Abstract: The present invention provides a verification plate to verify the accuracy and precision of a mask inspection system in detecting contaminated particles. The verification plate is developed on a substrate having a plurality of predefined glass, i.e., transparent, and chrome, i.e., opaque, patterns. A predetermined number of verification particles each with a predefined size, shape, and location are securely disposed on these glass-chrome patterns. The verification plate is preferably produced having both the glass-chrome patterns and the particles arranged in an orderly manner such that a verification process can be automated under the control of a computer program.