Abstract: A method or system of spatial-phase locking a beam used in maskless lithography provides a fiducial grid with a single spatial-period, the fiducial grid being rotated at an angle with respect to a direction of scanning the beam; detects a signal generated in response to the beam being incident upon the fiducial grid; determines frequency components of the detected signal; and determines a two-dimensional location of the beam from phases of two determined fundamental frequency component. The method or system further determines a size of the beam from relative amplitudes of the determined fundamental and harmonic frequency components and/or determine a shape of the beam from relative amplitudes of the determined fundamental and harmonic frequency components. The method or system corrects a deflection of the beam in response to the determined two-dimensional location, and/or adjusts the size of the beam in response to the determined size, and/or adjusts the shape of the beam in response to the determined shape.

Abstract: This invention relates to a tunable solid-state laser which generates ultrashort output pulses with continuous wave pumping. The device includes a lasing medium having a gain cross section of 10.sup.-18 cm.sup.2 or less and mode beating characteristics, which lasing medium is mounted in a laser cavity. A continuous wave pumping beam is applied to the lasing medium causing an output, a portion of which is applied to an intensity dependent nonlinear cavity. The output applied to the nonlinear cavity is retroreflected back through the cavity and is interferometrically combined with the laser output. The relative lengths of the cavities are initially selected such that phase changes caused by the nonlinear medium result in substantially maximum enhancement of intensity peaks of the laser output, causing self starting of pulsed operation.