Patents by Inventor James M. Ian Bennett

James M. Ian Bennett has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and systems for spin-coating multi-layer thin films having liquid conservation features
    Patent number: 10811288
    Abstract: A system for retaining a spin-coating fluid when forming a thin film includes a rotatable chuck; a substrate on the rotatable chuck, the substrate having an interior area and an outer perimeter edge; and a fluid retention wall on the outer perimeter edge of the substrate, the fluid retention wall being configured to retain a spin-coating fluid deposited on the interior area of the substrate during rotation of the rotatable chuck.
    Type: Grant
    Filed: August 30, 2019
    Date of Patent: October 20, 2020
    Assignee: Carbon, Inc.
    Inventors: Bob E. Feller, James M. Ian Bennett
  • METHODS AND SYSTEMS FOR SPIN-COATING MULTI-LAYER THIN FILMS HAVING LIQUID CONSERVATION FEATURES
    Publication number: 20190385877
    Abstract: A system for retaining a spin-coating fluid when forming a thin film includes a rotatable chuck; a substrate on the rotatable chuck, the substrate having an interior area and an outer perimeter edge; and a fluid retention wall on the outer perimeter edge of the substrate, the fluid retention wall being configured to retain a spin-coating fluid deposited on the interior area of the substrate during rotation of the rotatable chuck.
    Type: Application
    Filed: August 30, 2019
    Publication date: December 19, 2019
    Inventors: Bob E. Feller, James M. Ian Bennett
  • Methods and systems for spin-coating multi-layer thin films having liquid conservation features
    Patent number: 10438827
    Abstract: A system for retaining a spin-coating fluid when forming a thin film includes a rotatable chuck; a substrate on the rotatable chuck, the substrate having an interior area and an outer perimeter edge; and a fluid retention wall on the outer perimeter edge of the substrate, the fluid retention wall being configured to retain a spin-coating fluid deposited on the interior area of the substrate during rotation of the rotatable chuck.
    Type: Grant
    Filed: June 30, 2017
    Date of Patent: October 8, 2019
    Assignee: Carbon, Inc.
    Inventors: Bob E. Feller, James M. Ian Bennett
  • METHODS AND SYSTEMS FOR SPIN-COATING MULTI-LAYER THIN FILMS HAVING LIQUID CONSERVATION FEATURES
    Publication number: 20190019700
    Abstract: A system for retaining a spin-coating fluid when forming a thin film includes a rotatable chuck; a substrate on the rotatable chuck, the substrate having an interior area and an outer perimeter edge; and a fluid retention wall on the outer perimeter edge of the substrate, the fluid retention wall being configured to retain a spin-coating fluid deposited on the interior area of the substrate during rotation of the rotatable chuck.
    Type: Application
    Filed: June 30, 2017
    Publication date: January 17, 2019
    Inventors: Bob E. Feller, James M. Ian Bennett