Patents by Inventor James J. F. McAndrew

James J. F. McAndrew has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190368728
    Abstract: A radiative recuperator preheats oxidant and/or fuel for combustion at one or more burners of a furnace. The recuperator includes a duct, at least portions of which comprise a material having a thermal conductivity of greater than 1 W/(m·K), preferably greater than 3 W/(m·K), that receives hot flue gas produced by the burner(s). The duct radiatively transfers heat to oxidant or fuel (for preheating) flowing through one or more metallic pipes disposed in between the duct and an insulating wall.
    Type: Application
    Filed: August 16, 2019
    Publication date: December 5, 2019
    Applicants: American Air Liquide, Inc., L'Air Liquide, Societe Anonyme pour l'Etude et l?Exploitation des Procedes Georges Claude
    Inventors: Taekyu KANG, James J.F. MCANDREW, Remi TSIAVA, Jiefu MA, Ryan ADELMAN, Henri CHEVREL
  • Patent number: 10465904
    Abstract: A radiative recuperator preheats oxidant and/or fuel for combustion at one or more burners of a furnace. The recuperator includes a duct, at least portions of which comprise a material having a thermal conductivity of greater than 1 W/(m·K), preferably greater than 3 W/(m·K), that receives hot flue gas produced by the burner(s). The duct radiatively transfers heat to oxidant or fuel (for preheating) flowing through one or more metallic pipes disposed in between the duct and an insulating wall.
    Type: Grant
    Filed: April 6, 2018
    Date of Patent: November 5, 2019
    Assignees: American Air Liquide, Inc., L'Air Liquide Societe Anonyme Pour L'Etude Et L'Exploitation Des Procedes Georges Claude
    Inventors: Taekyu Kang, James J. F. McAndrew, Remi Tsiava, Jiefu Ma, Ryan Adelman, Henri Chevrel
  • Publication number: 20190003706
    Abstract: A radiative recuperator preheats oxidant and/or fuel for combustion at one or more burners of a furnace. The recuperator includes a duct, at least portions of which comprise a material having a thermal conductivity of greater than 1 W/(m·K), preferably greater than 3 W/(m·K), that receives hot flue gas produced by the burner(s). The duct radiatively transfers heat to oxidant or fuel (for preheating) flowing through one or more metallic pipes disposed in between the duct and an insulating wall.
    Type: Application
    Filed: April 6, 2018
    Publication date: January 3, 2019
    Applicants: American Air Liquide, Inc., L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
    Inventors: Taekyu KANG, James J.F. MCANDREW, Remi TSIAVA, Jiefu MA, Ryan ADELMAN, Henri CHEVREL
  • Patent number: 9851102
    Abstract: A plurality of independently flow rate-controlled flows of oxidant may be preheated at a heat exchanger (or both oxidant and fuel at separate heat exchangers) by heat exchange with a hot shell-side (heat transfer) fluid. The separate flows of hot oxidant are directed to associated separate burners where they combust with flows of fuel to produce hot combustion gases. The hot combustion gases are used to preheat the hot shell-side fluid at a recuperator or regenerator.
    Type: Grant
    Filed: July 31, 2013
    Date of Patent: December 26, 2017
    Assignee: L'Air Liquide Société Anonyme Pour L'Étude Et L'Exploitation Des Procedes Georges Claude
    Inventors: Taekyu Kang, James J. F. McAndrew, Youssef Joumani, Remi Pierre Tsiava
  • Patent number: 9618203
    Abstract: A plurality of independently flow rate-controlled flows of fuel may be preheated at a heat exchanger (or both oxidant and fuel at separate heat exchangers) by heat exchange with a hot shell-side (heat transfer) fluid. The separate flows of hot fuel are directed to associated separate burners where they combust with flows of fuel to produce hot combustion gases. The hot combustion gases are used to preheat the hot shell-side fluid at a recuperator or regenerator.
    Type: Grant
    Filed: July 31, 2013
    Date of Patent: April 11, 2017
    Assignees: L'Air Liquide Société Anonyme Pour L'Étude Et L'Eploitation Des Procedes Georges Claude, American Air Liquide, Inc.
    Inventors: Taekyu Kang, James J. F. McAndrew, Youssef Joumani, Remi Pierre Tsiava
  • Patent number: 8999734
    Abstract: Disclosed herein are mono-functional silylating compounds that may exhibit enhanced silylating capabilities. Also disclosed are method of synthesizing and using these compounds. Finally methods to determine effective silylation are also disclosed.
    Type: Grant
    Filed: March 10, 2010
    Date of Patent: April 7, 2015
    Assignee: American Air Liquide, Inc.
    Inventors: James J. F. McAndrew, Curtis Anderson, Christian Dussarrat
  • Patent number: 8932674
    Abstract: Disclosed are precursors that are adapted to deposit SiCOH films with dielectric constant and Young's Modulus suitable for future generation dielectric films.
    Type: Grant
    Filed: February 17, 2011
    Date of Patent: January 13, 2015
    Assignee: American Air Liquide, Inc.
    Inventors: Christian Dussarrat, François Doniat, Curtis Anderson, James J. F. McAndrew
  • Publication number: 20140087322
    Abstract: A plurality of independently flow rate-controlled flows of oxidant may be preheated at a heat exchanger (or both oxidant and fuel at separate heat exchangers) by heat exchange with a hot shell-side (heat transfer) fluid. The separate flows of hot oxidant are directed to associated separate burners where they combust with flows of fuel to produce hot combustion gases. The hot combustion gases are used to preheat the hot shell-side fluid at a recuperator or regenerator.
    Type: Application
    Filed: July 31, 2013
    Publication date: March 27, 2014
    Applicants: American Air Liquide, Inc., L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des Procedes Georges Claude
    Inventors: Taekyu KANG, James J.F. MCANDREW, Youssef JOUMANI, Remi Pierre TSIAVA
  • Publication number: 20140087316
    Abstract: A plurality of independently flow rate-controlled flows of fuel may be preheated at a heat exchanger (or both oxidant and fuel at separate heat exchangers) by heat exchange with a hot shell-side (heat transfer) fluid. The separate flows of hot fuel are directed to associated separate burners where they combust with flows of fuel to produce hot combustion gases. The hot combustion gases are used to preheat the hot shell-side fluid at a recuperator or regenerator.
    Type: Application
    Filed: July 31, 2013
    Publication date: March 27, 2014
    Applicants: American Air Liquide, Inc., L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des Procedes Georges Claude
    Inventors: Taekyu KANG, James J.F. MCANDREW, Youssef Joumani, Remi Pierre Tsiava
  • Publication number: 20130042790
    Abstract: Disclosed are precursors that are adapted to deposit SiCOH films with dielectric constant and Young's Modulus suitable for future generation dielectric films.
    Type: Application
    Filed: February 17, 2011
    Publication date: February 21, 2013
    Applicant: L'Air Liquide, Société Anonyme pour I'Etude et I'Exploitation des Procédés Georges Claude
    Inventors: Christian Dussarrat, François Doniat, Curtis Anderson, James J.F. McAndrew
  • Patent number: 8298965
    Abstract: Disclosed herein are precursors and methods for their use in the manufacture of semiconductor, photovoltaic, TFT-LCD, or flat panel type devices.
    Type: Grant
    Filed: September 3, 2009
    Date of Patent: October 30, 2012
    Assignee: American Air Liquide, Inc.
    Inventors: James J. F. McAndrew, Francois Doniat
  • Publication number: 20120219714
    Abstract: Disclosed are stabilized bicyclo[2.2.1]hepta-2,5-diene compositions and methods of making and using the same.
    Type: Application
    Filed: October 27, 2010
    Publication date: August 30, 2012
    Applicants: L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des Procedes Georges Claude, American Air Liquide, Inc.
    Inventors: James J.F. McAndrew, Jean-Marc Girard, Yves Marot, Daniel André Gobard
  • Publication number: 20100233829
    Abstract: Disclosed herein are mono-functional silylating compounds that may exhibit enhanced silylating capabilities. Also disclosed are method of synthesizing and using these compounds. Finally methods to determine effective silylation are also disclosed.
    Type: Application
    Filed: March 10, 2010
    Publication date: September 16, 2010
    Applicant: American Air Liquide Inc.
    Inventors: James J.F. McANDREW, Curtis Anderson, Christian Dussarrat
  • Publication number: 20100143580
    Abstract: Disclosed are stabilized bicyclo[2.2.1]hepta-2,5-diene compositions and methods of making and using the same.
    Type: Application
    Filed: November 5, 2009
    Publication date: June 10, 2010
    Applicants: American Air Liquide, Inc., L'Air Liquide Societe Anonyme pour l'Etude et I'Exploitation des Procedes Georges Claude
    Inventors: James J.F. MCANDREW, Jean-Marc Girard, Yves Marot, Daniel André Gobard
  • Publication number: 20100052115
    Abstract: Disclosed herein are precursors and methods for their use in the manufacture of semiconductor, photovoltaic, TFT-LCD, or flat panel type devices.
    Type: Application
    Filed: September 3, 2009
    Publication date: March 4, 2010
    Applicant: AMERICAN AIR LIQUIDE, INC.
    Inventors: James J.F. McANDREW, Francois DONIAT
  • Publication number: 20100003835
    Abstract: Disclosed herein is the use of a silicon podand, silicon crown ether, or silicon cryptand to form a low-k dielectric film on a substrate.
    Type: Application
    Filed: July 2, 2009
    Publication date: January 7, 2010
    Applicant: American Air Liquide, Inc.
    Inventors: James J.F. McANDREW, Christian Dussarrat
  • Publication number: 20080242912
    Abstract: Methods and apparatus for the purification and distribution of acetylene. Acetylene is removed from an acetylene storage device, and provided to a purifier where solvent is removed. The purified acetylene is then provided to a semiconductor processing tool.
    Type: Application
    Filed: November 19, 2007
    Publication date: October 2, 2008
    Inventors: Olivier Letessier, Richard J. Udischas, James J.F. McAndrew, Regis Zils, Fabrice Delcorso, Rajat Agrawal
  • Publication number: 20020152797
    Abstract: Provided are novel gas delivery apparatuses. In accordance with one aspect of the invention, the apparatus features: a gas line network for delivering a gas from a gas source to a point of use; means for performing one or more vacuum/purge cycle in the gas line network, the vacuum/purge cycle including a vacuum phase and a purge phase; and a measurement system for detecting a gas phase molecular species in the gas line network during the vacuum phase and/or the purge phase of the vacuum/purge cycle. Also provided are methods for monitoring a gas phase molecular species in a gas delivery apparatus. The invention allows for replacement of components in a gas delivery system in a manner which is safe, and which avoids detrimental impact on the process being run and on the equipment.
    Type: Application
    Filed: January 4, 2002
    Publication date: October 24, 2002
    Inventors: James J.F. McAndrew, Eric L. Duchateau, Jean-Marc Girard, Alan D. Zdunek
  • Patent number: 6442736
    Abstract: Provided is a novel semiconductor processing system. The system includes a process chamber for treating a semiconductor substrate with one or more process gases comprising water vapor, means for delivering the water vapor or one or more precursors thereof to the process chamber, an exhaust conduit connected to the process chamber, an absorption spectroscopy system for sensing water vapor in a sample region, and a control system which controls water vapor content in the process chamber. Also provided is a method for controlling the water vapor level in a semiconductor process chamber. The system and method allow for measurement and control of the water vapor level in a semiconductor processing chamber in which water vapor is present as a process gas.
    Type: Grant
    Filed: October 3, 2000
    Date of Patent: August 27, 2002
    Assignees: L'Air Liquide Societe Anonyme A Directoire et Conseil de Surveillance pour l'Etude et l'Expolitation des Procedes Georges Claude, American Air Liquide Inc.
    Inventors: Jean-Marc Girard, Benjamin J. Jurcik, Jean Friedt, James J. F. McAndrew
  • Patent number: 6421127
    Abstract: Provided are novel methods of preventing deposition on an optical component in an absorption spectroscopy measurement cell. The methods involve performing an absorption spectroscopy measurement of a sample gas introduced into the cell, and introducing a flow of purge gas from a purge gas inlet pipe across a critical surface of the optical element at a velocity effective to prevent deposition on the critical surface. The gas inlet is disposed adjacent said critical surface. Also provided are devices for practicing the inventive method, measurement cells useful in absorption spectroscopy measurements, apparatuses for performing an absorption spectroscopy measurement and semiconductor processing apparatuses. The invention allows for the performance of accurate spectroscopic measurements. Because deposits are prevented from forming on the surface of an optical element, interference therefrom can effectively be avoided.
    Type: Grant
    Filed: July 11, 2000
    Date of Patent: July 16, 2002
    Assignee: American Air Liquide, Inc.
    Inventors: James J. F. McAndrew, Benjamin Jurcik, Carol Schnepper, Ronald Inman, Dmitry Znamensky, Tracey Jacksier