Patents by Inventor James Prager
James Prager has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20200176221Abstract: Various RF plasma systems are disclosed that do not require a matching network. In some embodiments, the RF plasma system includes an energy storage capacitor; a switching circuit coupled with the energy storage capacitor, the switching circuit producing a plurality of pulses with a pulse amplitude and a pulse frequency, the pulse amplitude being greater than 100 volts; a resonant circuit coupled with the switching circuit. In some embodiments, the resonant circuit includes: a transformer having a primary side and a secondary side; and at least one of a capacitor, an inductor, and a resistor. In some embodiments, the resonant circuit having a resonant frequency substantially equal to the pulse frequency, and the resonant circuit increases the pulse amplitude to a voltage greater than 2 kV.Type: ApplicationFiled: November 26, 2019Publication date: June 4, 2020Inventors: James Prager, Timothy Ziemba
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Publication number: 20200168437Abstract: Some embodiments include a plasma system comprising: a plasma chamber, an RF plasma generator, a bias generator, and a controller. The RF plasma generator may be electrically coupled with the plasma chamber and may produce a plurality of RF bursts, each of the plurality of RF bursts including RF waveforms, each of the plurality of RF bursts having an RF burst turn on time and an RF burst turn off time. The bias generator may be electrically coupled with the plasma chamber and may produce a plurality of bias bursts, each of the plurality of bias bursts including bias pulses, each of the plurality of bias bursts having an bias burst turn on time and an bias burst turn off time. In some embodiments the controller is in communication with the RF plasma generator and the bias generator that controls the timing of various bursts or waveforms.Type: ApplicationFiled: January 31, 2020Publication date: May 28, 2020Inventors: Timothy Ziemba, Kenneth Miller, James Prager, Kevin Muggli, Eric Hanson
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Publication number: 20200144030Abstract: Some embodiments include a nanosecond pulser circuit. In some embodiments, a nanosecond pulser circuit may include: a high voltage power supply; a nanosecond pulser electrically coupled with the high voltage power supply and switches voltage from the high voltage power supply at high frequencies; a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and an energy recovery circuit electrically coupled with the secondary side of the transformer. In some embodiments, the energy recovery circuit comprises: an inductor electrically coupled with the high voltage power supply; a crowbar diode arranged in parallel with the secondary side of the transformer; and a second diode disposed in series with the inductor and arranged to conduct current from a load to the high voltage power supply.Type: ApplicationFiled: January 8, 2020Publication date: May 7, 2020Inventors: James Prager, Timothy Ziemba, Kenneth Miller, Ilia Slobodov, Morgan Quinley
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Publication number: 20200126760Abstract: A plasma deposition system comprising a wafer platform, a second electrode, a first electrode, a first high voltage pulser, and a second high voltage pulser. In some embodiments, the second electrode may be disposed proximate with the wafer platform. In some embodiments, the second electrode can include a disc shape with a central aperture; a central axis, an aperture diameter, and an outer diameter. In some embodiments, the first electrode may be disposed proximate with the wafer platform and within the central aperture of the second electrode. In some embodiments, the first electrode can include a disc shape, a central axis, and an outer diameter. In some embodiments, the first high voltage pulser can be electrically coupled with the first electrode. In some embodiments, the second high voltage pulser can be electrically coupled with the second electrode.Type: ApplicationFiled: December 19, 2019Publication date: April 23, 2020Inventors: Timothy Ziemba, Ilia Slobodov, John Carscadden, Kenneth Miller, James Prager
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Publication number: 20200083812Abstract: A pulse generator is disclosed that includes at least the following stages a driver stage, a transformer stage, a rectifier stage, and an output stage. The driver stage may include at least one solid state switch such as, for example, of one or more IGBTs and/or one or more MOSFETs. The driver stage may also have a stray inductance less than 1,000 nH. The transformer stage may be coupled with the driver stage and/or with a balance stage and may include one or more transformers. The rectifier stage may be coupled with the transformer stage and may have a stray inductance less than 1,000 nH. The output stage may be coupled with the rectifier stage. The output stage may output a signal pulse with a voltage greater than 2 kilovolts and a frequency greater than 5 kHz. In some embodiments, the output stage may be galvanically isolated from a reference potential.Type: ApplicationFiled: January 17, 2019Publication date: March 12, 2020Inventors: Kenneth E. Miller, Timothy Ziemba, IIia Slobodov, John G. Carscadden, James Prager
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Publication number: 20200051785Abstract: Some embodiments include a plasma sheath control system that includes an RF power supply producing an A sinusoidal waveform with a frequency greater than 20 kHz and a peak voltage greater than 1 kV and a plasma chamber electrically coupled with the RF power supply, the plasma chamber having a plurality of ions that are accelerated into a surface disposed with energies greater than about 1 kV, and the plasma chamber produces a plasma sheath within the plasma chamber from the sinusoidal waveform. The plasma sheath control system includes a blocking diode electrically connected between the RF power supply and the plasma chamber and a capacitive discharge circuit electrically coupled with the RF power supply, the plasma chamber, and the blocking diode; the capacitive discharge circuit discharges capacitive charges within the plasma chamber with a peak voltage greater than 1 kV and a discharge time that less than 250 nanoseconds.Type: ApplicationFiled: August 9, 2019Publication date: February 13, 2020Inventors: Kenneth Miller, Timothy Ziemba, James Prager, Ilia Slobodov
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Publication number: 20200035459Abstract: A plasma deposition system comprising a wafer platform, a second electrode, a first electrode, a first high voltage pulser, and a second high voltage pulser. In some embodiments, the second electrode may be disposed proximate with the wafer platform. In some embodiments, the second electrode can include a disc shape with a central aperture; a central axis, an aperture diameter, and an outer diameter. In some embodiments, the first electrode may be disposed proximate with the wafer platform and within the central aperture of the second electrode. In some embodiments, the first electrode can include a disc shape, a central axis, and an outer diameter. In some embodiments, the first high voltage pulser can be electrically coupled with the first electrode. In some embodiments, the second high voltage pulser can be electrically coupled with the second electrode.Type: ApplicationFiled: July 29, 2019Publication date: January 30, 2020Inventors: Timothy Ziemba, Ilia Slobodov, John Carscadden, Kenneth Miller, James Prager
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Publication number: 20200014378Abstract: Embodiments of the invention provide IGBT circuit modules with increased efficiencies. These efficiencies can be realized in a number of ways. In some embodiments, the gate resistance and/or voltage can be minimized. In some embodiments, the IGBT circuit module can be switched using an isolated receiver such as a fiber optic receiver. In some embodiments, a single driver can drive a single IGBT. And in some embodiments, a current bypass circuit can be included. Various other embodiments of the invention are disclosed.Type: ApplicationFiled: July 17, 2019Publication date: January 9, 2020Inventors: Timothy Ziemba, Kenneth E. Miller, John G. Carscadden, James Prager
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Publication number: 20190393791Abstract: A high voltage power system is disclosed. In some embodiments, the high voltage power system includes a high voltage pulsing power supply; a transformer electrically coupled with the high voltage pulsing power supply; an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a frequency greater than 1 kHz; and a bias compensation circuit arranged in parallel with the output. In some embodiments, the bias compensation circuit can include a blocking diode; and a DC power supply arranged in series with the blocking diode.Type: ApplicationFiled: August 29, 2019Publication date: December 26, 2019Inventors: Timothy Ziemba, Ilia Slobodov, Alex Henson, Morgan Quinley, John Carscadden, James Prager, Kenneth Miller
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Patent number: 10389345Abstract: Embodiments of the invention provide IGBT circuit modules with increased efficiencies. These efficiencies can be realized in a number of ways. In some embodiments, the gate resistance and/or voltage can be minimized. In some embodiments, the IGBT circuit module can be switched using an isolated receiver such as a fiber optic receiver. In some embodiments, a single driver can drive a single IGBT. And in some embodiments, a current bypass circuit can be included. Various other embodiments of the invention are disclosed.Type: GrantFiled: February 17, 2017Date of Patent: August 20, 2019Assignee: EAGLE HARBOR TECHNOLOGIES, INC.Inventors: Timothy Ziemba, Kenneth E. Miller, John G. Carscadden, James Prager
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Patent number: 10224822Abstract: A pulse generator is disclosed that includes at least the following stages a driver stage, a transformer stage, a rectifier stage, and an output stage. The driver stage may include at least one solid state switch such as, for example, of one or more IGBTs and/or one or more MOSFETs. The driver stage may also have a stray inductance less than 1,000 nH. The transformer stage may be coupled with the driver stage and/or with a balance stage and may include one or more transformers. The rectifier stage may be coupled with the transformer stage and may have a stray inductance less than 1,000 nH. The output stage may be coupled with the rectifier stage. The output stage may output a signal pulse with a voltage greater than 2 kilovolts and a frequency greater than 5 kHz. In some embodiments, the output stage may be galvanically isolated from a reference potential.Type: GrantFiled: June 15, 2017Date of Patent: March 5, 2019Assignee: EAGLE HARBOR TECHNOLOGIES, INC.Inventors: Kenneth E. Miller, Timothy Ziemba, Ilia Slobodov, John G. Carscadden, James Prager
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Patent number: 9929004Abstract: Systems and methods are discussed to create radiation from one or more compact toroids. Compact toroids can be created from plasma of gases within a confinement chamber using a plurality of coils of various densities of windings. High current pulses can be generated within the coil and switched at high frequencies to repeatedly generate compact toroids within the plasma. The plasma can produce radiation at various wavelengths that is focused toward a target or an intermediate focus.Type: GrantFiled: May 8, 2017Date of Patent: March 27, 2018Assignee: EAGLE HARBOR TECHNOLOGIES, INC.Inventors: Timothy Ziemba, Kenneth E. Miller, John G. Carscadden, James Prager, Angus Macnab
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Publication number: 20170294842Abstract: A pulse generator is disclosed that includes at least the following stages a driver stage, a transformer stage, a rectifier stage, and an output stage. The driver stage may include at least one solid state switch such as, for example, of one or more IGBTs and/or one or more MOSFETs. The driver stage may also have a stray inductance less than 1,000 nH. The transformer stage may be coupled with the driver stage and/or with a balance stage and may include one or more transformers. The rectifier stage may be coupled with the transformer stage and may have a stray inductance less than 1,000 nH. The output stage may be coupled with the rectifier stage. The output stage may output a signal pulse with a voltage greater than 2 kilovolts and a frequency greater than 5 kHz. In some embodiments, the output stage may be galvanically isolated from a reference potential.Type: ApplicationFiled: June 15, 2017Publication date: October 12, 2017Inventors: Kenneth E. Miller, Timothy Ziemba, IIia Slobodov, John G. Carscadden, James Prager
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Publication number: 20170243731Abstract: Systems and methods are discussed to create radiation from one or more compact toroids. Compact toroids can be created from plasma of gases within a confinement chamber using a plurality of coils of various densities of windings. High current pulses can be generated within the coil and switched at high frequencies to repeatedly generate compact toroids within the plasma. The plasma can produce radiation at various wavelengths that is focused toward a target or an intermediate focus.Type: ApplicationFiled: May 8, 2017Publication date: August 24, 2017Inventors: Timothy Ziemba, Kenneth E. Miller, John G. Carscadden, James Prager, Angus Macnab
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Patent number: 9706630Abstract: A pulse generator is disclosed that includes at least the following stages a driver stage, a transformer stage, a rectifier stage, and an output stage. The driver stage may include at least one solid state switch such as, for example, of one or more IGBTs and/or one or more MOSFETs. The driver stage may also have a stray inductance less than 1,000 nH. The transformer stage may be coupled with the driver stage and/or with a balance stage and may include one or more transformers. The rectifier stage may be coupled with the transformer stage and may have a stray inductance less than 1,000 nH. The output stage may be coupled with the rectifier stage. The output stage may output a signal pulse with a voltage greater than 2 kilovolts and a frequency greater than 5 kHz. In some embodiments, the output stage may be galvanically isolated from a reference potential.Type: GrantFiled: March 2, 2015Date of Patent: July 11, 2017Assignee: EAGLE HARBOR TECHNOLOGIES, INC.Inventors: Kenneth E. Miller, Timothy Ziemba, Ilia Slobodov, John G. Carscadden, James Prager
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Publication number: 20170163254Abstract: Embodiments of the invention provide IGBT circuit modules with increased efficiencies. These efficiencies can be realized in a number of ways. In some embodiments, the gate resistance and/or voltage can be minimized. In some embodiments, the IGBT circuit module can be switched using an isolated receiver such as a fiber optic receiver. In some embodiments, a single driver can drive a single IGBT. And in some embodiments, a current bypass circuit can be included. Various other embodiments of the invention are disclosed.Type: ApplicationFiled: February 17, 2017Publication date: June 8, 2017Inventors: Timothy Ziemba, Kenneth E. Miller, John G. Carscadden, James Prager
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Patent number: 9655221Abstract: Systems and methods are discussed to create radiation from one or more compact toroids. Compact toroids can be created from plasma of gases within a confinement chamber using a plurality of coils of various densities of windings. High current pulses can be generated within the coil and switched at high frequencies to repeatedly generate compact toroids within the plasma. The plasma can produce radiation at various wavelengths that is focused toward a target or an intermediate focus.Type: GrantFiled: August 15, 2014Date of Patent: May 16, 2017Assignee: EAGLE HARBOR TECHNOLOGIES, INC.Inventors: Timothy Ziemba, Kenneth E. Miller, John G. Carscadden, James Prager, Angus Macnab
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Patent number: 9601283Abstract: Embodiments of the invention provide IGBT circuit modules with increased efficiencies. These efficiencies can be realized in a number of ways. In some embodiments, the gate resistance and/or voltage can be minimized. In some embodiments, the IGBT circuit module can be switched using an isolated receiver such as a fiber optic receiver. In some embodiments, a single driver can drive a single IGBT. And in some embodiments, a current bypass circuit can be included. Various other embodiments of the invention are disclosed.Type: GrantFiled: October 13, 2014Date of Patent: March 21, 2017Assignee: EAGLE HARBOR TECHNOLOGIES INC.Inventors: Timothy Ziemba, Kenneth E. Miller, John G. Carscadden, James Prager
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Patent number: 9495563Abstract: Systems and methods are disclosed to integrate signals. Some embodiments include an integrator comprising an active input; a passive input; a first integrator having a first integrator input and a first integrator output; a second integrator having a second integrator input and a second integrator output; a first plurality of switches coupled with the first integrator input, the second integrator input, the active input, and the passive input; a second plurality of switches coupled with the first integrator output and the second integrator output; and a controller. The controller may be configured to control the operation of the first plurality of switches to switch the active input between the first integrator input and the second integrator input, and control the operation of the first plurality of switches to switch the passive input between the first integrator input and the second integrator input.Type: GrantFiled: June 4, 2014Date of Patent: November 15, 2016Assignee: Eagle Harbor Technologies, Inc.Inventors: Timothy Ziemba, Kenneth E. Miller, John G. Carscadden, James Prager, Ilia Slobodov, Daniel Edward Lotz
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Publication number: 20150303914Abstract: Embodiments described herein include a solid-state switch tube replacement for the radar system such as, for example, the SPY-1 radar system. Some embodiments provide for a technology for the precision switching that enables IGBT power modules to operate robustly in a series configuration and/or a parallel configuration to produce precision switching at high voltage (e.g., 20 kV and above) and high frequencies (e.g., 1 MHz and above).Type: ApplicationFiled: January 27, 2015Publication date: October 22, 2015Inventors: Timothy Ziemba, Kenneth E. Miller, John Carscadden, James Prager