Abstract: The nature of the fluid in or leaving the CO2 cleaning chamber is monitored by UV or IR spectrophotometry, by laser particle counting, by electrical or thermal conductivity, or other physical or mechanical properties. These properties are used to determine if or when the process is completed or to verify that the process is within normal process operation range.

Abstract: A method of filtering a bath (1,31) having a liquid containing particles of varying sizes therein and the recirculation and filtering system. The method and system require providing a recirculation route from the bath outflow and returning to the bath inflow. The route includes a first path communicating with the bath outflow and having serially a first controllable valve (5,9) and a filter having a relatively large pore size. The route also includes a second path communicating with the bath outflow and having serially a second controllable valve (11,15) and a filter having a relatively small pore size. There is a return path from each filter to the bath inflow. The return path from each filter can be a separate path or the paths can be connected at the output end before returning to the bath.

Abstract: A method of making a microelectronic circuit and the connection pattern therefor including the steps of providing a substrate (3), preferably silicon and preferably including a layer of nickel (38) under a layer of gold (36) thereon. Regions are formed on the substrate for connection of electrical components to the substrate using a first metallurgy, preferably gold and a pattern of bumps (5, 7) is formed of a second metallurgy different from the first metallurgy, preferably lead/tin solder. An interconnection pattern is formed on the substrate contacting at least one bump and at least one pad. The pattern of solder bumps is formed by providing a coupon (31) and patterning the bumps on the coupon and applied to the substrate while attached to the coupon, then heated to cause flow of the bumps onto the substrate. The coupon is then removed from the bumps with the bumps remaining on the substrate.

Abstract: A three dimensional package having at least one semiconductor chip having input/output conductive pads along its periphery includes a dielectric carrier over at least a portion of the chip and a plurality of conductors mounted on the carrier between the chip and the dielectric carrier. The plurality of conductors are mounted within the periphery of the chip with one end connected to the conductive pads and with the other end of the plurality of conductors exiting from the same side of the chip. The plurality of conductors exiting from the same side are electrically coupled to an interconnect substrate.