Abstract: A purification and delivery system delivers a high-pressure fluid (e.g., carbon dioxide) to a process area and includes a fluid supply tank with a fluid in a liquid state. A purification section is provided in the system and includes at least one purification unit to remove at least one component from the fluid, and a high-pressure pump is disposed downstream from the fluid supply tank and proximate the process area. The high-pressure pump pressurizes the fluid to a process pressure that is greater than the pressure of the fluid within the fluid supply tank. By providing the high-pressure pump proximate the process area, the distance at which high-pressure fluid must be transported while maintaining required operating temperatures and pressures is minimized.

Abstract: Improved electrochemical planarization of an anode surface is performed by rotating either an anode or a cathode and applying a voltage therebetween. The cathode has a surface facing the anode and is configured such that the surface does not extend over all of the anode surface to be planarized during rotation of the anode or cathode. Preferably, the anode is a patterned or unpatterned semiconductor wafer with electroplated metal thereon, such as copper.

Abstract: Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region.

Abstract: A fluid purification and recovery system includes a buffer section configured to receive a fluid delivered from a process station, where the fluid pressure is maintained within the buffer section within a predetermined range and the fluid is maintained within the buffer section in at least one of a gas state, a liquid state and a supercritical state. The system further includes a purification section disposed downstream from the buffer section to receive the fluid from the buffer section, where the purification section includes at least one purification unit that separates at least a portion of at least one component from the fluid. In one embodiment, the fluid is maintained in at least one of a liquid state and a supercritical state in both the buffer section and the purification section. In addition, the buffer section delivers the fluid to the purification with minimal or substantially no fluctuations in pressure.

Abstract: A method for planarizing an element using an electrochemical polishing process includes contacting a patterned substrate with a polishing solution including 1-hydroxyethylidene-1,1-diphosphonic acid (HEDP) while applying an electric potential to the substrate. The patterned substrate is preferably a copper electroplated trenched silicon wafer. The potential is maintained within a predetermined limiting current plateau. The resulting electrochemical reaction is limited by mass transport of the copper, and creates a salt film along the copper surface. The copper layer becomes planar due to ohmic leveling, migration smoothing, and diffusion smoothing. Using HEDP enables the planarization of the copper surface without causing dishing or without completely removing the copper from the wafer.

Abstract: Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region.

Abstract: The subject of the present invention is a method and a device for filling a distribution line (20) with corrosive gas. The said method is a method for filling with gas, with passivation, a line (20) for distributing corrosive gas, which line is intended to distribute the said corrosive gas to a system (3) located immediately downstream of the said line (20); the said method comprising: prior conditioning of the said line (20); the actual filling of the said line (20) with the said corrosive gas known as an active gas. Characteristically, the said actual filling with gas comprises: at least one cycle of filling the said line (20) with active gas as far as immediately upstream of the system (3) and of removing the said active gas thus introduced into the said line (20); the said removal being performed without the said active gas passing through the said system (3); followed by the final filling of the said line (20) with gas so as to make the said gas available to the said system (3).

Abstract: Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region.

Abstract: Provided is a process for measuring the amount of impurities in a gas sample filling a laser absorption spectroscopy analysis cell. The process includes calculating the value of a characteristic representative of the absorbance of the gas sample, from a measurement of the gas sample at a single given pressure, and quantifying the impurities on the basis of a predetermined law for the variation of the characteristic as a function of the amount of impurities. The characteristic is the ratio of the difference between the luminous intensity (Iana) of a light beam transmitted through the gas and the luminous intensity (Iref) of the incident beam to the luminous intensity (Iref) of the incident beam. The impurities are quantified on the basis of a value of the coefficient of proportionality between the amount of impurities and the characteristic, determined on the basis of a table of variation of the characteristic as a function of pressure, for a given amount of impurities.

Abstract: Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region.

Abstract: Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region.

Abstract: Provided is a novel method and system for harmonic detection spectroscopy. The method comprises providing a cell having a sample region which is circumscribed by at least one wall. The cell has at least one light entry/exit port, with each entry/exit port containing a light transmissive window having a surface facing the sample region and disposed so as to seal the cell in the circumferential direction. A sample gas flows through the sample region in a direction parallel to a cell central axis, and the cell operates at less than atmospheric pressure. A frequency and/or amplitude modulated light source is provided for directing a light beam through one of the at least one light transmissive windows into the cell.

Abstract: Provided is a novel polygonal planar multipass cell and method of use for absorption spectroscopy. The cell comprises a sample region circumscribed by a plurality of walls. Each wall has a light reflective surface facing the sample region, and each wall is connected to at least one other wall so as to form in cross section substantially a polygon. At least one side of the polygon has a light entry/exit port therein, and the entry/exit port contains a light transmissive window which has a surface facing the sample region. The window is disposed so as to seal the cell in the circumferential direction. The cell has a central axis parallel to the light reflective surfaces of the walls and the surface of the light transmissive window which face the sample region. The cell can be used to measure molecular gas impurities in a sample. Particular applicability is found in semiconductor processing.

Abstract: Provided is a novel method for wavelength stabilization in a laser spectrometer useful in spectroscopic measurement. According to the method, an initial scan is performed which comprises applying a current or voltage signal to a laser. In the scan, a current or voltage signal value is increased incrementally from a minimum signal value to a maximum signal value over a predetermined total number of signal values. The minimum and maximum signal values are selected such that an absorption feature of a species to be measured falls within the scan bounded by the minimum and the maximum signal values. The relative position of the absorption feature is determined with respect to the applied signal values in the previous scan by analysis of detector outputs corresponding to the signal values in the previous scan. An absorption value corresponding to the absorption feature is determined, and the concentration of the species to be measured can optionally be calculated.

Abstract: Provided is a novel method for rapidly determining an impurity level in a gas source. A gas source and a measurement tool are provided for measuring an impurity level in a gas flowing from the gas source. The measurement tool is in communication with the gas source through a sampling line. The sampling line has a gas inlet disposed upstream from a gas outlet. The sampling line is baked according to a baking strategy, such that when baking is terminated, a concentration profile of the impurity in the sampling line contains a first region and a second region. In the first region, extending from the gas inlet to a point downstream from the inlet, the vapor phase concentration of the impurity is less than the vapor phase concentration of the impurity in the gas entering the sampling line.

Abstract: The spectrographic sample cell for the analysis of trace impurities in sample gases. The cell is provided with a gas inlet, a gas outlet and a volume for confining the sample gases for analysis. Two mirrors are provided, a first mirror proximate the gas inlet the second mirror proximate the gas outlet, the first mirror having a hole at its radial center. A conically-shaped cell profile is further provided such that the formation of vortices of sample gas is prevented in the cell upstream of or in the region where the analysis of trace impurities is to take place.

Abstract: A spacer device for mounting electrical components on a printed wire board includes a spacer having two legs projecting from a body to form a general U-shape. Each of the legs has a slot formed in its end wall for receiving and retaining one of the wire leads of an electrical component. During mounting of the electrical component, the spacer device is snapped onto the component by force fitting the component leads into the respective slots in the spacer legs such that the component is held beween the spacer legs. The spacer device remains attached to the electrical component during soldering and provides, by virtue of the thickness of one of the spacer legs, the required spacing of the component from the printed wire board. After soldering, the spacer device can be retained on the component and moved radially about the component to permit inspection of the component solder joint. Alternately, the spacer device can be removed after soldering by simply unsnapping it from the component leads.