Abstract: An apparatus and method for holding a substrate on a support layer in a processing chamber. The method includes the steps of positioning the substrate a predetermined distance from the support layer, introducing a plasma in the processing chamber, lowering the substrate to a point where the substrate engages the support layer, and maintaining the plasma for a predetermined time. The apparatus is directed to a susceptor system for a processing chamber in which a substrate is electrostatically held essentially flat. The apparatus includes a substrate support and a support layer composed of a dielectric material disposed on the substrate support. At least one lift pin is used for supporting the substrate relative to the support layer. Means are provided for moving each lift pin relative to the support layer. Means are also provided for producing a plasma within the processing chamber.

Abstract: Lithium manganese oxide particles have been produced with an average diameter less than about 250 nm. The particles have a high degree of uniformity. The particles are formed by the heat treatment of nanoparticles of manganese oxide. The lithium manganese oxide particles are useful as active materials in the positive electrodes of lithium based batteries. Improved batteries result from the use of the uniform nanoscale lithium manganese oxide particles.

Abstract: Batteries based on nanoparticles are demonstrated to achieve high energy densities. Vanadium oxide nanoparticles can have several different stoichiometries and corresponding crystal lattices. The nanoparticles preferably have average diameters less than about 150 nm. Cathodes produced using the vanadium oxide nanoparticles and a binder can be used to construct lithium batteries or lithium ion batteries. The nanoparticles may have energy densities greater than about 900 Wh/kg.

Abstract: Vanadium oxide nanoparticles were produced with vanadium in a variety of oxidation states and with different crystalline lattice structures. These particles preferably have an average diameter of 150 nm or less with a narrow distribution of diameters. The particles manifest unique properties that result from the small particle size and correspondingly large surface area. A variety of the vanadium oxide nanoparticles can be produced by a versatile laser pyrolysis arrangement. These nanoparticles can be further processed to change the properties of the particles without destroying the nanoscale size of the particles.

Abstract: The stoichiometry and/or crystal structure of vanadium oxide particles are altered by heating initial particles of vanadium oxide under mild conditions. The temperature is generally at least about 300.degree. C. less than the melting point of both the initial vanadium oxide particle and the product vanadium oxide particles. Preferred initial particles are vanadium oxide nanoparticles. The heating can be performed under an oxidizing atmosphere or an inert atmosphere, depending on the particular initial particles and the desired product particles.

Abstract: Batteries based on nanoparticles are demonstrated that achieve high energy densities. Vanadium oxide nanoparticles can have several different stoichiometries and corresponding crystal lattices. The nanoparticles preferably have average diameters less than about 500 nm and more preferably less than about 150 nm. Cathodes produced using the vanadium oxide nanoparticles and a binder can be used to construct lithium batteries or lithium ion batteries. The nanoparticles may have energy densities greater than about 900 Wh/kg.