Patents by Inventor James Francis Edward O'Sullivan

James Francis Edward O'Sullivan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of forming tungsten or tungsten containing films
    Publication number: 20040214417
    Abstract: A method of sputtering a tungsten or tungsten-containing film from a tungsten target onto a semiconductor wafer includes using krypton or xenon as a sputter gas.
    Type: Application
    Filed: March 10, 2004
    Publication date: October 28, 2004
    Inventors: Paul Rich, Stephen Robert Burgess, James Francis Edward O'Sullivan, Nicholas Rimmer