Patents by Inventor James H. Crouch

James H. Crouch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output
    Patent number: 9119278
    Abstract: An extreme ultraviolet light system and method includes a drive laser, a chamber including an extreme ultraviolet light collector and a target material dispenser including an adjustable target material outlet capable of outputting multiple portions of target material along a target material path. Also included: a drive laser steering device, a detection system including at least one detector and a controller coupled to the target material dispenser, the detector system and the drive laser steering device. The controller includes logic for detecting a location of the first portion of target material from the first light reflected from the first portion of target material and logic for adjusting the target material dispenser outlet to output a subsequent portion of target material to a waist of the focused drive laser. A system and a method for optimizing an extreme ultraviolet light output is also disclosed.
    Type: Grant
    Filed: December 17, 2013
    Date of Patent: August 25, 2015
    Assignee: ASML Netherlands B.V.
    Inventors: Christopher C. Chrobak, William N. Partlo, Igor V Fomenkov, Alexander I. Ershov, James H. Crouch
  • System, Method and Apparatus for Aligning and Synchronizing Target Material for Optimum Extreme Ultraviolet Light Output
    Publication number: 20140103229
    Abstract: An extreme ultraviolet light system and method includes a drive laser, a chamber including an extreme ultraviolet light collector and a target material dispenser including an adjustable target material outlet capable of outputting multiple portions of target material along a target material path. Also included: a drive laser steering device, a detection system including at least one detector and a controller coupled to the target material dispenser, the detector system and the drive laser steering device. The controller includes logic for detecting a location of the first portion of target material from the first light reflected from the first portion of target material and logic for adjusting the target material dispenser outlet to output a subsequent portion of target material to a waist of the focused drive laser. A system and a method for optimizing an extreme ultraviolet light output is also disclosed.
    Type: Application
    Filed: December 17, 2013
    Publication date: April 17, 2014
    Applicant: Cymer, LLC
    Inventors: Christopher C. Chroback, William N. Partlo, Igor V Fomenkov, Alexander I. Ershov, James H. Crouch
  • System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output
    Patent number: 8653491
    Abstract: An extreme ultraviolet light system and method includes a drive laser, a chamber including an extreme ultraviolet light collector and a target material dispenser including an adjustable target material outlet capable of outputting multiple portions of target material along a target material path. Also included: a drive laser steering device, a detection system including at least one detector and a controller coupled to the target material dispenser, the detector system and the drive laser steering device. The controller includes logic for detecting a location of the first portion of target material from the first light reflected from the first portion of target material and logic for adjusting the target material dispenser outlet to output a subsequent portion of target material to a waist of the focused drive laser. A system and a method for optimizing an extreme ultraviolet light output is also disclosed.
    Type: Grant
    Filed: March 16, 2010
    Date of Patent: February 18, 2014
    Assignee: Cymer, Inc.
    Inventors: William N. Partlo, Igor V. Fomenkov, Alexander I. Ershov, Chris C. Chrobak, James H. Crouch
  • SYSTEM, METHOD AND APPARATUS FOR ALIGNING AND SYNCHRONIZING TARGET MATERIAL FOR OPTIMUM EXTREME ULTRAVIOLET LIGHT OUTPUT
    Publication number: 20100258750
    Abstract: An extreme ultraviolet light system includes a drive laser system, an extreme ultraviolet light chamber including an extreme ultraviolet light collector and a target material dispenser including a target material outlet capable of outputting a plurality of portions of target material along a target material path, wherein the target material outlet is adjustable. The extreme ultraviolet light system further includes a drive laser steering device, a detection system including at least one detector directed to detect a reflection of the drive laser reflected from the first one of the plurality of portions of target material and a controller coupled to the target material dispenser, the detector system and the drive laser steering device.
    Type: Application
    Filed: March 16, 2010
    Publication date: October 14, 2010
    Inventors: William N. Partlo, Igor V. Fomenkov, Alexander I. Ershov, Chris C. Chrobak, James H. Crouch