Abstract: A control system for creating, modifying, initiating and controlling a manufacturing process is provided using computer on-screen icons as metaphors for actual process steps. The icons are selected on-screen from a library of icons, and are selectively inserted in, appended to, edited or deleted from the manufacturing process. Each icon represents a discrete process step including associated default-value physical parameters, which may be modified (edited) within predetermined boundary limits. Using the icons, the physical manufacturing process is symbolically assembled on-screen and saved to a storage medium from which it is accessed for use. During actual operation, the manufacturing process is displayed on-screen in an animated graphic representation, with real-time presentation of instantaneous parameter values. The control system also selectively provides on-screen trend graphs showing in strip-chart form the recent history of selected process variables.

Abstract: A pressure responsive variable capacitive transducer is shown in which a flat flexible diaphragm having a capacitor plate disposed thereon is mounted overlying a recess in a substrate having a capacitor plate disposed on the surface of the recess so that the plates are spaced apart a selected distance determined by the depth of the recess. In one embodiment a glass seal is located between the diaphragm and the substrate inwardly of the outer perimeter of the disphragm while in a second embodiment a glass seal is located outwardly from the outer perimeter of the diaphragm. The substrate is formed with bores adapted to receive electrical connection pins. Electrically conductive traces extend from electrically conductive layers to wells formed in the substrate contiguous with the bores to provide a gradual transition for the traces and an electrically conductive epoxy is infilled to electrically connect the pins to the traces.

Abstract: A pressure responsive variable capacitive transducer is shown in which a flat flexible diaphragm having a capacitor plate disposed thereon is mounted overlying a recess in a substrate having a capacitor plate disposed on the surface of the recess so that the plates are spaced apart a selected distance determined by the depth of the recess. In one embodiment a glass seal is located between the diaphragm and the substrate inwardly of the outer perimeter of the diaphragm while in a second embodiment a glass seal is located outwardly from the outer perimeter of the diaphragm. The substrate is formed with bores adapted to receive electrical connection pins. Electrically conductive traces extend from electrically conductive layers to wells formed in the substrate contiguous with the bores to provide a gradual transition for the traces and an electrically conductive epoxy is infilled to electrically connect the pins to the traces.