Abstract: A spin chuck according to the present invention is provided and is configured to eliminate the wrap of chemical over the wafer edge. The dual speed wafer spin chuck apparatus acts to prevent liquids from affecting the backside of a wafer during processing. An outer ring is placed around the wafer with a narrow gap between the two such that drops of liquid on the surface of the wafer will touch the outer ring as they move to the outermost edge of the wafer. By spinning this outer ring at high speed, centrifugal force causes these drops to be pulled off of the wafer and flung radially outward, thus preventing the liquid from affecting the backside of the wafer.

Abstract: The disclosure relates to a precise cut, reusable tooling assembly used to precisely hold and align a package base during manufacture into an electronic package that protects electronic circuits, microelectronic circuits and semiconductors. The assembly comprises a carrier plate and a template, and an optional interface bloc, all of which secure a lower or intermediate section of the outer periphery of the package base to prevent movement of the package base during manufacturing processes. The assembly can also be used to transfer a sealed electronic package between manufacturing process equipment by hand without having to contact the electronic package. The invention includes end effector tooling useful for precisely aligning a lid relative to a package body. The effector tooling includes an angled surface that contacts upper edges of a lid and seal ring.

Abstract: A spin chuck according to the present invention is provided and is configured to eliminate the wrap of chemical over the wafer edge. The dual speed wafer spin chuck apparatus acts to prevent liquids from affecting the backside of a wafer during processing. An outer ring is placed around the wafer with a narrow gap between the two such that drops of liquid on the surface of the wafer will touch the outer ring as they move to the outermost edge of the wafer.

Abstract: A method of generating a three-dimensional image of an object includes placing a video camera at a predetermined distance from the object, such that the video camera has an unobstructed view of the object, and causing the object to rotate about a central axis. A video stream of at least one revolution of the rotating object is captured with the video camera. A period of the at least one revolution of the object is determined. A predetermined number of frames of the captured video stream are selected, and a three-dimensional image of the object using the selected frames is created.

Abstract: A mount for supporting a camera having a lens with a first optical axis includes a plate configured for attachment to the camera. The first optical axis passes through the plate. A platform through which light may pass has first and second sides, the second side being opposite the first side. The first side of the platform is spaced from the plate and positioned such that the first optical axis passes therethrough. A support rod has first and second ends and a longitudinal axis. The first end is attached to the second side of the platform such that the longitudinal axis and first optical axis are generally aligned. An optic having a reflective surface and a second optical axis is attached to the second end of the support rod such that the reflective surface faces the lens and the second optical axis is aligned with the first optical axis.