during fabrication of a semiconductor device comprises the formation of buried digit lines and contacts. During formation, a buried bit line layer may be used as a mask to etch one or more openings in a dielectric layer. A conductive layer is then formed in the one or more openings in the dielectric layer, and is then planarized to form one or more individual contact plugs. Next, the buried bit line layer is etched to recess the buried bit line layer, and a capacitor plate is formed to contact the contact plug.
    Type: Application
    Filed: March 20, 2008
    Publication date: July 10, 2008
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: James E. Green, Terrence B. McDaniel
  • Patent number: 7387959
    Abstract: The invention includes methods of fabricating integrated circuitry. In one implementation, at least two different elevation conductive metal lines are formed relative to a substrate. Then, interconnecting vias are formed in a common masking step between, a) respective of the at least two different elevation conductive metal lines, and b) respective conductive nodes. Interconnecting conductive metal is provided within the interconnecting vias. Other aspects and implementations are contemplated.
    Type: Grant
    Filed: August 22, 2005
    Date of Patent: June 17, 2008
    Assignee: Micron Technology, Inc.
    Inventors: Hasan Nejad, James E. Green
  • Patent number: 7364966
    Abstract: A method for use during fabrication of a semiconductor device comprises the formation of buried digit lines and contacts. During formation, a buried bit line layer may be used as a mask to etch one or more openings in a dielectric layer. A conductive layer is then formed in the one or more openings in the dielectric layer, and is then planarized to form one or more individual contact plugs. Next, the buried bit line layer is etched to recess the buried bit line layer, and a capacitor plate is formed to contact the contact plug.
    Type: Grant
    Filed: August 22, 2005
    Date of Patent: April 29, 2008
    Assignee: Micron Technology, Inc.
    Inventors: James E. Green, Terrence B. McDaniel
  • Patent number: 6933552
    Abstract: A honeycomb/webbed, high surface area capacitor formed by etching a storage poly using an etch mask having a plurality of micro vias. The etch mask is preferably formed by applying an HSG polysilicon layer on a surface of the storage poly with a mask layer being deposited over the HSG polysilicon layer. An upper portion of the mask layer is removed to expose the uppermost portions of the HSG polysilicon layer and the exposed HSG polysilicon layer portions are then etched, which translates the pattern of the exposed HSG polysilicon layer portions into the storage poly. The capacitor is completed by depositing a dielectric material layer over the storage poly layer and depositing a cell poly layer over the dielectric material layer.
    Type: Grant
    Filed: October 14, 1998
    Date of Patent: August 23, 2005
    Assignee: Micron Technology, Inc.
    Inventors: James E. Green, Darwin A. Clampitt
  • Patent number: 6933224
    Abstract: The invention includes methods of fabricating integrated circuitry. In one implementation, at least two different elevation conductive metal lines are formed relative to a substrate. Then, interconnecting vias are formed in a common masking step between, a) respective of the at least two different elevation conductive metal lines, and b) respective conductive nodes. Interconnecting conductive metal is provided within the interconnecting vias. Other aspects and implementations are contemplated.
    Type: Grant
    Filed: March 28, 2003
    Date of Patent: August 23, 2005
    Assignee: Micron Technology, Inc.
    Inventors: Hasan Nejad, James E. Green
  • Patent number: 6819125
    Abstract: The present invention provides a method and apparatus for detecting and locating a fault in an integrated circuit structure formed in one or more insulating layers deployed on a semiconductor substrate. The apparatus includes a probe tool capable of detecting a fault in the integrated circuit structure, a laser tool capable of forming an electrical connection between the integrated circuit structure and the semiconductor substrate, and a controller coupled to the probe tool and the laser tool, wherein the controller is capable of directing the laser tool to form the electrical connection between the integrated circuit structure and the semiconductor substrate in response to detecting the fault in the integrated circuit structure.
    Type: Grant
    Filed: July 23, 2003
    Date of Patent: November 16, 2004
    Assignee: Micron Technology, Inc.
    Inventors: James E. Green, Nicholas E. Paulin, Justin R. Arrington, Michael D. Kenney
  • Patent number: 6806576
    Abstract: An exemplary implementation of the invention is a process for forming passivation protection on a semiconductor assembly by the steps of: forming a layer of oxide over patterned metal lines having sidewalls; forming a first passivation layer of silicon nitride over the layer of oxide such that the first passivation layer of silicon nitride resides along the sidewalls of metal lines and pinches off a gap between the metal lines; performing a facet etch to remove material from the edges of the first passivation layer of silicon nitride and re-deposits some of removed material across a pinch-off junction; forming a second passivation layer of silicon nitride on the first passivation layer of silicon nitride.
    Type: Grant
    Filed: April 9, 2003
    Date of Patent: October 19, 2004
    Assignee: Micron Technology, Inc.
    Inventors: Philip J. Ireland, James E. Green
  • Publication number: 20040192028
    Abstract: The invention includes methods of fabricating integrated circuitry. In one implementation, at least two different elevation conductive metal lines are formed relative to a substrate. Then, interconnecting vias are formed in a common masking step between, a) respective of the at least two different elevation conductive metal lines, and b) respective conductive nodes. Interconnecting conductive metal is provided within the interconnecting vias. Other aspects and implementations are contemplated.
    Type: Application
    Filed: March 28, 2003
    Publication date: September 30, 2004
    Inventors: Hasan Nejad, James E. Green
  • Patent number: 6756283
    Abstract: A honeycomb/webbed, high surface area capacitor formed by etching a storage poly using an etch mask having a plurality of micro vias. The etch mask is preferably formed by applying an HSG polysilicon layer on a surface of the storage poly with a mask layer being deposited over the HSG polysilicon layer. An upper portion of the mask layer is removed to expose the uppermost portions of the HSG polysilicon layer and the exposed HSG polysilicon layer portions are then etched, which translates the pattern of the exposed HSG polysilicon layer portions into the storage poly. The capacitor is completed by depositing a dielectric material layer over the storage poly layer and depositing a cell poly layer over the dielectric material layer.
    Type: Grant
    Filed: June 13, 2002
    Date of Patent: June 29, 2004
    Assignee: Micron Technology, Inc.
    Inventors: James E. Green, Darwin A. Clampitt
  • Patent number: 6649467
    Abstract: A dynamic random access memory (DRAM) includes a plurality of memory cells aligned with one another along a pair of wordlines with each wordline being connected to access alternate ones of the memory cells. The DRAM memory cells are formed by transistor stacks that are aligned along and interconnected by wordlines extending between and included within the transistor stacks. By forming the wordlines as a part of the transistor stacks, the wordlines are narrow ribbons of conductive material. During formation of the transistor stacks, the wordlines are connected so that a first wordline controls access transistors of every other one of the memory cells and a second wordline controls the access transistors of the remaining memory cells.
    Type: Grant
    Filed: July 9, 2002
    Date of Patent: November 18, 2003
    Assignee: Micron Technology Inc.
    Inventors: Darwin A. Clampitt, James E. Green
  • Publication number: 20030205782
    Abstract: An exemplary implementation of the invention is a process for forming passivation protection on a semiconductor assembly by the steps of: forming a layer of oxide over patterned metal lines having sidewalls; forming a first passivation layer of silicon nitride over the layer of oxide such that the first passivation layer of silicon nitride resides along the sidewalls of metal lines and pinches off a gap between the metal lines; performing a facet etch to remove material from the edges of the first passivation layer of silicon nitride and re-deposits some of removed material across a pinch-off junction; forming a second passivation layer of silicon nitride on the first passivation layer of silicon nitride.
    Type: Application
    Filed: April 9, 2003
    Publication date: November 6, 2003
    Inventors: Philip J. Ireland, James E. Green
  • Patent number: 6589838
    Abstract: A semiconductor processing method of forming a capacitor construction includes, a) providing a pair of electrically conductive lines having respective electrically insulated outermost surfaces; b) providing a pair of sidewall spacers laterally outward of each of the pair of conductive lines; c) etching material over the pair of conductive lines between the respective pairs of sidewall spacers selectively relative to the sidewall spacers to form respective recesses over the pair of conductive lines relative to the sidewall spacers, the etching leaving the outermost conductive line surfaces electrically insulated; d) providing a node to which electrical connection to a capacitor is to be made between the pair of conductive lines, one sidewall spacer of each pair of sidewall spacers being closer to the node than the other sidewall spacer of each pair; e) providing an electrically conductive first capacitor plate layer over the node, the one sidewall spacers, and within the respective recesses; and f) providing a
    Type: Grant
    Filed: April 20, 2001
    Date of Patent: July 8, 2003
    Assignee: Micron Technology, Inc.
    Inventors: James E. Green, Darwin Clampitt