Patents by Inventor James M. Cahill

James M. Cahill has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240140049
    Abstract: A composite article includes a first segment and a second segment spaced apart form the first segment. The composite article includes continuous fibers that extend from the first segment to the second segment. The composite article also includes discontinuous fiber distributed throughout the composite article.
    Type: Application
    Filed: January 9, 2024
    Publication date: May 2, 2024
    Inventors: Michael S. BRALEY, Kevin M. CAHILL, James D. JERN
  • Patent number: 7177019
    Abstract: This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.
    Type: Grant
    Filed: February 1, 2005
    Date of Patent: February 13, 2007
    Assignee: Tokyo Electron Limited
    Inventors: Fred E. Stanke, Douglas E. Ruth, James M. Cahill, Michael Weber, Clinton B. Carlisle, Hung Pham, Edric Tong, Elliot Burke
  • Patent number: 7042580
    Abstract: This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.
    Type: Grant
    Filed: March 22, 2000
    Date of Patent: May 9, 2006
    Assignee: Tokyo Electron Limited
    Inventors: Fred E. Stanke, Clinton B. Carlisle, Hung Pham, Edric Tong, Douglas E. Ruth, James M. Cahill, Michael Weber, Elliot Burke
  • Patent number: 6919958
    Abstract: This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.
    Type: Grant
    Filed: March 26, 2003
    Date of Patent: July 19, 2005
    Assignee: Therma-Wave, Inc.
    Inventors: Fred E. Stanke, Clinton B. Carlisle, Hung Van Pham, Edric Tong, Douglas E. Ruth, James M. Cahill, Jr., Michael Weber-Grabau, Elliot Burke, Adam E. Norton
  • Publication number: 20030184742
    Abstract: This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.
    Type: Application
    Filed: March 26, 2003
    Publication date: October 2, 2003
    Inventors: Fred E. Stanke, Clinton B. Carlisle, Hung Pham, Edric Tong, Douglas E. Ruth, James M. Cahill, Michael Weber-Graban, Elliot Burke
  • Patent number: 6563586
    Abstract: This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.
    Type: Grant
    Filed: July 10, 2000
    Date of Patent: May 13, 2003
    Assignee: Therma-Wave, Inc.
    Inventors: Fred E. Stanke, Clinton B. Carlisle, Hung Pham, Edric Tong, Douglas E. Ruth, James M. Cahill, Michael Weber, Elliot Burke
  • Publication number: 20020018217
    Abstract: A wafer measurement station integrated within a process tool has a scatterometry instrument for measuring patterned features on wafers. A wafer handler feeds wafers between a cassette and one or more process stations of the process tool. Wafers presented to the measurement station are held on a wafer support, which may be moveable, and a scatterometry instrument has an optical measurement system that is moveable by a stage over the wafer support. A window isolates the moveable optics from the wafer. The optical measurement system are microscope-based optics forming a low NA system. The illumination spot size at the wafer is larger than a periodicity of the patterned features, and data processing uses a scattering model to analyze the optical signature of the collected light.
    Type: Application
    Filed: August 10, 2001
    Publication date: February 14, 2002
    Inventors: Michael Weber-Grabau, Edric H. Tong, Adam E. Norton, Fred E. Stanke, James M. Cahill, Douglas E. Ruth
  • Patent number: 6212741
    Abstract: A tether based connector for locating, identifying, inventorying, controlling and helping to ensure the retrieval of one or more items packaged within a container loaded with potentially obscuring packaging materials. The connector terminates at a fastener at one end for releasably fastening to an item, and at an easily located terminus at the other end. The terminus may be formed as an anchorment for anchoring to the container. A single anchorment may be adapted to serve a plurality of tethers for fastening to a plurality of items. A badge carrying item identifying information can be associated with a connector. A dispenser or applicator dispenses multiple connectors. An oblong foam slab is separable into anchorment and fastener portions connected by the tether extendible from at least one of the portions. Also disclosed is an inventive method for packaging items with tethers.
    Type: Grant
    Filed: March 20, 1998
    Date of Patent: April 10, 2001
    Inventor: James M. Cahill
  • Patent number: 5488808
    Abstract: An interlock system for locking wall panel frames. Vertical frame members are provided with keyhole-shaped openings for receipt therethrough of the head of a carriage bolt in one portion and having and a second elongate slotted portion capable of a non-rotationable engagement with the carriage bolt. A threaded shaft of the carriage bolt being threadably engageable by a dowel freely rotationally held by a lever bracket whereby the dowel can be threaded along the threaded shaft to bring the lever bracket against one of the vertical frame members. The latch bracket having camming edges and being pivotal around said dowel in a past-center relation whereby to cam said camming edges against the second frame member and lock the two vertical frame members together without the use of hand tools. Access from only one side of a panel frame joint is necessary to engage or disengage the interlock system.
    Type: Grant
    Filed: June 1, 1994
    Date of Patent: February 6, 1996
    Assignee: Allsteel Inc.
    Inventors: James M. Cahill, Dale E. White