Abstract: An electrostatic precipitator includes: a chamber having an inlet configured to receive an effluent stream for treatment and an outlet configured to convey a treated effluent stream; and an electrode structure housed within the chamber, the electrode structure being operable to generate a corona for treating the effluent stream to produce the treated effluent stream, wherein the electrode structure includes a comb structure having a shaft and a plurality of teeth extending from the shaft, the corona being generated at a free tip of each tooth in response to a voltage when applied across the electrode structure and the chamber The electrode teeth provide a reduced area from which the corona is generated, thereby improving the corona, but also the reduced size of the electrode teeth compared to existing electrode structures provides a reduced area for the accumulation of particulates and facilitates the shedding of those particulates from the electrodes.

Abstract: A tool for removing a quartz insert from an exhaust port of a semiconductor process chamber. In one embodiment, the tool of the present invention comprises a pair of generally elongated members (a first elongated member and a second elongated member) that are hingedly attached at a middle portion of each member. The first elongated member includes a first handle portion and a first end portion that are located on opposite ends of the middle portion of the elongated member. The second elongated member includes a second handle portion and a second end portion. The first and second handle portions are of sufficient length so as to be gripped by a user. A first head and a second head are pivotally attached to the first and second end portion of the first and second elongated members, respectively.

Abstract: A tool for removing a quartz insert from an exhaust port of a semiconductor process chamber. In one embodiment, the tool of the present invention comprises a pair of generally elongated members (a first elongated member and a second elongated member) that are hingedly attached at a middle portion of each member. The first elongated member includes a first handle portion and a first end portion that are located on opposite ends of the middle portion of the elongated member. The second elongated member includes a second handle portion and a second end portion. The first and second handle portions are of sufficient length so as to be gripped by a user. A first head and a second head are pivotally attached to the first and second end portion of the first and second elongated members, respectively.