Patents by Inventor James M. Mueller

James M. Mueller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7076920
    Abstract: A pirani absolute pressure sensor for sensing absolute pressure in a load lock in a range from 100 to 10?4 torr and a differential pressure sensor for sensing a pressure difference between ambient atmospheric pressure and pressure in the load lock chamber are combined together in a module with a manifold and common circuit components to provide a pressure transducer that is capable of producing not only analog output for absolute pressure measurements, but also control signals at settable absolute and differential pressure values for opening interior and exterior doors of a load lock used to shuttle wafers and other devices into and out of a vacuum processing chamber. The transducer can also produce signals to control transition from slow to fast vacuum pumping of the load lock chamber at a settable threshold pressure.
    Type: Grant
    Filed: March 21, 2001
    Date of Patent: July 18, 2006
    Assignee: MKS Instruments, Inc.
    Inventors: Garry Holcomb, Youfan Gu, James Stafford, James M. Mueller, Stacy Wade
  • Patent number: 6562109
    Abstract: Trap apparatus and method for removing contaminants from the gaseous effluent flows from chemical vapor deposition chambers and processes by flowing the particle laden gas into an upper chamber of the trap apparatus, imparting additional kinetic energy to the powder particles to enhance separation of the powder particles from the gas, and then flowing the gas, sans the powder particles, out of the trap, while the powder particles fall into and are captured by a lower chamber positioned below the upper chamber and remote from the flowing gas. An impeller positioned in the upper chamber in the inlet path imparts the additional kinetic energy. For some reaction gas systems, an optional reactor with hydrophillic, rotating growth substrates enhance and accelerate growth of solid particles, which are then dislodged from the media, and fed by the flowing gas into the upper chamber for capture as previously described.
    Type: Grant
    Filed: March 28, 2001
    Date of Patent: May 13, 2003
    Assignee: MKS Instruments, Inc.
    Inventors: Darren Livingston, Youfan Gu, Paul Dozoretz, James M. Mueller
  • Publication number: 20020139249
    Abstract: Trap apparatus and method for removing contaminants from the gaseous effluent flows from chemical vapor deposition chambers and processes by flowing the particle laden gas into an upper chamber of the trap apparatus, imparting additional kinetic energy to the powder particles to enhance separation of the powder particles from the gas, and then flowing the gas, sans the powder particles, out of the trap, while the powder particles fall into and are captured by a lower chamber positioned below the upper chamber and remote from the flowing gas. An impeller positioned in the upper chamber in the inlet path imparts the additional kinetic energy. For some reaction gas systems, an optional reactor with hydrophillic, rotating growth substrates enhance and accelerate growth of solid particles, which are then dislodged from the media, and fed by the flowing gas into the upper chamber for capture as previously described.
    Type: Application
    Filed: March 28, 2001
    Publication date: October 3, 2002
    Inventors: Darren Livingston, Youfan Gu, Paul Dozoretz, James M. Mueller
  • Publication number: 20010029889
    Abstract: Transducer apparatus and method combining both an absolute pressure sensor for sensing absolute pressure in the load lock chamber and a differential pressure sensor for sensing a pressure difference between ambient atmospheric pressure and pressure in a load lock chamber and provides control signals for opening an interior door from the load lock chamber into a vacuum processing chamber and for opening an exterior door between ambient atmosphere and the load lock chamber. The transducer can also produce signals to control transition from slow to fast vacuum pump-down of load lock chamber pressure at a predetermined pressure set point.
    Type: Application
    Filed: March 21, 2001
    Publication date: October 18, 2001
    Inventors: Garry Holcomb, Youfan Gu, James Stafford, James M. Mueller, Stacy Wade
  • Patent number: 3970801
    Abstract: This apparatus is especially useful as a conversion kit and includes a new front cover for a portable radio telephone having a plurality of push buttons mounted therein, which push buttons activate a tone generator, the tones from which are applied to a timer and through a multi-contact relay to the speaker and transmitter of the radio telephone. The timer is utilized to activate the relay for 90 milliseconds each time a tone is produced by the tone generator so that a tone is transmitted for only 90 milliseconds and when a tone is not being generated the transmitter is connected to a microphone and the speaker is connected to the receiver in the normal operating manner by the relay.
    Type: Grant
    Filed: December 3, 1974
    Date of Patent: July 20, 1976
    Assignee: Motorola, Inc.
    Inventors: Danny E. Ross, James M. Mueller