Patents by Inventor James Eppes

James Eppes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
    Publication number: 20070245954
    Abstract: Apparatuses, and related methods, for processing a workpiece that include a particular barrier structure that can overlie and cover a workpiece. Apparatuses, and related methods, for processing a workpiece that include a particular movable member that can be positioned over and moved relative to a workpiece. Apparatuses, and related methods, for processing a workpiece that include a particular ceiling structure that can overlie a processing chamber. Nozzle devices, and related methods, that include a particular annular body. Nozzle devices, and related methods, that include a particular first, second, and third nozzle structure.
    Type: Application
    Filed: March 15, 2006
    Publication date: October 25, 2007
    Inventors: Jimmy Collins, Samuel Cooper, James Eppes, Alan Rose, Kader Mekias
  • Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluids
    Publication number: 20070022948
    Abstract: Apparatuses, and related methods, for processing a workpiece that include particular baffle members or duct structures having an inlet proximal to an outer periphery of a workpiece and/or workpiece support.
    Type: Application
    Filed: March 15, 2006
    Publication date: February 1, 2007
    Inventors: Alan Rose, Darian Carr, James Eppes, Stephen Hanson