Patents by Inventor James V. Beach

James V. Beach has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Resist resolution using anisotropic acid diffusion
    Patent number: 7541137
    Abstract: Methods for increasing the resolution capability and line edge roughness of resists, including chemically amplified resists are disclosed. In order to improve upon the resolution, dipolar species may be coupled to a photoacid group and/or added to the resist, where the dipolar species may influence the direction of acid diffusion. An electric field may be applied to a post-exposure bake process and/or a soft bake process and the resist layer is developed.
    Type: Grant
    Filed: December 19, 2005
    Date of Patent: June 2, 2009
    Inventor: James V. Beach