Abstract: Techniques are disclosed for methods and apparatuses for determining when to perform or trigger events. The technique comprises determining a first cost of false positives and a second cost of missed true positives. A Receive Operating Characteristic (ROC) of a prediction model is determined for the occurrence of one or more events. The operational area on the ROC is determined based on the first costs and second costs. A threshold is determined from the ROC and is applied to a detection or prediction function. An event is triggered based on the threshold.

Abstract: Described herein are methods and systems for providing a user interface to indicate health of a tool in a manufacturing facility. A method may include receiving, via a user interface, user selection of fault detection data pertaining to a tool in a manufacturing facility, obtaining health abnormality indicators of the tool using the fault detection data, and presenting the health abnormality indicators of the tool in the user interface.

Abstract: Techniques are disclosed for methods and apparatuses for determining when to perform or trigger events. The technique comprises determining a first cost of false positives and a second cost of missed true positives. A Receive Operating Characteristic (ROC) of a prediction model is determined for the occurrence of one or more events. The operational area on the ROC is determined based on the first costs and second costs. A threshold is determined from the ROC and is applied to a detection or prediction function. An event is triggered based on the threshold.

Abstract: Techniques are disclosed for methods and apparatuses for forming for determining when to perform maintenance events. The technique comprises determining a first cost of false positives and a second cost of missed true positives. A Receive Operating Characteristic (ROC) of a prediction model is determined for the occurrence of an event. A survival function and prediction horizon is generated from the prediction model for the occurrence of an event. The operational area on the ROC is determined based on the first costs and second costs. A threshold is determined from the ROC and is applied to the survival function and prediction horizon. A maintenance event is triggered based on the threshold.

Abstract: Techniques are disclosed for methods and apparatuses for forming for determining when to perform maintenance events. The technique comprises determining a first cost of false positives and a second cost of missed true positives. A Receive Operating Characteristic (ROC) of a prediction model is determined for the occurrence of an event. A survival function and prediction horizon is generated from the prediction model for the occurrence of an event. The operational area on the ROC is determined based on the first costs and second costs. A threshold is determined from the ROC and is applied to the survival function and prediction horizon. A maintenance event is triggered based on the threshold.

Abstract: Described herein are methods and systems for providing a user interface to indicate health of a tool in a manufacturing facility. A method may include receiving, via a user interface, user selection of fault detection data pertaining to a tool in a manufacturing facility, obtaining health abnormality indicators of the tool using the fault detection data, and presenting the health abnormality indicators of the tool in the user interface.

Abstract: A generic cell controlling method and apparatus for a computer integrated manufacturing system accepts manufacturing operation commands to perform a selected manufacturing operation on a selected manufacturing tool. The sequence of generic steps to be performed by the manufacturing tool is determined, in order to implement the selected manufacturing operation. Each step is used to generate operational instructions for the tool controller. The sequence of generic steps is preferably produced using a database which has an entry for each manufacturing operation. Each entry includes parameters which are specific for each tool, and an indication of sequence of steps to be performed. When a manufacturing operation command is received, the command is matched to a database entry and the parameters and sequences associated with that entry are used to call a series of routines or modules. Associated parameters are provided to each routine for generating the operational instructions for the particular tool.