Abstract: A method of manufacturing a liquid crystal display (LCD) device and a novel LCD device structure are disclosed. In accordance with the preferred embodiment of the present invention, a photo-sensitive layer is formed over a substrate, followed by the formation of a photo-insensitive layer over the photo-sensitive layer. Then, a portion of the photo-sensitive layer is exposed via a photomask to a radiation source. Next, the portion of the photosensitive layer is contacted with a developing solution. At this time, the portion of the photo-sensitive layer is dissolved and the portion of the photo-insensitive layer overlying the portion of the photo-sensitive layer is removed concurrently. The present invention simplifies the LCD fabrication while decreasing the capacitance between a pixel electrode and bus lines.

Abstract: A system and method have been provided for an improved oxide deposition process using a DC sputtering magnetron. The invention prolongs the useful life of the anode by providing shielded electron collection surfaces, to minimize the deposition of insulator material on the anode. Specifically, the anode has a fin with a bottom electron collection surface that is shielded from the target material deposition. A small electro-magnet helps deflect the flow of electrons to the bottom surface of the fin. Vias in the fin promote the flow of electrons to the fin top surface, which is also shielded from the deposition material, even if deposition material begins to accumulate on the fin bottom surface.

Abstract: A method of manufacturing a liquid crystal display (LCD) device and a novel LCD device structure are disclosed. In accordance with the preferred embodiment of the present invention, a photo-sensitive layer is formed over a substrate, followed by the formation of a photo-insensitive layer over the photo-sensitive layer. Then, a portion of the photo-sensitive layer is exposed via a photomask to a radiation source. Next, the portion of the photosensitive layer is contacted with a developing solution. At this time, the portion of the photo-sensitive layer is dissolved and the portion of the photo-insensitive layer overlying the portion of the photo-sensitive layer is removed concurrently. The present invention simplifies the LCD fabrication while decreasing the capacitance between a pixel electrode and bus lines.