Patents by Inventor James Paris
James Paris has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250114832Abstract: According to some aspects, there is provided systems and methods for monitoring extraction of landfill gas from a landfill having a plurality of wells by using a communication system configured to transmit information using a low-power wide area networking (LPWAN) protocol, the communication system comprising one or more gateway devices including a first gateway device and a plurality of communication node devices including a first communication node device. Further, there is provided methods for configuring a communication system comprising one or more gateway devices including a first gateway device and multiple communication node devices including a first communication node device.Type: ApplicationFiled: October 3, 2024Publication date: April 10, 2025Inventors: Ian Martin, James Paris, Melinda Sims, Peter Quigley
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Patent number: 11262386Abstract: Methods and apparatus for non-intrusive monitoring by sensing physical parameters such as electric and/or magnetic fields. Such apparatus and techniques may find application in a variety of fields, such as monitoring consumption of electricity, for example.Type: GrantFiled: October 14, 2016Date of Patent: March 1, 2022Assignee: Massachusetts Institute of TechnologyInventors: John Sebastian Donnal, James Paris, Steven B. Leeb, David Lawrence
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Patent number: 11107693Abstract: A method for removing photoresist, an oxidation layer, or both from a semiconductor substrate is disclosed. The method includes placing a substrate in a processing chamber, the processing chamber separate from a plasma chamber for generating a non-oxidizing plasma to be used in treating the substrate; generating a first non-oxidizing plasma from a first reactant gas and a first carrier gas in the plasma chamber, wherein the first non-oxidizing plasma comprises from about 10% to about 40% of the first reactant gas, wherein the first reactant gas has a flow rate of from about 100 standard cubic centimeters per minute to about 15,000 standard cubic centimeters per minute, and wherein the first carrier gas has a flow rate of from about 500 standard cubic centimeters per minute to about 20,000 standard cubic centimeters per minute; and treating the substrate by exposing the substrate to the first non-oxidizing plasma in the processing chamber.Type: GrantFiled: September 30, 2019Date of Patent: August 31, 2021Assignees: Beijing E-Town Semiconductor Technology Co., Ltd., Mattson Technology, Inc.Inventors: Li Diao, Robert George Elliston, David Gilbert, Chan-Yun Lee, James Paris, HaiAu PhanVu, Tom Tillery, Vijay Matthew Vaniapura
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Patent number: 10768027Abstract: Methods and systems are disclosed for monitoring properties of building structures (e.g., monitoring the strength and humidity of concrete structures) using sensor devices embedded in the building structures. The sensor devices collect sensor data and wirelessly transmit the data to portable computer devices operated by users.Type: GrantFiled: July 1, 2019Date of Patent: September 8, 2020Assignee: Hilti AGInventors: Brendan P. Dowdall, Ryan P. Twomey, Frank Arcoleo, Mark D. Halfman, James Paris
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Publication number: 20200098576Abstract: A method for removing photoresist, an oxidation layer, or both from a semiconductor substrate is disclosed. The method includes placing a substrate in a processing chamber, the processing chamber separate from a plasma chamber for generating a non-oxidizing plasma to be used in treating the substrate; generating a first non-oxidizing plasma from a first reactant gas and a first carrier gas in the plasma chamber, wherein the first non-oxidizing plasma comprises from about 10% to about 40% of the first reactant gas, wherein the first reactant gas has a flow rate of from about 100 standard cubic centimeters per minute to about 15,000 standard cubic centimeters per minute, and wherein the first carrier gas has a flow rate of from about 500 standard cubic centimeters per minute to about 20,000 standard cubic centimeters per minute; and treating the substrate by exposing the substrate to the first non-oxidizing plasma in the processing chamber.Type: ApplicationFiled: September 30, 2019Publication date: March 26, 2020Inventors: Li Diao, Robert George Elliston, David Gilbert, Chan-Yun Lee, James Paris, HaiAu PhanVu, Tom Tillery, Vijay Matthew Vaniapura
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Publication number: 20190323865Abstract: Methods and systems are disclosed for monitoring properties of building structures (e.g., monitoring the strength and humidity of concrete structures) using sensor devices embedded in the building structures. The sensor devices collect sensor data and wirelessly transmit the data to portable computer devices operated by users.Type: ApplicationFiled: July 1, 2019Publication date: October 24, 2019Inventors: Brendan P. Dowdall, Ryan P. Twomey, Frank Arcoleo, Mark D. Halfman, James Paris
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Patent number: 10431469Abstract: A method for removing photoresist, an oxidation layer, or both from a semiconductor substrate is disclosed. The method includes placing a substrate in a processing chamber, the processing chamber separate from a plasma chamber for generating a non-oxidizing plasma to be used in treating the substrate; generating a first non-oxidizing plasma from a first reactant gas and a first carrier gas in the plasma chamber, wherein the first non-oxidizing plasma comprises from about 10% to about 40% of the first reactant gas, wherein the first reactant gas has a flow rate of from about 100 standard cubic centimeters per minute to about 15,000 standard cubic centimeters per minute, and wherein the first carrier gas has a flow rate of from about 500 standard cubic centimeters per minute to about 20,000 standard cubic centimeters per minute; and treating the substrate by exposing the substrate to the first non-oxidizing plasma in the processing chamber.Type: GrantFiled: July 16, 2013Date of Patent: October 1, 2019Assignee: Mattson Technology, Inc.Inventors: Li Diao, Robert George Elliston, David Gilbert, Chan-Yun Lee, James Paris, HaiAu PhanVu, Tom Tillery, Vijay Matthew Vaniapura
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Patent number: 10386210Abstract: Methods and systems are disclosed for monitoring properties of building structures (e.g., monitoring the strength and humidity of concrete structures) using sensor devices embedded in the building structures. The sensor devices collect sensor data and wirelessly transmit the data to portable computer devices operated by users.Type: GrantFiled: December 7, 2016Date of Patent: August 20, 2019Assignee: Structural Health Systems, Inc.Inventors: Brendan P. Dowdall, Ryan P. Twomey, Frank Arcoleo, Mark D. Halfman, James Paris
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Publication number: 20180306839Abstract: Methods and apparatus for non-intrusive monitoring by sensing physical parameters such as electric and/or magnetic fields.Type: ApplicationFiled: October 14, 2016Publication date: October 25, 2018Applicant: Massachusetts Intitute of TechnologyInventors: John Sebastian Donnal, James Paris, Steven B. Leeb, David Lawrence
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Patent number: 9945692Abstract: Methods and apparatus for non-intrusive monitoring by sensing physical parameters such as electric and/or magnetic fields. Such apparatus and techniques may find application in a variety of fields, such as monitoring consumption of electricity, water, etc., in homes or businesses, for example, or industrial process monitoring.Type: GrantFiled: April 28, 2014Date of Patent: April 17, 2018Assignee: Massachusetts Institute of TechnologyInventors: Steven B. Leeb, James Paris, John Sebastian Donnal, Jinyeong Moon, Christopher Schantz
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Publication number: 20170160111Abstract: Methods and systems are disclosed for monitoring properties of building structures (e.g., monitoring the strength and humidity of concrete structures) using sensor devices embedded in the building structures. The sensor devices collect sensor data and wirelessly transmit the data to portable computer devices operated by users.Type: ApplicationFiled: December 7, 2016Publication date: June 8, 2017Applicant: Structural Health Systems, Inc.Inventors: Brendan P. Dowdall, Ryan P. Twomey, Frank Arcoleo, Mark D. Halfman, James Paris
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Publication number: 20150144155Abstract: A method for removing photoresist, an oxidation layer, or both from a semiconductor substrate is disclosed. The method includes placing a substrate in a processing chamber, the processing chamber separate from a plasma chamber for generating a non-oxidizing plasma to be used in treating the substrate; generating a first non-oxidizing plasma from a first reactant gas and a first carrier gas in the plasma chamber, wherein the first non-oxidizing plasma comprises from about 10% to about 40% of the first reactant gas, wherein the first reactant gas has a flow rate of from about 100 standard cubic centimeters per minute to about 15,000 standard cubic centimeters per minute, and wherein the first carrier gas has a flow rate of from about 500 standard cubic centimeters per minute to about 20,000 standard cubic centimeters per minute; and treating the substrate by exposing the substrate to the first non-oxidizing plasma in the processing chamber.Type: ApplicationFiled: July 16, 2013Publication date: May 28, 2015Inventors: Li Diao, Robert George Elliston, David Gilbert, Chan-Yun Lee, James Paris, HaiAu PhanVu, Tom Tillery, Vijay Matthew Vaniapura
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Publication number: 20140320125Abstract: Methods and apparatus for non-intrusive monitoring by sensing physical parameters such as electric and/or magnetic fields. Such apparatus and techniques may find application in a variety of fields, such as monitoring consumption of electricity, water, etc., in homes or businesses, for example, or industrial process monitoring.Type: ApplicationFiled: April 28, 2014Publication date: October 30, 2014Inventors: Steven B. Leeb, James Paris, John Sebastian Donnal, Jinyeong Moon, Christopher Schantz