Abstract: The data transformation system in one embodiment, comprises a capability to receive data, a data destination and a capability to store transformed data, and a data transformation pipeline that constructs complex end-to-end data transformation functionality by pipelining data flowing from one or more sources to one or more destinations through various interconnected nodes for transforming the data as it flows. Each component in the pipeline possesses predefined data transformation functionality, and the logical connections between components define the data flow pathway in an operational sense. The data transformation pipeline enables a user to develop complex end-to-end data transformation functionality by graphically describing and representing, via a GUI, a desired data flow from one or more sources to one or more destinations through various interconnected nodes (graph).

Abstract: A method and apparatus is disclosed for operating a laser output light beam pulse line narrowing mechanism that may comprise a nominal center wavelength and bandwidth selection optic; a static wavefront compensation mechanism shaping the curvature of the selection optic; an active wavefront compensation mechanism shaping the curvature of the selection optic and operating independently of the static wavefront compensation mechanism. The method and apparatus may comprise the nominal center wavelength and bandwidth selection optic comprises a grating; the static wavefront compensation mechanism applies a pre-selected bending moment to the grating; the active wavefront compensation mechanism applies a separate selected bending moment to the grating responsive to the control of a bending moment controller based on bandwidth feedback from a bandwidth monitor monitoring the bandwidth of the laser output light beam pulses. The active wavefront compensation mechanism may comprise a pneumatic drive mechanism.

Abstract: The data transformation system in one embodiment, comprises a capability to receive data, a data destination and a capability to store transformed data, and a data transformation pipeline that constructs complex end-to-end data transformation functionality by pipelining data flowing from one or more sources to one or more destinations through various interconnected nodes for transforming the data as it flows. Each component in the pipeline possesses predefined data transformation functionality, and the logical connections between components define the data flow pathway in an operational sense. The data transformation pipeline enables a user to develop complex end-to-end data transformation functionality by graphically describing and representing, via a GUI, a desired data flow from one or more sources to one or more destinations through various interconnected nodes (graph).

Abstract: User productivity can be facilitated by providing an interface between a high-level intent and low-level settings that should be configured to achieve the intent. The intent can be expressed in declarative language. The intent can be verified to determine if it conforms to a target, a policy, or both. Policy binding can provide a relationship between the target and the policy. An application view can be provided that allows the user to view a server having one or more databases.

Abstract: The data transformation system in one embodiment, comprises a capability to receive data, a data destination and a capability to store transformed data, and a data transformation pipeline that constructs complex end-to-end data transformation functionality by pipelining data flowing from one or more sources to one or more destinations through various interconnected nodes for transforming the data as it flows. Each component in the pipeline possesses predefined data transformation functionality, and the logical connections between components define the data flow pathway in an operational sense. The data transformation pipeline enables a user to develop complex end-to-end data transformation functionality by graphically describing and representing, via a GUI,a desired data flow from one or more sources to one or more destinations through various interconnected nodes (graph).

Abstract: Automated sampling and aggregation of performance or other dynamically varying data facilitates user productivity by making data available for a wide range of uses. An automated sampling and aggregration system includes one or more types of data collectors, including a dedicated data collector per machine, multiple data collectors per machine, or an instance-less data collector.

Abstract: Systems, methods, and computer readable media for designing and executing workflows can be equipped with a means for manipulation of workflow steps by grouping them, such as by placing them in containers. A container can be associated with a database transaction. In some embodiments, a container property can be set to indicate whether the container must participate, may participate, or may not participate in a database transaction. Further, containers may be placed in parent containers, and optionally inherit the transaction property of the parent.

Abstract: The operation of a data flow is improved by providing for validation of the consistency of the data flow with the external data files it works with, even in the face of changes in those external data files Metadata is stored regarding the external data files. Because external data files may change, this metadata is used when determining whether the external data files are still compatible with the data flow. In such performing such validation, the metadata tracks what changes in the external data files have occurred, and allows increased flexibility in presenting the user with options or in automatically fixing the data flow to correspond with changes in external data files. When the external data files are not available, the stored metadata can be used to validate the data flow to the last information regarding the external data files. The external metadata can be resynchronized to the data flow or to the external data files to provide updated external metadata for later validation.

Abstract: A high power narrow band, high repetition rate laser light source optical improvement apparatus and methods are disclosed with a fast angularly positionable mirror having a mirror mounting frame, a reflective optic with a coefficient different from that of the mounting frame, at least one flexure mount fromed in the mounting frame that is flexible having flexure arm attached the flexture to the mounting frame. The apparatus may include a flexure force mechanism having an elongated rod. The force mechanism may pre-stress the flexure. The mirror maybe a grating which includes a substrate with metallic layer formed on the substrate, and a protective coating made of silica formed on the reflective metallic layer. The grating maybe actively tuned using an electro- or magneto-sensitive element. Oxides of the metal in the reflective layer may be removed by a hydrogen purge system exposed to deep ultraviolet radiation.

Abstract: A window assembly for a pressurized laser discharge chamber is disclosed and may include a housing that is formed with a recess. The assembly may also include an optic having a first side that is exposed to chamber pressure and an opposed second side, and a compliant member that may be positioned in the recess to space the second side of the optic from the housing under normal chamber operating pressures. For the assembly, the compliant member may be compressible to allow the optic to mechanically abut the assembly housing during a chamber overpressure.

Abstract: A method and apparatus is disclosed for operating a laser output light beam pulse line narrowing mechanism that may comprise a nominal center wavelength and bandwidth selection optic; a static wavefront compensation mechanism shaping the curvature of the selection optic; an active wavefront compensation mechanism shaping the curvature of the selection optic and operating independently of the static wavefront compensation mechanism. The method and apparatus may comprise the nominal center wavelength and bandwidth selection optic comprises a grating; the static wavefront compensation mechanism applies a pre-selected bending moment to the grating; the active wavefront compensation mechanism applies a separate selected bending moment to the grating responsive to the control of a bending moment controller based on bandwidth feedback from a bandwidth monitor monitoring the bandwidth of the laser output light beam pulses. The active wavefront compensation mechanism may comprise a pneumatic drive mechanism.

Abstract: User productivity can be facilitated by providing an interface between a high-level intent and low-level settings that should be configured to achieve the intent. The intent can be expressed in declarative language. The intent can be verified to determine if it conforms to a target, a policy, or both. Policy binding can provide a relationship between the target and the policy. An application view can be provided that allows the user to view a server having one or more databases.

Abstract: User productivity can be facilitated through automated sampling and aggregation of performance or other dynamically varying data to make such data available for a wide range of uses. A data collector is provided and can be a dedicated data collector per machine, there can be multiple data collectors per machine, or there can be an instance-less data collector.

Abstract: A wavemeter for a high repetition rate gas discharge laser having an output laser bean comprising a pulsed output of greater than or equal to 15 mJ per pulse, sub-nanometer bandwidth tuning range pulses having a femptometer bandwidth precision and tens of femptometers bandwidth accuracy range, for measuring bandwidth on a pulse to pulse basis at pulse repetition rates of 4000 Hz and above, is disclosed which may comprise an adjustable optic mounting containing an optic element having an assigned vertical optical plane in the wavemeter optical layout and comprising: a mounting dowel pin positioned on a platform holding the components of the wavemeter; a dowel receiving opening on the adjustable mirror mounting a tangent to which is in the assigned vertical optical plane. The adjustable optic mounting may contain a tilt mechanism incorporated into the adjustable optic mounting enabling tilting the optic element about an axis in a plane parallel to a platform holding components of the wavemeter.

Abstract: A high power narrow band, high repetition rate laser light source optical improvement apparatus and methods are disclosed which may comprise a fast moving angularly positionable tuning mirror comprising: a mirror mounting frame comprising a first material and a relatively flat mounting surface area; a reflective optic comprising a second material having a coefficient of thermal expansion different from that of the first material of the mounting frame; at least two attachment points of attachment between the mounting frame and the reflective optic on the mounting frame surface; and, at least one flexure mount formed in the mounting frame that is flexible in a flexure axis corresponding to a longitudinal axis of thermal expansion of the mounting frame and the reflective optic, positioned at one of the at least two points of attachment.

Abstract: The data transformation system (DTS) in one embodiment of the present invention comprises a capability to receive data from a data source, a data destination and a capability to store transformed data therein, and a data transformation pipeline (DTP) that constructs complex end-to-end data transformation functionality (data flow executions or DFEs) by pipelining data flowing from one or more sources to one or more destinations through various interconnected nodes (that, when instantiated, become components in the pipeline) for transforming the data as it flows by (where the term transforming is used herein to broadly describe the universe of interactions that can be conducted to, with, by, or on data). Each component in the pipeline possesses specific predefined data transformation functionality, and the logical connections between components define the data flow pathway in an operational sense.

Abstract: An excimer laser with a purged beam path capable of producing a high quality pulsed laser beam at pulse rates in excess of 2,000 Hz at pulse energies of about 5 mJ or greater. The entire purged beam path through the laser system is sealed to minimize contamination of the beam path. A preferred embodiment comprises a thermally decoupled LNP aperture element to minimize thermal distortions in the LNP. This preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter is provided with a special purge of a compartment exposed to the output laser beam.

Abstract: A gas discharge laser capable of operating at pulse rates in the range of 4,000 Hz to 6,000 Hz at pulse energies in the range of 5 mJ to 10 mJ or greater.

Abstract: An excimer laser with a purged beam path capable of producing a high quality pulsed laser beam at pulse rates in excess of 2,000 Hz at pulse energies of about 5 mJ or greater. The entire purged beam path through the laser system is sealed to minimize contamination of the beam path. A preferred embodiment comprises a thermally decoupled LNP aperture element to minimize thermal distortions in the LNP. This preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter is provided with a special purge of a compartment exposed to the output laser beam.

Abstract: A tangential fan and cutoff assembly for recirculating a lasing gas mixture has blade members, which vary in circumferential position stepwise from end to end, and/or a tapered anode assembly. The number of blade members can be constant or variable between ends. The circumferential position of blade members can shift monotonically or reversibly between ends. Blade members are stiffened by optimally selecting the number and placement of hub members to control the natural vibration frequency of the fan. Methods of forming tangential fans include casting, and machining from a solid block. Monolithic structures can be joined, typically by electron-beam welding. Casting, welding, and machining processes introduce no additional contaminants. Tangential fans produced have mechanical rigidity, accurate tolerances, and low contaminant concentrations. Blade members can be formed into air foil shapes.