Patents by Inventor James F. Weygand

James F. Weygand has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Eliminating stiction with the use of cryogenic aerosol
    Patent number: 6036786
    Abstract: Stiction in a microstructure may be eliminated by directing a cryogenic aerosol at the portion of the microstructure subject to stiction with sufficient force so as to free the portion of the microstructure.
    Type: Grant
    Filed: June 11, 1997
    Date of Patent: March 14, 2000
    Assignee: FSI International Inc.
    Inventors: David Scott Becker, Ronald J. Hanestad, Gregory P. Thomes, James F. Weygand, Larry D. Zimmerman
  • Rotatable and translatable spray nozzle
    Patent number: 5942037
    Abstract: A nozzle having a series of orifices along a longitudinal length of the nozzle for processing a substrate and which is rotatably adjustable. By the nozzle design of the present invention, liquid is properly distributed along the longitudinal length of the nozzle independently of the angle of the aerosol spray. This allows for the generation of a uniform aerosol stream that is independent of spray angle. The nozzle design of the present invention improves the uniform distribution of liquid within the nozzle, which in addition to providing a more uniform liquid pooling, also substantially eliminates temporal non-uniformities across the nozzle length. Moreover, the present invention is also directed to a nozzle that is translatable in the direction toward or away from the substrate to be processed or parallel to the substrate surface.
    Type: Grant
    Filed: December 23, 1996
    Date of Patent: August 24, 1999
    Assignee: FSI International, Inc.
    Inventors: Thomas J. Wagener, Kevin L. Siefering, Pamela A. Kunkel, James F. Weygand, Gregory P. Thomes