Patents by Inventor James H. Ewing
James H. Ewing has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 5553188Abstract: A liquid vaporizer includes a stack of coaxially aligned, thermally conductive, thin, flat disks having different diameters. The larger diameter disks each include at least one aperture and preferably a plurality of closely spaced apertures radially located a predetermined distance from the center of the disk. The vaporizer further includes means for establishing a liquid film on at least a portion of the surfaces of the larger diameter disks and for accelerating the vaporization of the liquid thereon by passing a gas through the apertures of the larger diameter disks over the liquid film on the portion of the surfaces of the larger diameter disks.Type: GrantFiled: February 24, 1995Date of Patent: September 3, 1996Assignee: MKS Instruments, Inc.Inventor: James H. Ewing
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Patent number: 5437542Abstract: An improved positive displacement pumping system uses a pair of pumps operating in opposition to one another to provide continuous and constant volumetric flow at a constant predetermined pressure.Type: GrantFiled: March 22, 1994Date of Patent: August 1, 1995Assignee: MKS Instruments, Inc.Inventor: James H. Ewing
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Patent number: 5371828Abstract: An improved vaporization system includes an automated valve and positive displacement pumping system using a pair of pumps operating in opposition to one another to provide continuous and constant volumetric flow at a constant predetermined pressure to an improved vaporizer using a stack of heated disks to flash vaporize the liquid. The valves are improved by providing one way flow.Type: GrantFiled: August 28, 1991Date of Patent: December 6, 1994Assignee: MKS Instruments, Inc.Inventor: James H. Ewing
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Patent number: 5361800Abstract: An improved vaporization system includes an automated valve and positive displacement pumping system using a pair of pumps operating in opposition to one another to provide continuous and constant volumetric flow at a constant predetermined pressure to an improved vaporizer using a stack of heated disks to flash vaporize the liquid. The valves are improved by providing one way flow.Type: GrantFiled: July 23, 1993Date of Patent: November 8, 1994Assignee: MKS Instruments, Inc.Inventor: James H. Ewing
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Patent number: 5040559Abstract: A system is utilized for controlling the flow of process fluid between an input port and an output port of a valve. A first mechanism controls the modulation of the valve and a second mechanism controls the positive shutoff. An electrical system is responsible for modulation adjustments and a pneumatic system is responsible for positive shutoff control. A third, hydraulic, system is responsible for equalizing the pressure of the process fluid within the valve.Type: GrantFiled: March 23, 1990Date of Patent: August 20, 1991Assignee: MKS Instruments, Inc.Inventor: James H. Ewing
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Patent number: 4796854Abstract: A proportional-control solenoid-actuated fluid valve, capable of governing relatively large volumes and rates of flow swiftly and accurately with expenditure of relatively little electrical power, includes a movable valving member positioned by an armature having a substantially frictionless spring suspension, the armature being under influence of a special force-counterbalancer in the form of a bellows proportioned and disposed to exert upon it, automatically, neutralizing forces which are substantially equal and opposite to unavoidable pressure-induced imbalances afflicting the valving member. The same pressures which tend to unbalance the valve member are impressed upon opposite sides of the bellows, one through an enabling bleed port, and resulting forces developed by the bellows over a defined area are exerted upon the armature mechanically in a counterbalancing sense.Type: GrantFiled: May 18, 1987Date of Patent: January 10, 1989Assignee: MKS Instruments, Inc.Inventor: James H. Ewing
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Patent number: 4679585Abstract: An electrically-actuated fluid-flow control valve employed to establish and maintain prescribed flow conditions with the aid of a fast-response flowmeter is caused to operate swiftly, accurately and reliably by way of unique electrical circuitry which selectively enhances responses to low-level signals and cooperatively induces electromechanical oscillations offsetting hysteresis of the valve armature suspension. In a preferred context of a system wherein a thermal flowmeter is used to actuate a solenoid valve and thereby cause actual flow conditions to agree with those prescribed by operator-controlled settings, normal sluggishness of responses to low-level electrical signals is overcome by circuitry which under appropriate circumstances automatically exercises logic to command that the valve be disproportionately energized to effect immediate strong action which will reliably and quickly bring about intended and accurate change in flow.Type: GrantFiled: January 10, 1986Date of Patent: July 14, 1987Assignee: MKS Instruments, Inc.Inventor: James H. Ewing
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Patent number: 4571801Abstract: In a compact thermal flowmeter unit of the type wherein a portion of the fluid in a main flow path is shunted through a laminar-flow sensor passageway, that section of the main flow path which the sensor bypasses is occupied by an appropriate range-governing cartridge selected from among a family of externally-similar tubular flow-regulating cartridges each having a different flow capacity as determined by the totals of cross-sectional areas of its plurality of linear flow channels each exhibiting an effective ratio of length to cross-section which promotes laminar flow but is nevertheless advantageously relatively short.Type: GrantFiled: November 30, 1984Date of Patent: February 25, 1986Assignee: MKS Instruments, Inc.Inventor: James H. Ewing
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Patent number: 4522058Abstract: In a compact thermal flowmeter unit of the type wherein a portion of the fluid in a main flow path is shunted through a laminar-flow sensor passageway, that section of the main flow path which the sensor bypasses is occupied by an appropriate range-governing cartridge selected from among a family of externally-similar tubular flow-regulating cartridges each having a different flow capacity as determined by the totals of cross-sectional areas of its plurality of linear flow channels each exhibiting an effective ratio of length to cross-section which promotes laminar flow but is nevertheless advantageously relatively short.Type: GrantFiled: June 15, 1983Date of Patent: June 11, 1985Assignee: MKS Instruments, Inc.Inventor: James H. Ewing
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Patent number: 4464932Abstract: Metering and related control of fluid flow are achieved both accurately and at high response speed by way of a unique sequencing of thermal exchanges with the fluid under closely-regulated and inter-dependent thermal conditions. The flowing fluid is first conditioned by being raised to a temperature above its highest anticipated ambient, preferably by way of a temperature-sensitive electrical heater resistance which is part of an exceptional self-balancing bridge and control-loop network, and the conditioned fluid is then similarly increased to yet higher temperature, with measurements related to energy involved in producing the second temperature increase being used to characterize the flow.Type: GrantFiled: July 12, 1982Date of Patent: August 14, 1984Assignee: MKS Instruments, Inc.Inventors: James H. Ewing, Fred G. Ramberg
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Patent number: 4327894Abstract: Servo control of a butterfly valve or the like, in which fluid flow is inherently non-linearly related to angular orientations of a vane or plug member, is effected through a function-generator mechanism interposed to render the system transfer function substantially constant. A function generator serving those purposes includes a mechanical cam-and-follower unit through which valve-controlling angular movements are maintained in a cosine-related slaving with angular movements of the rotor of an electrical servo motor.Type: GrantFiled: May 21, 1980Date of Patent: May 4, 1982Assignee: MKS Instruments, Inc.Inventors: James H. Ewing, William R. Clark
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Patent number: 4008619Abstract: Monitoring of gas contamination and of related deviations in pressures within a sealed cavity is effected by way of electrical-network responses to conduction characteristics of a thin-film deposit of getter material within the cavity, the getter film being deposited upon inert insulation between conductive contacts externally connected into an electrical circuit which controls related output signalling in accordance with conductance changes caused by getter material reactions with gas within the cavity.Type: GrantFiled: November 17, 1975Date of Patent: February 22, 1977Assignee: MKS Instruments, Inc.Inventors: H. David Alcaide, James H. Ewing