Abstract: A tray for an ampoule of a delivery system of solid precursor materials used in Atomic Layer Deposition (ALD) processes, Chemical Vapor Deposition (CVD) processes or both. The tray is configured to be able to have a reduced profile size when compressed to enhance the ease of which the tray can be inserted into the ampoule, and the tray is configured to expand in size to make improved contact with inner wall surfaces of the ampoule to provide improved heat transfer from the inner wall to the tray and ultimately to the solid precursor materials disposed on the tray.

Abstract: An equipment-carrying crawler (20) includes a rolling track (44) and a structural support (70). The structural support (70) supports equipment (16). Lifting magnets (72) are coupled to the rolling track (44) and to the structural support (70). The lifting magnets (72) are configured to oppose each other, lift the structural support (70), and aid in the translation of the rolling track (44).

Abstract: A method and apparatus is provided for cooking scrambled eggs wherein a container is provided for holding a charge of uncooked, shelled eggs and is adapted to be matingly and sealingly engaged with a cover assembly around a projecting cylindrical, multi-orificed, steam injection conduit. A plurality of jets of steam and air are injected at spaced locations into the interior of the charge of eggs to agitate and cook the eggs. A disc-like baffle plate is secured to, and concentric with, the injection conduit and is adapted to be received in a free space of the container above the charge of eggs for inhibiting the upward spattering of the eggs during steam injection. A vent passage is provided above the cover plate and communicates with the container during cooking of the eggs via an annular aperture in the cover plate concentric with the steam conduit to allow steam and air to escape from the container during cooking to maintain the interior volume of the container at substantially atmospheric pressure.

Abstract: A method is provided for cooking scrambled eggs wherein a container is provided for holding a charge of uncooked, shelled eggs and is adapted to be matingly and sealingly engaged with a cover assembly around a projecting cylindrical, multi-orificed, steam injection conduit. A plurality of jets of steam and air are injected at spaced locations into the interior of the charge of eggs to agitate and cook the eggs. A disc-like baffle plate is secured to, and concentric with, the injection conduit and is adapted to be received in a free space of the container above the charge of eggs for inhibiting the upward spattering of the eggs during steam injection. A vent passage is provided above the cover plate and communicates with the container during cooking of the eggs via an annular aperture in the cover plate concentric with the steam conduit to allow steam and air to escape from the container during cooking to maintain the interior volume of the container at substantially atmospheric pressure.