Abstract: A flat spectrum illumination source for use in optical metrology systems includes a first light source generating a visible light beam and a second light source generating an ultraviolet light beam. The illumination source also includes an auxiliary light source generating a light beam at wavelengths between the visible light beam and the ultraviolet light beam. The three light beams are combined to provide a broadband probe beam that has substantially even illumination levels across a broad range of wavelengths. Alternately, the illumination source may be fabricated as an array of light emitting diodes selected to cover a range of separate wavelengths. The outputs of the LED array are combined to produce the broadband probe beam.

Abstract: A flat spectrum illumination source for use in optical metrology systems includes a first light source generating a visible light beam and a second light source generating an ultraviolet light beam. The illumination source also includes an auxiliary light source generating a light beam at wavelengths between the visible light beam and the ultraviolet light beam. The three light beams are combined to provide a broadband probe beam that has substantially even illumination levels across a broad range of wavelengths. Alternately, the illumination source may be fabricated as an array of light emitting diodes selected to cover a range of separate wavelengths. The outputs of the LED array are combined to produce the broadband probe beam.

Abstract: The present invention provides a wafer mapper for imaging large objects such as semiconductor wafers. In operation, the wafer mapper provides spectroscopic ellipsometric data or broadband ellipsometric data for the entire sample being analyzed. This data is provided via either a line scan or a wavelength scan and greatly reduces the time required to map an entire wafer in terms of film thickness, index of refraction, dielectric constant or other measurements.

Abstract: A Porro prism and a light polarizer are combined in a single optical element termed a Hendrix Prism. The design provides retro-reflection of incoming light of a predetermined polarization in a direction anti-parallel to the direction of light incidence, while reflecting undesired light, i.e., that having a polarization orthogonal to the predetermined polarization, from the surface of the light polarizer. The undesired light is reflected in a direction that does not interfere with the intended operation of the device in which the Hendrix Prism is installed yet provides feedback to the system in which it is used.