Patents by Inventor James H. Ewing

James H. Ewing has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5553188
    Abstract: A liquid vaporizer includes a stack of coaxially aligned, thermally conductive, thin, flat disks having different diameters. The larger diameter disks each include at least one aperture and preferably a plurality of closely spaced apertures radially located a predetermined distance from the center of the disk. The vaporizer further includes means for establishing a liquid film on at least a portion of the surfaces of the larger diameter disks and for accelerating the vaporization of the liquid thereon by passing a gas through the apertures of the larger diameter disks over the liquid film on the portion of the surfaces of the larger diameter disks.
    Type: Grant
    Filed: February 24, 1995
    Date of Patent: September 3, 1996
    Assignee: MKS Instruments, Inc.
    Inventor: James H. Ewing
  • Patent number: 5437542
    Abstract: An improved positive displacement pumping system uses a pair of pumps operating in opposition to one another to provide continuous and constant volumetric flow at a constant predetermined pressure.
    Type: Grant
    Filed: March 22, 1994
    Date of Patent: August 1, 1995
    Assignee: MKS Instruments, Inc.
    Inventor: James H. Ewing
  • Patent number: 5371828
    Abstract: An improved vaporization system includes an automated valve and positive displacement pumping system using a pair of pumps operating in opposition to one another to provide continuous and constant volumetric flow at a constant predetermined pressure to an improved vaporizer using a stack of heated disks to flash vaporize the liquid. The valves are improved by providing one way flow.
    Type: Grant
    Filed: August 28, 1991
    Date of Patent: December 6, 1994
    Assignee: MKS Instruments, Inc.
    Inventor: James H. Ewing
  • Patent number: 5361800
    Abstract: An improved vaporization system includes an automated valve and positive displacement pumping system using a pair of pumps operating in opposition to one another to provide continuous and constant volumetric flow at a constant predetermined pressure to an improved vaporizer using a stack of heated disks to flash vaporize the liquid. The valves are improved by providing one way flow.
    Type: Grant
    Filed: July 23, 1993
    Date of Patent: November 8, 1994
    Assignee: MKS Instruments, Inc.
    Inventor: James H. Ewing
  • Patent number: 5040559
    Abstract: A system is utilized for controlling the flow of process fluid between an input port and an output port of a valve. A first mechanism controls the modulation of the valve and a second mechanism controls the positive shutoff. An electrical system is responsible for modulation adjustments and a pneumatic system is responsible for positive shutoff control. A third, hydraulic, system is responsible for equalizing the pressure of the process fluid within the valve.
    Type: Grant
    Filed: March 23, 1990
    Date of Patent: August 20, 1991
    Assignee: MKS Instruments, Inc.
    Inventor: James H. Ewing
  • Patent number: 4796854
    Abstract: A proportional-control solenoid-actuated fluid valve, capable of governing relatively large volumes and rates of flow swiftly and accurately with expenditure of relatively little electrical power, includes a movable valving member positioned by an armature having a substantially frictionless spring suspension, the armature being under influence of a special force-counterbalancer in the form of a bellows proportioned and disposed to exert upon it, automatically, neutralizing forces which are substantially equal and opposite to unavoidable pressure-induced imbalances afflicting the valving member. The same pressures which tend to unbalance the valve member are impressed upon opposite sides of the bellows, one through an enabling bleed port, and resulting forces developed by the bellows over a defined area are exerted upon the armature mechanically in a counterbalancing sense.
    Type: Grant
    Filed: May 18, 1987
    Date of Patent: January 10, 1989
    Assignee: MKS Instruments, Inc.
    Inventor: James H. Ewing
  • Patent number: 4679585
    Abstract: An electrically-actuated fluid-flow control valve employed to establish and maintain prescribed flow conditions with the aid of a fast-response flowmeter is caused to operate swiftly, accurately and reliably by way of unique electrical circuitry which selectively enhances responses to low-level signals and cooperatively induces electromechanical oscillations offsetting hysteresis of the valve armature suspension. In a preferred context of a system wherein a thermal flowmeter is used to actuate a solenoid valve and thereby cause actual flow conditions to agree with those prescribed by operator-controlled settings, normal sluggishness of responses to low-level electrical signals is overcome by circuitry which under appropriate circumstances automatically exercises logic to command that the valve be disproportionately energized to effect immediate strong action which will reliably and quickly bring about intended and accurate change in flow.
    Type: Grant
    Filed: January 10, 1986
    Date of Patent: July 14, 1987
    Assignee: MKS Instruments, Inc.
    Inventor: James H. Ewing
  • Patent number: 4571801
    Abstract: In a compact thermal flowmeter unit of the type wherein a portion of the fluid in a main flow path is shunted through a laminar-flow sensor passageway, that section of the main flow path which the sensor bypasses is occupied by an appropriate range-governing cartridge selected from among a family of externally-similar tubular flow-regulating cartridges each having a different flow capacity as determined by the totals of cross-sectional areas of its plurality of linear flow channels each exhibiting an effective ratio of length to cross-section which promotes laminar flow but is nevertheless advantageously relatively short.
    Type: Grant
    Filed: November 30, 1984
    Date of Patent: February 25, 1986
    Assignee: MKS Instruments, Inc.
    Inventor: James H. Ewing
  • Patent number: 4522058
    Abstract: In a compact thermal flowmeter unit of the type wherein a portion of the fluid in a main flow path is shunted through a laminar-flow sensor passageway, that section of the main flow path which the sensor bypasses is occupied by an appropriate range-governing cartridge selected from among a family of externally-similar tubular flow-regulating cartridges each having a different flow capacity as determined by the totals of cross-sectional areas of its plurality of linear flow channels each exhibiting an effective ratio of length to cross-section which promotes laminar flow but is nevertheless advantageously relatively short.
    Type: Grant
    Filed: June 15, 1983
    Date of Patent: June 11, 1985
    Assignee: MKS Instruments, Inc.
    Inventor: James H. Ewing
  • Patent number: 4464932
    Abstract: Metering and related control of fluid flow are achieved both accurately and at high response speed by way of a unique sequencing of thermal exchanges with the fluid under closely-regulated and inter-dependent thermal conditions. The flowing fluid is first conditioned by being raised to a temperature above its highest anticipated ambient, preferably by way of a temperature-sensitive electrical heater resistance which is part of an exceptional self-balancing bridge and control-loop network, and the conditioned fluid is then similarly increased to yet higher temperature, with measurements related to energy involved in producing the second temperature increase being used to characterize the flow.
    Type: Grant
    Filed: July 12, 1982
    Date of Patent: August 14, 1984
    Assignee: MKS Instruments, Inc.
    Inventors: James H. Ewing, Fred G. Ramberg
  • Patent number: 4327894
    Abstract: Servo control of a butterfly valve or the like, in which fluid flow is inherently non-linearly related to angular orientations of a vane or plug member, is effected through a function-generator mechanism interposed to render the system transfer function substantially constant. A function generator serving those purposes includes a mechanical cam-and-follower unit through which valve-controlling angular movements are maintained in a cosine-related slaving with angular movements of the rotor of an electrical servo motor.
    Type: Grant
    Filed: May 21, 1980
    Date of Patent: May 4, 1982
    Assignee: MKS Instruments, Inc.
    Inventors: James H. Ewing, William R. Clark
  • Patent number: 4008619
    Abstract: Monitoring of gas contamination and of related deviations in pressures within a sealed cavity is effected by way of electrical-network responses to conduction characteristics of a thin-film deposit of getter material within the cavity, the getter film being deposited upon inert insulation between conductive contacts externally connected into an electrical circuit which controls related output signalling in accordance with conductance changes caused by getter material reactions with gas within the cavity.
    Type: Grant
    Filed: November 17, 1975
    Date of Patent: February 22, 1977
    Assignee: MKS Instruments, Inc.
    Inventors: H. David Alcaide, James H. Ewing