Abstract: A varifocal lens includes a substrate having an inclined region, a primary electrode disposed over the inclined region of the substrate, a dielectric layer disposed over the primary electrode, a deformable membrane disposed over and at least partially spaced away from the dielectric layer, a secondary electrode disposed over a surface of the deformable membrane facing toward or away from the dielectric layer and overlying at least a portion of the primary electrode, and a fluid between the membrane and the substrate, wherein a surface of the dielectric layer facing the secondary electrode comprises a textured surface.

Abstract: In some examples, a device includes a fluid lens having a substrate and a membrane connected to the substrate using a flexure. The fluid lens may include a fluid located within a cavity at least partially defined by the substrate and the membrane. The flexure may include a membrane attachment and an elastic element. The device may be configured so that a displacement of the membrane attachment adjusts a profile of the membrane, and may induce a compression of at least a portion of the elastic member. In some examples, a flexure may include a plurality of elastic elements, which may be attached to the substrate (e.g., through a flexure support), and a rigid element, that may include or be connected to the membrane attachment. Example devices include head-mounted devices, such as augmented reality or virtual reality devices.

Abstract: An electromechanical actuator includes a primary electrode, a secondary electrode overlying at least a portion of the primary electrode, and an electroactive layer disposed between the primary electrode and the secondary electrode, where the electroactive layer has a first curvature when zero voltage is applied between the primary electrode and the secondary electrode, and a second curvature when a non-zero voltage is applied between the primary electrode and the secondary electrode.

Abstract: A bender beam actuator includes a first layer of piezoelectric material and a second layer of piezoelectric material overlying a portion of the first layer of piezoelectric material, where a length of the first layer of piezoelectric material is at least 2% greater than a length of the second layer of piezoelectric material.

Abstract: A varifocal lens includes a substrate having an inclined region, a primary electrode disposed over the inclined region of the substrate, a dielectric layer disposed over the primary electrode, a deformable membrane disposed over and at least partially spaced away from the dielectric layer, a secondary electrode disposed over a surface of the deformable membrane facing toward or away from the dielectric layer and overlying at least a portion of the primary electrode, and a fluid between the membrane and the substrate, wherein a surface of the dielectric layer facing the secondary electrode comprises a textured surface.

Abstract: A semiconductor device such as a resonant device has a capacitive, non-piezoelectric, actuator, the actuator comprising a depletion region. A capacitive actuator for a semiconductor device, a method for fabricating such an actuator, and a method for operating a semiconductor device are also provided. In the operating method, a drive voltage is applied across the depletion region of the semiconductor device, such as a drive voltage having an alternating voltage component for driving a resonant semiconductor device.