Abstract: Micro-electro-mechanical system (MEMS) devices are disclosed, including a MEMS device comprising a semiconductor die including integrated circuitry, a structure mounted on the semiconductor die and covering at least a portion of the circuitry, the structure defining a space between the structure and the at least a portion of the circuitry, and a transducer including a membrane, the transducer located outside of the space.

Abstract: The application describes a MEMS transducer in which first and second conductive elements of a capacitor are both provided on the membrane. The membrane is shaped such that the first and second conductive elements are displaced relative to each other when the flexible membrane deflects in response to a pressure differential across the membrane. For example the membrane may be corrugated.

Abstract: This applications relates to methods and apparatus for amplifying signals from capacitive transducers, in particular MEMS transducers such as MEMS capacitive microphones. An amplifier circuit has a signal node for receiving the input signal, a transducer biasing node for outputting a transducer bias voltage for biasing the capacitive transducer, and a voltage buffer configured to generate a buffered bias voltage at a buffer node. An amplifier arrangement is configured to receive the input signal from the signal node and the buffered bias voltage.

Abstract: Micro-electro-mechanical system (MEMS) devices are disclosed, including a MEMS device comprising a semiconductor die including integrated circuitry, a structure mounted on the semiconductor die and covering at least a portion of the circuitry, the structure defining a space between the structure and the at least a portion of the circuitry, and a transducer including a membrane, the transducer located outside of the space.

Abstract: This applications relates to methods and apparatus for amplifying signals from capacitive transducers, in particular MEMS transducers such as MEMS capacitive microphones. An amplifier circuit has a signal node for receiving the input signal, a transducer biasing node for outputting a transducer bias voltage for biasing the capacitive transducer, and a voltage buffer configured to generate a buffered bias voltage at a buffer node. An amplifier arrangement is configured to receive the input signal from the signal node and the buffered bias voltage.

Abstract: An amplifier circuit has a transducer biasing node for outputting a transducer bias voltage for biasing the capacitive transducer and a signal node for receiving the input signal. An amplifier arrangement comprising a feedback resistor network provides an amplified output signal. A voltage buffer provides a buffered bias voltage at a buffer node which is connected to a terminal of the feedback resistor network, to at least partly define the quiescent level of the output signal. The buffer node is electrically coupled to the transducer biasing node via a capacitance which may form part of a bias filter.

Abstract: The present disclosure relates to a protection system for protecting a MEMS transducer of a MEMS device from electrostatic capture, wherein the MEMS transducer is operable in a normal-sensitivity, mode and in a reduced-sensitivity mode.

Abstract: The present disclosure relates to a protection system for protecting a MEMS transducer of a MEMS device from electrostatic capture, wherein the MEMS transducer is operable in a normal-sensitivity, mode and in a reduced-sensitivity mode.

Abstract: MEMS devices are disclosed including a MEMS microphone device comprising a first transducer adjoining a sound port, a second transducer not adjoining a sound port, a housing defining a shared volume for the first and second transducers, and circuitry arranged to combine a first signal from the first transducer and a second signal from the second transducer to produce an output signal.

Abstract: The present disclosure relates to a micro electro-mechanical system (MEMS) device comprising a fixed electrode, a moveable electrode that is moveable with respect to the fixed electrode and an output terminal for outputting a transducer output signal indicative of a capacitance between the fixed electrode and the moveable electrode. A package is provided which houses the fixed electrode and the moveable electrode, the package defining a first volume on a first side of the moveable electrode. The moveable electrode is moveable within the first volume in response to sound or pressure waves incident on the moveable electrode. A power dissipation element is disposed within the package. The power dissipation element is configured to receive a generated stimulus signal and to dissipate heat into the first volume so as to modulate the pressure of air within the first volume in accordance with the received generated stimulus signal.

Abstract: The application describes a MEMS transducer in which first and second conductive elements of a capacitor are both provided on the membrane. The membrane is shaped that the first and second conductive elements are displaced relative to each other when the flexible membrane deflects in response to a pressure differential across the membrane. For example the membrane may be corrugated.

Abstract: A system may include control circuitry for detecting a plosive event associated with a microphone transducer and in response to the plosive event, causing restoration of acoustic sense operation of the microphone transducer and a processing circuit associated with the microphone transducer. A system for configuring a filter having at least two frequency response configurations to achieve an effective frequency response configuration intermediate to the at least two frequency response configurations may include control circuitry for rapidly switching between the at least two frequency response configurations such that a weighted average frequency response of the filter corresponds to the effective frequency response configuration.

Abstract: The application describes a MEMS transducer in which first and second conductive elements of a capacitor are both provided on the membrane. The membrane is shaped that the first and second conductive elements are displaced relative to each other when the flexible membrane deflects in response to a pressure differential across the membrane. For example the membrane may be corrugated.

Abstract: Devices are disclosed including a transducer device comprising a first circuit for operating a MEMS transducer and connected to a supply terminal for receiving a power supply voltage, and a power consumption levelling circuit for dissipating a correction power and arranged to adjust the correction power to at least partially offset a change in power consumption of the first circuit due to a change in the power supply voltage.

Abstract: MEMS devices are disclosed including a MEMS microphone device comprising a first transducer adjoining a sound port, a second transducer not adjoining a sound port, a housing defining a shared volume for the first and second transducers, and circuitry arranged to combine a first signal from the first transducer and a second signal from the second transducer to produce an output signal.

Abstract: This applications relates to methods and apparatus for amplifying signals from capacitive transducers, in particular MEMS transducers such as MEMS capacitive microphones. An amplifier circuit has a transducer biasing node (102) for outputting a transducer bias voltage for biasing the capacitive transducer (101) and a signal node (103) for receiving the input signal (Vin). An amplifier arrangement (108) comprising a feedback resistor network (304, 305) provides an amplified output signal (Vout). A voltage buffer (306) provides a buffered bias voltage at a buffer node (307) which is connected to a terminal of the feedback resistor network, to at least partly define the quiescent level of the output signal. The buffer node (307) is electrically coupled to the transducer biasing node (102) via a capacitance (106) which may form part of a bias filter.

Abstract: This application relates to circuitry for processing sense signals generated by MEMS capacitive transducers for compensating for distortion in such sense signals. The circuitry has a signal path between an input (204) for receiving the sense signal and an output (205) for outputting an output signal based on said sense signal. Compensation circuitry (206, 207) is configured to monitor the signal at a first point along the signal path and generate a correction signal (Scorr); and modify the signal at at least a second point along said signal path based on said correction signal. The correction signal is generated as a function of the value of the signal at the first point along the signal path so as to introduce compensation components into the output signal that compensate for distortion components in the sense signal. The first point in the signal path may be before or after the second point in the signal path.

Abstract: The application describes a MEMS transducer in which first and second conductive elements of a capacitor are both provided on the membrane. The membrane is shaped that the first and second conductive elements are displaced relative to each other when the flexible membrane deflects in response to a pressure differential across the membrane. For example the membrane may be corrugated.

Abstract: This application relates to circuitry for processing sense signals generated by MEMS capacitive transducers for compensating for distortion in such sense signals. The circuitry has a signal path between an input (204) for receiving the sense signal and an output (205) for outputting an output signal based on said sense signal. Compensation circuitry (206, 207) is configured to monitor the signal at a first point along the signal path and generate a correction signal (Scorr); and modify the signal at at least a second point along said signal path based on said correction signal. The correction signal is generated as a function of the value of the signal at the first point along the signal path so as to introduce compensation components into the output signal that compensate for distortion components in the sense signal. The first point in the signal path may be before or after the second point in the signal path.

Abstract: This application relates to circuitry for processing sense signals generated by MEMS capacitive transducers for compensating for distortion in such sense signals. The circuitry has a signal path between an input (204) for receiving the sense signal and an output (205) for outputting an output signal based on said sense signal. Compensation circuitry (206, 207) is configured to monitor the signal at a first point along the signal path and generate a correction signal (Scorr); and modify the signal at at least a second point along said signal path based on said correction signal. The correction signal is generated as a function of the value of the signal at the first point along the signal path so as to introduce compensation components into the output signal that compensate for distortion components in the sense signal. The first point in the signal path may be before or after the second point in the signal path.