Patents by Inventor James H. Beatty

James H. Beatty has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing a semiconductor device having improved transistor performance
    Patent number: 8053324
    Abstract: In one aspect provides a method of manufacturing a semiconductor device having improved transistor performance. In one aspect, this improvement is achieved by conducting a pre-deposition spacer deposition process wherein a temperature of a bottom region of a furnace is higher than a temperature of in the top region and is maintained for a predetermined period. The pre-deposition temperature is changed to a deposition temperature, wherein a temperature of the bottom region is lower than a temperature of the top region.
    Type: Grant
    Filed: August 1, 2007
    Date of Patent: November 8, 2011
    Assignee: Texas Instruments Incorporated
    Inventors: Bradley D. Sucher, Christopher S. Whitesell, Joshua J. Hubregsen, James H. Beatty
  • Method of Manufacturing a Semiconductor Device Having Improved Transistor Performance
    Publication number: 20110129979
    Abstract: In one aspect provides a method of manufacturing a semiconductor device having improved transistor performance. In one aspect, this improvement is achieved by conducting a pre-deposition spacer deposition process wherein a temperature of a bottom region of a furnace is higher than a temperature of in the top region and is maintained for a predetermined period. The pre-deposition temperature is changed to a deposition temperature, wherein a temperature of the bottom region is lower than a temperature of the top region.
    Type: Application
    Filed: August 1, 2007
    Publication date: June 2, 2011
    Applicant: Texas Instruments Inc.
    Inventors: Bradley D. Sucher, Christopher S. Whitesell, Joshua J. Hubregsen, James H. Beatty