Patents by Inventor James Timony

James Timony has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fabrication of tungsten MEMS structures
    Patent number: 9878901
    Abstract: Thick (i.e., greater than two microns), fine-grained, low-stress tungsten MEMS structures are fabricated at low temperatures, particularly for so-called “MEMS last” fabrication processes (e.g., when MEMS structures are fabricated after electronic circuitry is fabricated). Means for very accurately etching structural details from the deposited tungsten layer and for strongly and stably anchoring the tungsten layer to an underlying substrate are disclosed. Also, means for removing a sacrificial layer underlying the mobile tungsten layer without damaging the tungsten or allowing it to be drawn down and stuck by surface tension is disclosed.
    Type: Grant
    Filed: March 27, 2015
    Date of Patent: January 30, 2018
    Assignee: Analog Devices, Inc.
    Inventors: John A. Geen, George M. Molnar, Gregory S. Davis, Bruce Ma, Kenneth J. Cole, James Timony, Kenneth Flanders
  • Fabrication of Tungsten MEMS Structures
    Publication number: 20150336790
    Abstract: Thick (i.e., greater than two microns), fine-grained, low-stress tungsten MEMS structures are fabricated at low temperatures, particularly for so-called “MEMS last” fabrication processes (e.g., when MEMS structures are fabricated after electronic circuitry is fabricated). Means for very accurately etching structural details from the deposited tungsten layer and for strongly and stably anchoring the tungsten layer to an underlying substrate are disclosed. Also, means for removing a sacrificial layer underlying the mobile tungsten layer without damaging the tungsten or allowing it to be drawn down and stuck by surface tension is disclosed.
    Type: Application
    Filed: March 27, 2015
    Publication date: November 26, 2015
    Inventors: John A. Geen, George M. Molnar, Gregory S. Davis, Bruce Ma, Kenneth J. Cole, James Timony, Kenneth Flanders