Abstract: Method for removing deposited material from the interior surfaces of a processing chamber. The method comprises introducing a gas mixture comprising less than 15 mole % nitrogen trifluoride in a diluent gas into a processing chamber having deposited material on the internal surfaces thereof, establishing a plasma in the processing chamber utilizing a radio frequency power density of greater than 1.4 W/cm2 and forming chemically reactive fluorine-containing species therein, reacting the deposited material with the chemically reactive fluorine-containing species to yield volatile reaction products, and removing the volatile reaction products from the processing chamber.

Abstract: A method for the separation and recovery of fluorochemicals from a gas stream containing a diluent gas and fluorochemicals by first contacting the gas stream with a membrane system in one or more stages where the membrane(s) is selectively more permeable to the diluent gas than the fluorochemicals to result in a permeate stream rich in diluent gas and retentate rich in fluorochemicals, thereafter subjecting retentate the gas stream to a purification by distillation or adsorption resulting in a product stream enriched in fluorochemicals and a purified diluent stream. The purified diluent stream is used as a purge stream and/or a recycle stream together with the permeate stream to a vacuum pump upstream of the membrane separation step.

Abstract: A process for the separation and recovery of fluorochemicals from a gas stream containing a diluent gas and fluorochemicals by contact of the gas stream with a membrane system in combination with an adsorption system, the adsorption system used either before or after the membrane system.

Abstract: A method for the separation and recovery of fluorochemicals from a gas stream containing a diluent gas and fluorochemicals by contact of the gas stream with a membrane, comprising the steps of: compressing a gas stream containing a diluent gas and fluorochemicals to an elevated pressure; heating the gas stream containing a diluent gas and fluorochemicals to an elevated temperature sufficient to increase the flux of the permeate stream and to increase the selectivity of the membrane for the permeation of the diluent gas relative to the permeation of the fluorochemicals; contacting the gas stream with a membrane which is selectively more permeable to the diluent gas than the fluorochemicals to result in a permeate stream rich in the diluent gas and a retentate rich in fluorochemicals; contacting the gas stream with one or more additional membranes which are selectively more permeable to the diluent gas than the fluorochemicals to result in a second permeate stream rich in the diluent gas and a second retentate