Patents by Inventor James V. McManus
James V. McManus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20200248873Abstract: Fluid dispensing assemblies are disclosed, for use in fluid supply packages in which such fluid dispensing assemblies as coupled to fluid supply vessels, for dispensing of fluids such as semiconductor manufacturing fluids. The fluid dispensing assemblies in specific implementations are configured to prevent application of excessive force to valve elements in the fluid dispensing assemblies, and/or for avoiding inadvertent or accidental open conditions of vessels that may result in leakage of toxic or otherwise hazardous or valuable gas. Also described are alignment devices for assisting coupling of coupling elements, e.g., coupling elements of fluid supply packages of the foregoing type, so that damage to such couplings as a result of misalignment is avoided.Type: ApplicationFiled: April 22, 2020Publication date: August 6, 2020Inventors: Daniel ELZER, Ying TANG, Barry L. CHAMBERS, Joseph D. SWEENEY, Shaun M. WILSON, Steven E. BISHOP, Steven ULANECKI, James V. MCMANUS, Oleg BYL, Christopher SCANNELL, Edward E. JONES, Joseph R. DESPRES
-
Publication number: 20190078696Abstract: Fluid supply packages of varying types are described, which are useful for delivery of fluids to fluid-utilizing facilities such as semiconductor manufacturing facilities, solar panel manufacturing facilities, and flat-panel display manufacturing facilities. The fluid supply packages include fluid supply vessels and valve heads of varied configuration, as useful to constitute fluid supply packages that are pressure-regulated and/or adsorbent-based in character.Type: ApplicationFiled: July 8, 2016Publication date: March 14, 2019Inventors: Glenn M. Tom, Karl W. Olander, James A. Dietz, Michael J. Wodjenski, Edward A. Sturm, Susan K. Dimascio, Luping Wang, James V. McManus, Steven M. Lurcott, Jose I. Amo, Paul J. Marganski, Joseph D. Sweeney, Shaun M. Wilson, Steven E. Bishop, Greg Nelson, Donald J. Carruthers, Sharad N. Yedave, Ying Tang, Joseph Despres, Barry Chambers, Richard Ray, Daniel Elzer
-
Publication number: 20180119888Abstract: Fluid dispensing assemblies are disclosed, for use in fluid supply packages in which such fluid dispensing assemblies as coupled to fluid supply vessels, for dispensing of fluids such as semiconductor manufacturing fluids. The fluid dispensing assemblies in specific implementations are configured to prevent application of excessive force to valve elements in the fluid dispensing assemblies, and/or for avoiding inadvertent or accidental open conditions of vessels that may result in leakage of toxic or otherwise hazardous or valuable gas. Also described are alignment devices for assisting coupling of coupling elements, e.g., coupling elements of fluid supply packages of the foregoing type, so that damage to such couplings as a result of misalignment is avoided.Type: ApplicationFiled: May 11, 2016Publication date: May 3, 2018Inventors: Daneil ELZER, Ying TANG, Barry Lewis CHAMBERS, Joseph D. SWEENEY, Shaun M. WILSON, Steven ULANECKI, Steven E. BISHOP, James V. MCMANUS, Karl W. OLANDER, Edward E. JONES, Oleg BYL, Joseph R. DESPRES, Christopher SCANNELL
-
Patent number: 9518971Abstract: A system and method for recovering high value gas from a process stream, material or environment containing same, e.g., xenon by contacting gas from the process stream, material or environment with a carbon adsorbent effective to sorptively capture same, free of or with reduced concentration of fluid species present with the high value gas in the high value gas-containing gas in the process stream, material or environment. Other aspects of the disclosure include a radon detection method and product.Type: GrantFiled: October 4, 2014Date of Patent: December 13, 2016Assignee: ENTEGRIS, INC.Inventors: Thomas H. Baum, J. Donald Carruthers, Richard Fricke, Joshua B. Sweeney, James V. McManus, Edward A. Sturm
-
Publication number: 20160041136Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.Type: ApplicationFiled: October 19, 2015Publication date: February 11, 2016Applicant: Entegris, Inc.Inventors: James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim, Frank DiMeo, JR.
-
Patent number: 9170246Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.Type: GrantFiled: October 15, 2013Date of Patent: October 27, 2015Assignee: ENTEGRIS, INC.Inventors: James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim, Frank DiMeo, Jr.
-
Patent number: 9097611Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel.Type: GrantFiled: June 7, 2011Date of Patent: August 4, 2015Assignee: ENTEGRIS, INC.Inventors: James V. McManus, James Dietz, Steven M. Lurcott
-
Publication number: 20150027202Abstract: A system and method for recovering high value gas from a process stream, material or environment containing same, e.g., xenon by contacting gas from the process stream, material or environment with a carbon adsorbent effective to sorptively capture same, free of or with reduced concentration of fluid species present with the high value gas in the high value gas-containing gas in the process stream, material or environment. Other aspects of the disclosure include a radon detection method and product.Type: ApplicationFiled: October 4, 2014Publication date: January 29, 2015Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: Thomas H. Baum, J. Donald Carruthers, Richard Fricke, Joshua B. Sweeney, James V. McManus, Edward A. Sturm
-
Patent number: 8882889Abstract: A system and method for recovering high value gas from a process stream, material or environment containing same, e.g., xenon by contacting gas from the process stream, material or environment with a carbon adsorbent effective to sorptively capture same, free of or with reduced concentration of fluid species present with the high value gas in the high value gas-containing gas in the process stream, material or environment. Other aspects of the disclosure include a radon detection method and product.Type: GrantFiled: June 22, 2011Date of Patent: November 11, 2014Assignee: Advanced Technology Materials, Inc.Inventors: Thomas H. Baum, J. Donald Carruthers, Richard Fricke, Joshua B. Sweeney, James V. McManus, Edward A. Sturm
-
Publication number: 20140234436Abstract: A system and process for generating and packaging phosphine gas, in which the process includes: reacting water and aluminum phosphide to generate phosphine, and providing the phosphine in a gas mixture at a phosphine concentration below a lower explosive limit; adsorptively removing phosphine from the gas mixture; and packaging the removed phosphine in a fluid storage and dispensing vessel.Type: ApplicationFiled: June 12, 2012Publication date: August 21, 2014Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: James V. McManus, Edward A. Sturm, Thomas H. Baum, J. Donald Carruthers, Joshua B. Sweeney
-
Publication number: 20140041440Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.Type: ApplicationFiled: October 15, 2013Publication date: February 13, 2014Applicant: Advanced Technology Materials, Inc.Inventors: James DIETZ, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim, Frank Dimeo, JR.
-
Patent number: 8555705Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.Type: GrantFiled: June 28, 2011Date of Patent: October 15, 2013Assignee: Advanced Technology Materials, Inc.Inventors: James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim, Frank Dimeo, Jr.
-
Publication number: 20130112076Abstract: A system and method for recovering high value gas from a process stream, material or environment containing same, e.g., xenon by contacting gas from the process stream, material or environment with a carbon adsorbent effective to sorptively capture same, free of or with reduced concentration of fluid species present with the high value gas in the high value gas-containing gas in the process stream, material or environment. Other aspects of the disclosure include a radon detection method and product.Type: ApplicationFiled: June 22, 2011Publication date: May 9, 2013Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: Thomas H. Baum, J. Donald Carruthers, Richard Fricke, Joshua B. Sweeney, James V. McManus, Edward A. Sturm
-
Patent number: 8282023Abstract: Fluid storage and dispensing systems, and processes for supplying fluids for use thereof. Various arrangements of fluid storage and dispensing systems are described, involving permutations of the physical sorbent-containing fluid storage and dispensing vessels and internal regulator-equipped fluid storage and dispensing vessels. The systems and processes are applicable to a wide variety of end-use applications, including storage and dispensing of hazardous fluids with enhanced safety. In a specific end-use application, reagent gas is dispensed to a semiconductor manufacturing facility from a large-scale, fixedly positioned fluid storage and dispensing vessel containing physical sorbent holding gas at subatmospheric pressure, with such vessel being refillable from a safe gas source of refill gas, as disclosed herein.Type: GrantFiled: May 31, 2011Date of Patent: October 9, 2012Assignee: Advanced Technology Materials, Inc.Inventors: W. Karl Olander, James V. McManus, Steven J. Hultquist, Jose I. Arno, Peter C. Van Buskirk
-
Publication number: 20120111374Abstract: Apparatus and methods for cleaning ion implanters and/or components thereof are described, utilizing cleaning agents reacted with residue deposits to effect removal thereof. An endpoint detection apparatus and method are also disclosed, which may be integrated in the cleaning apparatus and methods to provide highly efficient utilization of the cleaning agent and avoidance of deleterious effects that otherwise can occur when cleaning agents are continued to be exposed to an implanter or components thereof after cleaning has been completed.Type: ApplicationFiled: November 8, 2011Publication date: May 10, 2012Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: Joseph R. Despres, James V. McManus, Richard D. Chism, Edward E. Jones, Joseph D. Sweeney, Steven G. Sergi, Ying Tang, Michael J. Wodjenski, Richard S. Ray, Barry Lewis Chambers
-
Publication number: 20110252883Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.Type: ApplicationFiled: June 28, 2011Publication date: October 20, 2011Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim, Frank Dimeo, JR.
-
Publication number: 20110232367Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel.Type: ApplicationFiled: June 7, 2011Publication date: September 29, 2011Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: James V. McManus, James A. Dietz, Steven M. Lurcott
-
Publication number: 20110226874Abstract: Fluid storage and dispensing systems, and processes for supplying fluids for use thereof. Various arrangements of fluid storage and dispensing systems are described, involving permutations of the physical sorbent-containing fluid storage and dispensing vessels and internal regulator-equipped fluid storage and dispensing vessels. The systems and processes are applicable to a wide variety of end-use applications, including storage and dispensing of hazardous fluids with enhanced safety. In a specific end-use application, reagent gas is dispensed to a semiconductor manufacturing facility from a large-scale, fixedly positioned fluid storage and dispensing vessel containing physical sorbent holding gas at subatmospheric pressure, with such vessel being refillable from a safe gas source of refill gas, as disclosed herein.Type: ApplicationFiled: May 31, 2011Publication date: September 22, 2011Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: W. Karl Olander, James V. McManus, Steven J. Hultquist, Jose I. Arno, Peter C. Van Buskirk
-
Patent number: 7966879Abstract: A monitoring system (100) for monitoring fluid in a fluid supply vessel (22, 24, 26, 28, 108) during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors (114, 126) for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module (40, 132, 146) operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor (50, 150) and display (52, 150) operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.Type: GrantFiled: October 24, 2005Date of Patent: June 28, 2011Assignee: Advanced Technology Materials, Inc.Inventors: James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim, Frank Dimeo, Jr.
-
Patent number: 7955797Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel.Type: GrantFiled: October 25, 2004Date of Patent: June 7, 2011Assignee: Advanced Technology Materials, Inc.Inventors: James V. McManus, James A. Dietz, Steven M. Lurcott