Abstract: A method includes receiving measurement data from multiple sensors positioned along a delivery line that delivers a liquid as a gas to one of a gas panel or a processing chamber; simulating, using a computer-generated model, one or more process parameters associated with the delivery line and a plurality of heater jackets positioned around the delivery line; comparing the measurement data with values of the one or more process parameters; and determining, based on at least a threshold deviation between the measurement data and the values of the one or more process parameters, that a fault exists that is associated with maintaining temperature within the delivery line consistent with a gaseous state of the liquid.

Abstract: A method includes receiving measurement data from multiple sensors positioned along a delivery line that delivers a liquid as a gas to one of a gas panel or a processing chamber; simulating, using a computer-generated model, one or more process parameters associated with the delivery line and a plurality of heater jackets positioned around the delivery line; comparing the measurement data with values of the one or more process parameters; and determining, based on at least a threshold deviation between the measurement data and the values of the one or more process parameters, that a fault exists that is associated with maintaining temperature within the delivery line consistent with a gaseous state of the liquid.

Abstract: Apparatus and method for receiving and transmitting streaming live imagery data and audio signals in real time is provided. Imagery data and audio signals are acquired through a telestreamer input device and streamed to one or more remote recipients, allowing remote operators to electronically collaborate by telestrating, annotating, and sketching image overlays. Streaming video images displayed on a monitor are superimposed onto a virtual mesh projected via computer graphics. Vertices of the virtual mesh move according to a computational physics engine. Virtual tools are also superimposed onto a virtual mesh projected via computer graphics. The virtual tools interact with the virtual mesh to deliver real time, realistic modifications of the streaming image data. Recursive positioning of mesh layers and creation of a multi-layered virtual mesh enhance the realistic nature of the modified streaming image data.