Abstract: A pressure sensor includes a MEMS pressure transducer with a pressure sensing diaphragm and sensor elements, an isolator diaphragm spaced apart from the pressure sensing diaphragm, and a ceramic header body. The ceramic header body has an electrical conductor and transducer aperture with the MEMS pressure transducer supported therein. The isolator diaphragm is coupled to the to the MEMS pressure transducer by a fluid and is sealably fixed to the ceramic body. The ceramic header body bounds the fluid and the electrical conductor electrically connects the MEMS pressure transducer with the external environment. Differential pressure sensors and methods of making pressure sensors are also described.

Abstract: A probe system configured to receive a radio-frequency (RF) signal from a radio-frequency (RF) antenna includes a heater and a control circuit. The heater includes a resistive heating element routed through the probe system. An operational voltage is provided to the resistive heating element to provide heating for the probe system and the resistive heating element has an element capacitance. The control circuit is configured to determine an antenna response of the resistive heating element and determine a remaining useful life of the probe system based on the antenna response over time.

Abstract: A probe system configured to receive a radio-frequency (RF) signal from a radio-frequency (RF) antenna includes a heater and a control circuit. The heater includes a resistive heating element routed through the probe system. An operational voltage is provided to the resistive heating element to provide heating for the probe system and the resistive heating element has an element capacitance. The control circuit is configured to determine an antenna response of the resistive heating element and determine a remaining useful life of the probe system based on the antenna response over time.

Abstract: A pressure sensor includes a MEMS pressure transducer with a pressure sensing diaphragm and sensor elements, an isolator diaphragm spaced apart from the pressure sensing diaphragm, and a ceramic header body. The ceramic header body has an electrical conductor and transducer aperture with the MEMS pressure transducer supported therein. The isolator diaphragm is coupled to the to the MEMS pressure transducer by a fluid and is sealably fixed to the ceramic body. The ceramic header body bounds the fluid and the electrical conductor electrically connects the MEMS pressure transducer with the external environment. Differential pressure sensors and methods of making pressure sensors are also described.

Abstract: A probe system includes a heater and a control circuit. The heater includes a resistive heating element routed through the probe system. An operational voltage is provided to the resistive heating element to provide heating for the probe system. The control circuit is configured to provide the operational voltage and monitor a circuit frequency based on an element capacitance between the resistive heating element and a metallic sheath of the heater over time. The control circuit is further configured to determine remaining useful life of the probe system based on the circuit frequency.

Abstract: A probe system configured to receive a radio-frequency (RF) signal from a radio-frequency (RF) antenna includes a heater and a control circuit. The heater includes a resistive heating element routed through the probe system. An operational voltage is provided to the resistive heating element to provide heating for the probe system and the resistive heating element has an element capacitance. The control circuit is configured to determine an antenna response of the resistive heating element and determine a remaining useful life of the probe system based on the antenna response over time.

Abstract: A probe system includes a heater and a control circuit. The heater includes a resistive heating element routed through the probe system. An operational voltage is provided to the resistive heating element to provide heating for the probe system. The control circuit is configured to provide the operational voltage and monitor a circuit frequency based on an element capacitance between the resistive heating element and a metallic sheath of the heater over time. The control circuit is further configured to determine remaining useful life of the probe system based on the circuit frequency.

Abstract: Apparatus and associated methods relate to an accelerometer having first and second piezoelectric transducers that are electrically isolated but mechanically coupled one to another via a coupling member. The first piezoelectric transducer is configured to induce a mechanical deformation of the coupling member in response to an electrical excitation signal received by the first piezoelectric transducer. The second piezoelectric transducer is configured to generate an electrical response signal in response to mechanical deformation of the coupling member. The accelerometer has a self-test module configured to generate the electrical excitation signal and to receive the electrical response signal. The self-test module is further configured to generate a sensor test result based upon a comparison between the received electrical response signal and a reference signal. The self-test module may advantageously detect changes in an excitation/response relation due to time and/or environmental conditions, for example.

Abstract: A capacitive pressure sensor may be configured to transduce both a dynamic pressure and a static pressure using a single diaphragm. A capacitive pressure sensor may comprise a dynamic excitation signal module in parallel with a static excitation signal module, a summing amplifier module in connection with both the dynamic excitation module and the static excitation module, a dynamic charge amplifier stage in a parallel with a static charge amplifier stage, and a capacitive sensor connected to an output of the summing amplifier module, as well as an input of the dynamic charge amplifier stage, and an input of the static charge amplifier stage. Further, a dynamic excitation signal may be provided by the dynamic excitation signal module as a constant DC voltage signal, and a static excitation signal may be provided by the static excitation signal module as an AC voltage signal.

Abstract: A hardware-only contactless position sensor system is provided that includes a contactless position sensor and hardware-only sensor system electronics. The sensor includes excitation, sine, and cosine coils. The electronics are coupled to the sensor and detect a position of a target relative to the sensor. The electronics include a phase shift and summation circuit that applies a phase shift at a frequency of the excitation coil to one of a sine signal from the sine coil or a cosine signal from the cosine coil as a phase shifted signal and add the phase shifted signal with an unshifted instance of the cosine or sine signal to produce a phase shifted output. The electronics also include a phase detector circuit that detects a phase of the phase shifted output and generate an output voltage corresponding to the phase and proportional to the position of the target.

Abstract: A capacitive pressure sensor may be configured to transduce both a dynamic pressure and a static pressure using a single diaphragm. A capacitive pressure sensor may comprise a dynamic excitation signal module in parallel with a static excitation signal module, a summing amplifier module in connection with both the dynamic excitation module and the static excitation module, a dynamic charge amplifier stage in a parallel with a static charge amplifier stage, and a capacitive sensor connected to an output of the summing amplifier module, as well as an input of the dynamic charge amplifier stage, and an input of the static charge amplifier stage. Further, a dynamic excitation signal may be provided by the dynamic excitation signal module as a constant DC voltage signal, and a static excitation signal may be provided by the static excitation signal module as an AC voltage signal.

Abstract: A hardware-only contactless position sensor system is provided that includes a contactless position sensor and hardware-only sensor system electronics. The sensor includes excitation, sine, and cosine coils. The electronics are coupled to the sensor and detect a position of a target relative to the sensor. The electronics include a phase shift and summation circuit that applies a phase shift at a frequency of the excitation coil to one of a sine signal from the sine coil or a cosine signal from the cosine coil as a phase shifted signal and add the phase shifted signal with an unshifted instance of the cosine or sine signal to produce a phase shifted output. The electronics also include a phase detector circuit that detects a phase of the phase shifted output and generate an output voltage corresponding to the phase and proportional to the position of the target.