Patents by Inventor James J. Baecker

James J. Baecker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum compatible water vapor and rinse process module
    Patent number: 5820692
    Abstract: A process module which can be integrated with a reduced pressure cluster tool system for semiconductor wafer processing to perform ambient or near ambient pressure reactions without requiring an intermediate buffer chamber.
    Type: Grant
    Filed: January 16, 1996
    Date of Patent: October 13, 1998
    Assignee: FSI Interntional
    Inventors: James J. Baecker, D. Scott Becker, Michael J. Foline, Todd K. Maciej