Patents by Inventor James R. Capstick

James R. Capstick has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS FOR CLEANING SEMICONDUCTOR SUBSTRATES
    Publication number: 20150357180
    Abstract: Methods for cleaning semiconductor substrates with cleaning baths including ammonium hydroxide, hydrogen peroxide and a non-ionic surfactant are disclosed. The methods may result in reduced re-adhesion of released particles during cleaning which produces cleaner substrates.
    Type: Application
    Filed: June 9, 2015
    Publication date: December 10, 2015
    Applicant: SUNEDISON SEMICONDUCTOR LIMITED (UEN201334164H)
    Inventors: Sasha Joseph Kweskin, Lara Short, Tracy M. Ragan, James R. Capstick
  • Silicon wafer etching process and composition
    Patent number: 7323421
    Abstract: A process for etching silicon wafers using a caustic etchant in the form of an aqueous solution comprising water, a hydroxide ion source, and a chelating agent. The process produces silicon wafers substantially free from diffused metal ions.
    Type: Grant
    Filed: June 14, 2005
    Date of Patent: January 29, 2008
    Assignee: MEMC Electronic Materials, Inc.
    Inventors: Mark G. Stinson, Henry F. Erk, Guoqiang (David) Zhang, Mick Bjelopavlic, Alexis Grabbe, Jozef G. Vermeire, Judith A. Schmidt, Thomas E. Doane, James R. Capstick
  • Process for etching silicon wafers
    Publication number: 20040108297
    Abstract: A process for etching silicon wafers using a caustic etchant in the form of an aqueous solution comprising water and a source of hydroxide ions and generally characterized by a lower concentration of water and/or higher concentration of source of hydroxide ions. In accordance with another embodiment, the caustic etchant includes a salt additive. The process produces silicon wafers with improved surface characteristics such as flatness and nanotopography.
    Type: Application
    Filed: September 18, 2003
    Publication date: June 10, 2004
    Applicant: MEMC Electronic Materials, Inc.
    Inventors: Henry F. Erk, James R. Capstick, Thomas E. Doane, Alexis Grabbe, Judith A. Schmidt, Annlie Sing, Mark G. Stinson, Guoqiang (David) Zhang