Abstract: A method of producing a quantity of integrated circuits, that includes testing a set of semiconductor wafers that is made up of a first subset and a second subset. This first subset is configured in such a manner that a first tester is more readily adapted to perform the testing but the second subset is configured in such a manner that a second tester is more readily adapted to perform the testing. A first tooling plate and a second tooling plate are provided. The first tooling plate is attached to a probe station. Then the probe station is mated to the first tester to test the first subset of wafers. In turn, the second tooling plate is attached to the probe station. The probe station is then mated to the second tester to test the second subset of wafers. Finally, the first wafer and said second wafer are diced into the quantity of individual integrated circuits.

Abstract: A method of retrofitting a probe station having a head plate (12), so that the probe station (10) is adapted to mate with a predetermined probe card dish (16) and any tester (18) out of a set of testers. A depression is then machined into the head plate to create a head plate-tooling plate attachment region. Next, fastening and alignment items are provided and installed in this region. Further, a set of tooling plates (110) are provided, each having fastening and alignment items adapted to mate to the fastening and alignment items on the attachment regions and defining an aperture designed to engage the predetermined probe card dish. The user may then select a desired one of the tooling plates and mate and fasten the selected tooling plate to the head plate-tooling plate attachment region using the alignment and fastening items.

Abstract: A tooling plate for installation into a probe station and being formed of a rigid plate defining a major aperture having a rim. The plate also defines a set of peripheral apertures fitted with spring loaded, retained screws adapted to facilitate fastening to mating threaded holes. In one embodiment, a set of dowel locator holes defined by the bottom surface and being precisely positioned with respect to the location of the major aperture. Another embodiment includes docking equipment adapted to permit connection to a predetermined tester attached to the top of the rigid plate.

Abstract: A method of retrofitting a probe station having an original head plate, so that the probe station may be easily configured to mate with a probe card dish and any tester out of a set of testers. First, the original head plate is removed from the probe station and a replacement head plate, including head plate-tooling plate attachment region alignment items, is attached to the probe station. In addition, a set of tooling plates is provided, each having fastening and alignment items adapted to easily mate to the head plate-tooling plate attachment region fastening and alignment items. Also, each tooling plate defines an aperture designed to engage a probe card dish and includes docking equipment adapted to facilitate docking to a tester out of the set of testers. Furthermore, the set of tooling plates includes, for each particular tester out of the set of testers, a tooling plate adapted to facilitate attachment to the particular tester.

Abstract: A method of retrofitting a probe station having an original head plate, so that the probe station may be easily configured to mate with a probe card dish and any tester out of a set of testers. First, the original head plate is removed from the probe station and a replacement head plate, including head plate-tooling plate attachment region alignment items, is attached to the probe station. In addition, a set of tooling plates is provided, each having fastening and alignment items adapted to easily mate to the head plate-tooling plate attachment region fastening and alignment items. Also, each tooling plate defines an aperture designed to engage a probe card dish and includes docking equipment adapted to facilitate docking to a tester out of the set of testers. Furthermore, the set of tooling plates includes, for each particular tester out of the set of testers, a tooling plate adapted to facilitate attachment to the particular tester.

Abstract: A tooling plate for installation into a probe station and being formed of a rigid plate defining a major aperture having a rim. The plate also defines a set of peripheral apertures fitted with spring loaded, retained screws adapted to facilitate fastening to mating threaded holes. In one embodiment, a set of dowel locater holes defined by said bottom surface and being precisely positioned with respect to the location of the major aperture. Another embodiment includes docking equipment adapted to permit connection to a predetermined tester attached to said top of said rigid plate.

Abstract: A method of retrofitting a probe station having a head plate, so that the probe station is adapted to mate with a predetermined probe card dish and any tester out of a set of testers. A depression is then machined into the head plate to create a head plate-tooling plate attachment region. Next, fastening and alignment items are provided and installed in this region. Further, a set of tooling plates are provided, each having fastening and alignment items adapted to mate to the fastening and alignment items on the attachment regions and defining an aperture designed to engage the predetermined probe card dish. The user may then select a desired one of the tooling plates and mate and fasten the selected tooling plate to the head plate-tooling plate attachment region using the alignment and fastening items.