Abstract: A substrate processing system includes a substrate handling chamber and an integrated load lock chamber. The load lock chamber has a gated inlet for the transfer of a substrate into and out of the load lock chamber and a gated port for transferring a substrate between the load lock chamber and the substrate handling chamber. The substrate handling chamber includes a staging shelf that is positioned above the load lock chamber and a substrate handler for moving a substrate between the load lock chamber and the staging shelf. In use, a first substrate is placed at a load lock station that is located inside the load lock chamber. The first substrate is moved from the load lock station to a staging shelf located inside the substrate handling chamber. A second substrate is moved from a cooling station in the substrate handling chamber to the load lock station. A third substrate is moved from a substrate processing chamber to the cooling station.

Abstract: A substrate processing system includes a substrate handling chamber and an integrated load lock chamber. The load lock chamber has a gated inlet for the transfer of a substrate into and out of the load lock chamber and a gated port for transferring a substrate between the load lock chamber and the substrate handling chamber. The substrate handling chamber includes a staging shelf that is positioned above the load lock chamber and a substrate handler for moving a substrate between the load lock chamber and the staging shelf. In use, a first substrate is placed at a load lock station that is located inside the load lock chamber. The first substrate is moved from the load lock station to a staging shelf located inside the substrate handling chamber. A second substrate is moved from a cooling station in the substrate handling chamber to the load lock station. A third substrate is moved from a substrate processing chamber to the cooling station.

Abstract: A substrate processing system includes a substrate handling chamber and an integrated load lock chamber. The load lock chamber has a gated inlet for the transfer of a substrate into and out of the load lock chamber and a gated port for transferring a substrate between the load lock chamber and the substrate handling chamber. The substrate handling chamber includes a staging shelf that is positioned above the load lock chamber and a substrate handler for moving a substrate between the load lock chamber and the staging shelf. In use, a first substrate is placed at a load lock station that is located inside the load lock chamber. The first substrate is moved from the load lock station to a staging shelf located inside the substrate handling chamber. A second substrate is moved from a cooling station in the substrate handling chamber to the load lock station. A third substrate is moved from a substrate processing chamber to the cooling station.

Abstract: The invention is a carrier comprising three support elements connected by an underlying frame. The periphery of a wafer rests upon the support elements. The invention also comprises a wafer handler with a plurality of arms. Spacers space the carrier above a base plate associated with a station in a wafer handling area. An arm slides beneath the frame and between the spacers, but the handler does not contact the wafer. A method of using the handler and carrier is provided where the handler lifts and rotates the carrier with the wafer through various stations in a wafer handling area. A control device reduces the handler speed only at critical points of the processing cycle. The handler is capable of moving a plurality of carriers and wafers simultaneously.

Abstract: The invention is a carrier comprising three support elements connected by an underlying frame. The periphery of a wafer rests upon the support elements. The invention also comprises a wafer handler with a plurality of arms. Spacers space the carrier above a base plate associated with a station in a wafer handling area. An arm slides beneath the frame and between the spacers, but the handler does not contact the wafer. A method of using the handler and carrier is provided where the handler lifts and rotates the carrier with the wafer through various stations in a wafer handling area. The handler is capable of moving a plurality of carriers and wafers simultaneously.

Abstract: Apparatus and method are disclosed for handling a flexible disk for testing. The apparatus includes guide rails for initially positioning a disk for test. The apparatus also includes a variable speed motor for rotating the disk at a preselected rotation speed. The disk is rotated by clamping the disk betwen a motor driven rotating spindle and a retractable collet. The collet passes through an aperture in the disk to center and position the disk. Testing is accomplished by a test head assembly which is moved by a voice coil actuator. Positioning of the test head assembly is controlled by a light detector and ground glass scale coupled to the actuator and to the test head assembly.

Abstract: An automatic disk testing apparatus and method for testing flexible disks is disclosed. The apparatus includes a gravity feed disk hopper and vacuum disk plate which sequentially present a series of disks for test. Each disk drops by gravity from the vacuum disk plate to a test position including a drive mechanism. The drive mechanism rotates the disk, in its disk jacket, at a predetermined rotational speed for testing. Each disk is tested and the test results are stored in memory. After testing, the disk is automatically sorted and moved to an output location based on the test results. The sorting is accomplished by dropping the tested disk into a motor driven shuttle which conveys the disk to the proper output location and drops the disk at that location.

Abstract: An automatic disk positioning apparatus and method for its use in handling of flexible disks in an automatic testing apparatus is disclosed. The apparatus includes a gravity feed disk hopper and vacuum disk plate which sequentially present a series of disks for test. Each disk drops by gravity from the vacuum disk plate to a test position including a drive mechanism. The drive mechanism rotates the disk, in its disk jacket, at a predetermined rotational speed for testing. Each disk is tested and the test results are stored in memory. After testing the disk is automatically sorted and stored in an output container based on the test results. The sorting is accomplished by dropping the tested disk into a motor driven shuttle which conveys the disk to the proper output container and drops the disk into that container.