Abstract: A wafer cassette includes a stationary dual-zone temperature control base and a removable wafer cassette top. The top includes a main cassette support structure, onto which wafer test electronics, a test interface connector, a wafer interconnect assembly, a wafer test area, a flex film interconnect, and a wafer chuck with evacuation chamber and electric wafer heater, and at least one rough alignment fixture are mounted. A wafer to be tested is inserted, with a pressure-isolating seal, between the wafer chuck and the wafer test area. The base is a stationary fixed portion which includes a first support compartment, a second support compartment and thermal circuits, each of which includes fluid inlet and outlet connections. The fixed portion further includes a heater interconnect to provide connection and external access for a heater element, as well as a vacuum interconnect line to provide external connection to the evacuation chamber.