Abstract: A LIDAR sensor includes a fiber laser configured to emit an electromagnetic pulse through a fiber cable, and a fiber cable splitter to split the fiber cable into a first fiber cable and a second fiber cable. The electromagnetic pulse is split into an output pulse that propagates through the first fiber cable and a calibration pulse that propagates through the second fiber cable. The LIDAR sensor includes a pulse receiving sensor configured to detect the calibration pulse and a second pulse corresponding to the output pulse being reflected by a surface external from the LiDAR sensor. A processor is included to receive information from the pulse receiving sensor indicating a position of the surface relative to the LiDAR sensor. The processor further measures an intensity of the calibration pulse and determines a reflectance of the surface based at least in part on the intensity of the calibration pulse.

Abstract: A LIDAR sensor includes a fiber laser configured to emit an electromagnetic pulse through a fiber cable, and a fiber cable splitter to split the fiber cable into a first fiber cable and a second fiber cable. The electromagnetic pulse is split into an output pulse that propagates through the first fiber cable and a calibration pulse that propagates through the second fiber cable. The LIDAR sensor includes a pulse receiving sensor configured to detect the calibration pulse and a second pulse corresponding to the output pulse being reflected by a surface external from the LiDAR sensor. A processor is included to receive information from the pulse receiving sensor indicating a position of the surface relative to the LiDAR sensor. The processor further measures an intensity of the calibration pulse and determines a reflectance of the surface based at least in part on the intensity of the calibration pulse.

Abstract: A LiDAR sensor can include a laser, a directional sensor, a window, an electromagnetic pulse receiving sensor, and a processor. The laser can be configured to emit a narrow electromagnetic pulse. Further, the directional sensor can be configured to measure the direction of the narrow electromagnetic pulse emitted by the laser. The narrow emitted electromagnetic pulse can pass through the window. The pulse can then be reflected by at least the window and an object external from the LiDAR sensor, creating at least two reflected pulses. The electromagnetic pulse receiving sensor can be configured to measure the two reflected pulses resulting from the narrow pulse emitted by the laser. The processor can be configured to receive information from the sensors, indicating a position of the object relative to the LiDAR sensor. Further, the processor can be configured to measure the intensity of the pulse being reflected by the window.

Abstract: A light detection and ranging (LiDAR) sensor includes a single-mode fiber positioned to receive the outputted light from a laser. The LiDAR also includes an optical circulator, a multi-clad fiber, a first optical detector positioned to receive reflected light from an inner cladding of the multi-clad fiber, and a second optical detector positioned to receive the reflected light from a core of the multi-clad fiber.

Abstract: A LiDAR sensor can include a laser configured to output electromagnetic pulses and an optical splitter positioned to split each of the electromagnetic pulses into (i) at least one calibration pulse, and (ii) at least one external pulse directed toward an object external from the LiDAR sensor. The LiDAR sensor can further include a photodetector configured to detect the at least one calibration pulse and a reflected pulse based on the at least one external pulse reflecting from the object. The LiDAR sensor can further include a processor configured to adjust a bias voltage of the photodetector based on the at least one calibration pulse.

Abstract: A LiDAR sensor can be provided having a laser, optical circulator, amplifying section, photosensor, and an electronic circuit. The laser can be configured to emit a brief electromagnetic pulse. The optical circulator can be positioned to receive the brief electromagnetic pulse from the laser and direct the brief electromagnetic pulse on an optical path towards an object. The optical circulator can also be configured to receive a reflected pulse from the object caused by the brief electromagnetic pulse. The amplifying section can be positioned to receive the reflected pulse from the optical circulator and be configured to optically amplify the reflected pulse to create an amplified reflected pulse. The photosensor can be positioned to receive the amplified reflected pulse from the amplifying section, and to produce a signal in response to the amplified reflected pulse.

Abstract: A light detection and ranging (LiDAR) sensor includes a single-mode fiber positioned to receive the outputted light from a laser. The LiDAR also includes an optical circulator, a multi-clad fiber, a first optical detector positioned to receive reflected light from an inner cladding of the multi-clad fiber, and a second optical detector positioned to receive the reflected light from a core of the multi-clad fiber.

Abstract: Methods and apparatus for light detecting and range sensing. In one approach, a light detecting and ranging (LiDAR) sensor uses an optical directing device; a multi-clad optical fiber, a light source, and a detector. The light source is optically coupled to the multi-clad optical fiber which is configured to receive optical rays transmitted from the light source and route the rays on an optical path leading to the optical directing device. The optical directing device is configured both to direct the transmitted optical rays routed through the multi-clad fiber towards a target to be sensed and direct optical rays reflected from the target on an optical path leading to the multi-clad optical fiber. The multi-clad optical fiber is configured to receive the reflected optical rays and route the reflected optical rays on an optical path leading to the detector. The detector is configured to detect the reflected optical rays.

Abstract: A LiDAR sensor can include a laser configured to output electromagnetic pulses and an optical splitter positioned to split each of the electromagnetic pulses into (i) at least one calibration pulse, and (ii) at least one external pulse directed toward an object external from the LiDAR sensor. The LiDAR sensor can further include a photodetector configured to detect the at least one calibration pulse and a reflected pulse based on the at least one external pulse reflecting from the object. The LiDAR sensor can further include a processor configured to adjust a bias voltage of the photodetector based on the at least one calibration pulse.

Abstract: A LiDAR can include a laser, an avalanche photodiode, a splitter, and a processor. The laser can be configured to emit a narrow electromagnetic pulse. The avalanche photodiode can be configured to receive one or more electromagnetic pulses and output a response signal in response to said pulses. The photodiode can also be positioned to receive at least one reflected pulse, reflected by an object external from the LiDAR sensor and caused by the laser. The avalanche photodiode can also have a bias voltage applied to it affecting the response signal. The splitter can be positioned to receive the narrow electromagnetic pulse and split it into at least one external pulse directed toward the object external from the LiDAR sensor and at least one calibration pulse directed toward the photodiode. The calibration pulse directed toward the photodiode can be received by the photodiode before the pulse reflected by the object. The processor can be configured to receive response signals from the photodiode.

Abstract: A LiDAR sensor can include a laser, a directional sensor, a window, an electromagnetic pulse receiving sensor, and a processor. The laser can be configured to emit a narrow electromagnetic pulse. Further, the directional sensor can be configured to measure the direction of the narrow electromagnetic pulse emitted by the laser. The narrow emitted electromagnetic pulse can pass through the window. The pulse can then be reflected by at least the window and an object external from the LiDAR sensor, creating at least two reflected pulses. The electromagnetic pulse receiving sensor can be configured to measure the two reflected pulses resulting from the narrow pulse emitted by the laser. The processor can be configured to receive information from the sensors, indicating a position of the object relative to the LiDAR sensor. Further, the processor can be configured to measure the intensity of the pulse being reflected by the window.

Abstract: A LiDAR can include a laser, an avalanche photodiode, a splitter, and a processor. The laser can be configured to emit a narrow electromagnetic pulse. The avalanche photodiode can be configured to receive one or more electromagnetic pulses and output a response signal in response to said pulses. The photodiode can also be positioned to receive at least one reflected pulse, reflected by an object external from the LiDAR sensor and caused by the laser. The avalanche photodiode can also have a bias voltage applied to it affecting the response signal. The splitter can be positioned to receive the narrow electromagnetic pulse and split it into at least one external pulse directed toward the object external from the LiDAR sensor and at least one calibration pulse directed toward the photodiode. The calibration pulse directed toward the photodiode can be received by the photodiode before the pulse reflected by the object. The processor can be configured to receive response signals from the photodiode.

Abstract: A LiDAR sensor can include a laser, a directional sensor, a window, an electromagnetic pulse receiving sensor, and a processor. The laser can be configured to emit a narrow electromagnetic pulse. Further, the directional sensor can be configured to measure the direction of the narrow electromagnetic pulse emitted by the laser. The narrow emitted electromagnetic pulse can pass through the window. The pulse can then be reflected by at least the window and an object external from the LiDAR sensor, creating at least two reflected pulses. The electromagnetic pulse receiving sensor can be configured to measure the two reflected pulses resulting from the narrow pulse emitted by the laser. The processor can be configured to receive information from the sensors, indicating a position of the object relative to the LiDAR sensor. Further, the processor can be configured to measure the intensity of the pulse being reflected by the window.

Abstract: Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion.

Abstract: A LiDAR sensor can include a laser, a directional sensor, a window, an electromagnetic pulse receiving sensor, and a processor. The laser can be configured to emit a narrow electromagnetic pulse. Further, the directional sensor can be configured to measure the direction of the narrow electromagnetic pulse emitted by the laser. The narrow emitted electromagnetic pulse can pass through the window. The pulse can then be reflected by at least the window and an object external from the LiDAR sensor, creating at least two reflected pulses. The electromagnetic pulse receiving sensor can be configured to measure the two reflected pulses resulting from the narrow pulse emitted by the laser. The processor can be configured to receive information from the sensors, indicating a position of the object relative to the LiDAR sensor. Further, the processor can be configured to measure the intensity of the pulse being reflected by the window.

Abstract: According to one aspect, an optical apparatus for a light detecting and ranging (LiDAR) sensing system is provided. The optical apparatus can comprise an optical directing device; and a multi clad optical fiber, wherein said multi clad optical fiber comprises a core, at least one inner cladding, and an outer cladding. The core is arranged to receive optical rays transmitted from a light source of said sensing system and route said transmitted optical rays on an optical path leading to optical directing device. The optical directing device is configured both to direct said routed transmitted optical rays on an optical path leading to a target to be sensed and direct optical rays reflected from said target on an optical path leading to said inner cladding of said multi clad optical fiber. The inner cladding is configured to receive said reflected optical rays and route said reflected optical rays on an optical path leading to a detector for receiving reflected optical rays of said sensing system.

Abstract: Methods and apparatus for light detecting and range sensing. In one approach, a light detecting and ranging (LiDAR) sensor uses an optical directing device; a multi-clad optical fiber, a light source, and a detector. The light source is optically coupled to the multi-clad optical fiber which is configured to receive optical rays transmitted from the light source and route the rays on an optical path leading to the optical directing device. The optical directing device is configured both to direct the transmitted optical rays routed through the multi-clad fiber towards a target to be sensed and direct optical rays reflected from the target on an optical path leading to the multi-clad optical fiber. The multi-clad optical fiber is configured to receive the reflected optical rays and route the reflected optical rays on an optical path leading to the detector. The detector is configured to detect the reflected optical rays.

Abstract: Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion.

Abstract: Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion.

Abstract: Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion.