Patents by Inventor James Vitarelli

James Vitarelli has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for water vapor enhanced charged-particle-beam machining
    Patent number: 6140655
    Abstract: Water vapor enhanced focused particle beam machining speeds up the removal of polymer-based dielectric materials from areas surrounding metallic interconnects on integrated circuits while at the same time decreasing the rate of removal of aluminum. Selective material removal protects metal interconnects from machining damage and greatly reduces the time that protective material is exposed to the particle beam.
    Type: Grant
    Filed: March 24, 1999
    Date of Patent: October 31, 2000
    Assignee: North Carolina State University
    Inventors: Phillip E. Russell, Dieter P. Griffis, Gordon M. Shedd, Terrance J. Stark, James Vitarelli
  • Method for water vapor enhanced charged-particle-beam machining
    Patent number: 5958799
    Abstract: Water vapor enhanced focused particle beam machining speeds up the removal of polymer-based dielectric materials from areas surrounding metallic interconnects on integrated circuits while at the same time decreasing the rate of removal of aluminum. Selective material removal protects metal interconnects from machining damage and greatly reduces the time that protective material is exposed to the particle beam.
    Type: Grant
    Filed: April 13, 1995
    Date of Patent: September 28, 1999
    Assignee: North Carolina State University
    Inventors: Phillip E. Russell, Dieter P. Griffis, Gordon M. Shedd, Terrance J. Stark, James Vitarelli