Patents by Inventor James Paris

James Paris has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250114832
    Abstract: According to some aspects, there is provided systems and methods for monitoring extraction of landfill gas from a landfill having a plurality of wells by using a communication system configured to transmit information using a low-power wide area networking (LPWAN) protocol, the communication system comprising one or more gateway devices including a first gateway device and a plurality of communication node devices including a first communication node device. Further, there is provided methods for configuring a communication system comprising one or more gateway devices including a first gateway device and multiple communication node devices including a first communication node device.
    Type: Application
    Filed: October 3, 2024
    Publication date: April 10, 2025
    Inventors: Ian Martin, James Paris, Melinda Sims, Peter Quigley
  • Patent number: 11262386
    Abstract: Methods and apparatus for non-intrusive monitoring by sensing physical parameters such as electric and/or magnetic fields. Such apparatus and techniques may find application in a variety of fields, such as monitoring consumption of electricity, for example.
    Type: Grant
    Filed: October 14, 2016
    Date of Patent: March 1, 2022
    Assignee: Massachusetts Institute of Technology
    Inventors: John Sebastian Donnal, James Paris, Steven B. Leeb, David Lawrence
  • Patent number: 11107693
    Abstract: A method for removing photoresist, an oxidation layer, or both from a semiconductor substrate is disclosed. The method includes placing a substrate in a processing chamber, the processing chamber separate from a plasma chamber for generating a non-oxidizing plasma to be used in treating the substrate; generating a first non-oxidizing plasma from a first reactant gas and a first carrier gas in the plasma chamber, wherein the first non-oxidizing plasma comprises from about 10% to about 40% of the first reactant gas, wherein the first reactant gas has a flow rate of from about 100 standard cubic centimeters per minute to about 15,000 standard cubic centimeters per minute, and wherein the first carrier gas has a flow rate of from about 500 standard cubic centimeters per minute to about 20,000 standard cubic centimeters per minute; and treating the substrate by exposing the substrate to the first non-oxidizing plasma in the processing chamber.
    Type: Grant
    Filed: September 30, 2019
    Date of Patent: August 31, 2021
    Assignees: Beijing E-Town Semiconductor Technology Co., Ltd., Mattson Technology, Inc.
    Inventors: Li Diao, Robert George Elliston, David Gilbert, Chan-Yun Lee, James Paris, HaiAu PhanVu, Tom Tillery, Vijay Matthew Vaniapura
  • Patent number: 10768027
    Abstract: Methods and systems are disclosed for monitoring properties of building structures (e.g., monitoring the strength and humidity of concrete structures) using sensor devices embedded in the building structures. The sensor devices collect sensor data and wirelessly transmit the data to portable computer devices operated by users.
    Type: Grant
    Filed: July 1, 2019
    Date of Patent: September 8, 2020
    Assignee: Hilti AG
    Inventors: Brendan P. Dowdall, Ryan P. Twomey, Frank Arcoleo, Mark D. Halfman, James Paris
  • Publication number: 20200098576
    Abstract: A method for removing photoresist, an oxidation layer, or both from a semiconductor substrate is disclosed. The method includes placing a substrate in a processing chamber, the processing chamber separate from a plasma chamber for generating a non-oxidizing plasma to be used in treating the substrate; generating a first non-oxidizing plasma from a first reactant gas and a first carrier gas in the plasma chamber, wherein the first non-oxidizing plasma comprises from about 10% to about 40% of the first reactant gas, wherein the first reactant gas has a flow rate of from about 100 standard cubic centimeters per minute to about 15,000 standard cubic centimeters per minute, and wherein the first carrier gas has a flow rate of from about 500 standard cubic centimeters per minute to about 20,000 standard cubic centimeters per minute; and treating the substrate by exposing the substrate to the first non-oxidizing plasma in the processing chamber.
    Type: Application
    Filed: September 30, 2019
    Publication date: March 26, 2020
    Inventors: Li Diao, Robert George Elliston, David Gilbert, Chan-Yun Lee, James Paris, HaiAu PhanVu, Tom Tillery, Vijay Matthew Vaniapura
  • Publication number: 20190323865
    Abstract: Methods and systems are disclosed for monitoring properties of building structures (e.g., monitoring the strength and humidity of concrete structures) using sensor devices embedded in the building structures. The sensor devices collect sensor data and wirelessly transmit the data to portable computer devices operated by users.
    Type: Application
    Filed: July 1, 2019
    Publication date: October 24, 2019
    Inventors: Brendan P. Dowdall, Ryan P. Twomey, Frank Arcoleo, Mark D. Halfman, James Paris
  • Patent number: 10431469
    Abstract: A method for removing photoresist, an oxidation layer, or both from a semiconductor substrate is disclosed. The method includes placing a substrate in a processing chamber, the processing chamber separate from a plasma chamber for generating a non-oxidizing plasma to be used in treating the substrate; generating a first non-oxidizing plasma from a first reactant gas and a first carrier gas in the plasma chamber, wherein the first non-oxidizing plasma comprises from about 10% to about 40% of the first reactant gas, wherein the first reactant gas has a flow rate of from about 100 standard cubic centimeters per minute to about 15,000 standard cubic centimeters per minute, and wherein the first carrier gas has a flow rate of from about 500 standard cubic centimeters per minute to about 20,000 standard cubic centimeters per minute; and treating the substrate by exposing the substrate to the first non-oxidizing plasma in the processing chamber.
    Type: Grant
    Filed: July 16, 2013
    Date of Patent: October 1, 2019
    Assignee: Mattson Technology, Inc.
    Inventors: Li Diao, Robert George Elliston, David Gilbert, Chan-Yun Lee, James Paris, HaiAu PhanVu, Tom Tillery, Vijay Matthew Vaniapura
  • Patent number: 10386210
    Abstract: Methods and systems are disclosed for monitoring properties of building structures (e.g., monitoring the strength and humidity of concrete structures) using sensor devices embedded in the building structures. The sensor devices collect sensor data and wirelessly transmit the data to portable computer devices operated by users.
    Type: Grant
    Filed: December 7, 2016
    Date of Patent: August 20, 2019
    Assignee: Structural Health Systems, Inc.
    Inventors: Brendan P. Dowdall, Ryan P. Twomey, Frank Arcoleo, Mark D. Halfman, James Paris
  • Publication number: 20180306839
    Abstract: Methods and apparatus for non-intrusive monitoring by sensing physical parameters such as electric and/or magnetic fields.
    Type: Application
    Filed: October 14, 2016
    Publication date: October 25, 2018
    Applicant: Massachusetts Intitute of Technology
    Inventors: John Sebastian Donnal, James Paris, Steven B. Leeb, David Lawrence
  • Patent number: 9945692
    Abstract: Methods and apparatus for non-intrusive monitoring by sensing physical parameters such as electric and/or magnetic fields. Such apparatus and techniques may find application in a variety of fields, such as monitoring consumption of electricity, water, etc., in homes or businesses, for example, or industrial process monitoring.
    Type: Grant
    Filed: April 28, 2014
    Date of Patent: April 17, 2018
    Assignee: Massachusetts Institute of Technology
    Inventors: Steven B. Leeb, James Paris, John Sebastian Donnal, Jinyeong Moon, Christopher Schantz
  • Publication number: 20170160111
    Abstract: Methods and systems are disclosed for monitoring properties of building structures (e.g., monitoring the strength and humidity of concrete structures) using sensor devices embedded in the building structures. The sensor devices collect sensor data and wirelessly transmit the data to portable computer devices operated by users.
    Type: Application
    Filed: December 7, 2016
    Publication date: June 8, 2017
    Applicant: Structural Health Systems, Inc.
    Inventors: Brendan P. Dowdall, Ryan P. Twomey, Frank Arcoleo, Mark D. Halfman, James Paris
  • Publication number: 20150144155
    Abstract: A method for removing photoresist, an oxidation layer, or both from a semiconductor substrate is disclosed. The method includes placing a substrate in a processing chamber, the processing chamber separate from a plasma chamber for generating a non-oxidizing plasma to be used in treating the substrate; generating a first non-oxidizing plasma from a first reactant gas and a first carrier gas in the plasma chamber, wherein the first non-oxidizing plasma comprises from about 10% to about 40% of the first reactant gas, wherein the first reactant gas has a flow rate of from about 100 standard cubic centimeters per minute to about 15,000 standard cubic centimeters per minute, and wherein the first carrier gas has a flow rate of from about 500 standard cubic centimeters per minute to about 20,000 standard cubic centimeters per minute; and treating the substrate by exposing the substrate to the first non-oxidizing plasma in the processing chamber.
    Type: Application
    Filed: July 16, 2013
    Publication date: May 28, 2015
    Inventors: Li Diao, Robert George Elliston, David Gilbert, Chan-Yun Lee, James Paris, HaiAu PhanVu, Tom Tillery, Vijay Matthew Vaniapura
  • Publication number: 20140320125
    Abstract: Methods and apparatus for non-intrusive monitoring by sensing physical parameters such as electric and/or magnetic fields. Such apparatus and techniques may find application in a variety of fields, such as monitoring consumption of electricity, water, etc., in homes or businesses, for example, or industrial process monitoring.
    Type: Application
    Filed: April 28, 2014
    Publication date: October 30, 2014
    Inventors: Steven B. Leeb, James Paris, John Sebastian Donnal, Jinyeong Moon, Christopher Schantz