Abstract: An X-ray generator comprises an evacuated and sealed X-ray tube, an electron gun, an X-ray target, an internal electron mask, and an X-ray window consisting of a thin tube of material with low X-ray absorption and high mechanical strength, for example beryllium. The window connects the tube to the target assembly containing the X-ray target. The generator preferably also includes a system for focusing and steering the electron beam onto the target, a cooling system to cool the target material, kinematic mounts to allow precise and repeatable mounting of X-ray devices for focusing the X-ray beam, and X-ray focusing devices of varying configurations and methods. The X-ray generator of the invention produces an X-ray source having a focal spot or line of very small dimensions and is capable of producing a high intensity X-ray beam at a relatively small point of application using a low operating power.

Abstract: An ion microprobe has an ion extraction arrangement formed by a pair of cone-shaped guard electrodes. The guard electrodes are positioned to lie tangentially to each other and to a planar surface from which ions are extracted with their apexes coinciding at the point of extraction. They have equal apex angles of preferably 90.degree.. An aperture is provided at the common apex and electric fields oppositely polarized with respect to each other are provided within each guard electrode for ion and electron beam extraction.