Patents by Inventor James O. Kimball

James O. Kimball has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of treating metal and metal salts to enable thin layer deposition in semiconductor processing
    Patent number: 7670645
    Abstract: Techniques for vaporizing and handling a vaporized metallic element or metallic element salt with a heated inert carrier gas for further processing. The vaporized metallic element or salt is carried by an inert carrier gas heated to the same temperature as the vaporizing temperature to a heated processing chamber. The metal or salt vapor may be ionized (and implanted) or deposited on substrates. Apparatus for accomplishing these techniques, which include carrier gas heating chambers and heated processing chambers are also provided.
    Type: Grant
    Filed: November 13, 2007
    Date of Patent: March 2, 2010
    Assignee: LSI Corporation
    Inventors: Sheldon Aronowitz, James O. Kimball