Patents by Inventor James W. Getz
James W. Getz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11699894Abstract: A MEMS tunable VCSEL includes a membrane device having a mirror and a distal-side electrostatic cavity for displacing the mirror to increase a size of an optical cavity. A VCSEL device includes an active region for amplifying light. Then, one or more proximal-side electrostatic cavities are defined between the VCSEL device and the membrane device and used to displace the mirror to decrease a size of an optical cavity.Type: GrantFiled: August 16, 2021Date of Patent: July 11, 2023Assignee: Excelitas Technologies Corp.Inventors: James W. Getz, Peter S. Whitney
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Publication number: 20230046578Abstract: A MEMS tunable VCSEL includes a membrane device having a mirror and a distal-side electrostatic cavity for displacing the mirror to increase a size of an optical cavity. A VCSEL device includes an active region for amplifying light. Then, a proximal-side electrostatic cavity is defined between the VCSEL device and the membrane device is used to displace the mirror to decrease a size of an optical cavity.Type: ApplicationFiled: June 28, 2022Publication date: February 16, 2023Applicant: Excelitas Technologies Corp.Inventors: James W. Getz, Peter S. Whitney
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Publication number: 20230051091Abstract: A MEMS tunable VCSEL includes a membrane device having a mirror and a distal-side electrostatic cavity for displacing the mirror to increase a size of an optical cavity. A VCSEL device includes an active region for amplifying light. Then, one or more proximal-side electrostatic cavities are defined between the VCSEL device and the membrane device and used to displace the mirror to decrease a size of an optical cavity.Type: ApplicationFiled: August 16, 2021Publication date: February 16, 2023Inventors: James W. Getz, Peter S. Whitney
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Patent number: 11431151Abstract: A MEMS tunable VCSEL includes a membrane device having a mirror and a distal-side electrostatic cavity for displacing the mirror to increase a size of an optical cavity. A VCSEL device includes an active region for amplifying light. Then, a proximal-side electrostatic cavity is defined between the VCSEL device and the membrane device is used to displace the mirror to decrease a size of an optical cavity.Type: GrantFiled: November 5, 2019Date of Patent: August 30, 2022Assignee: Excelitas Technologies Corp.Inventors: James W. Getz, Peter S. Whitney
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Patent number: 10951009Abstract: A design and method for introducing asymmetric crystal strain to control polarization in a tunable VCSEL, either optically or electrically pumped. The invention is especially relevant to wafer- or die-bonded tunable VCSELs. Then, mechanical stress is applied to the half VCSEL device by asymmetric arrangement of metal bond pads.Type: GrantFiled: May 10, 2019Date of Patent: March 16, 2021Assignee: Excelitas Technologies Corp.Inventors: Bartley C. Johnson, Mark R. Malonson, Walid A. Atia, Mark E. Kuznetsov, James W. Getz, Peter S. Whitney
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Publication number: 20200144793Abstract: A MEMS tunable VCSEL includes a membrane device having a mirror and a distal-side electrostatic cavity for displacing the mirror to increase a size of an optical cavity. A VCSEL device includes an active region for amplifying light. Then, a proximal-side electrostatic cavity is defined between the VCSEL device and the membrane device is used to displace the mirror to decrease a size of an optical cavity.Type: ApplicationFiled: November 5, 2019Publication date: May 7, 2020Inventors: James W. Getz, Peter S. Whitney
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Publication number: 20190348815Abstract: A design and method for introducing asymmetric crystal strain to control polarization in a tunable VCSEL, either optically or electrically pumped. The invention is especially relevant to wafer- or die-bonded tunable VCSELs. Then, mechanical stress is applied to the half VCSEL device by asymmetric arrangement of metal bond pads.Type: ApplicationFiled: May 10, 2019Publication date: November 14, 2019Inventors: Bartley C. Johnson, Mark R. Malonson, Walid A. Atia, Mark E. Kuznetsov, James W. Getz, Peter S. Whitney
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Patent number: 9874740Abstract: A Fabry-Perot tunable filter comprises a membrane device. The membrane device includes a support structure having an optical port. Also, the membrane device has an optical membrane structure separated from the support structure over the optical port. The optical membrane structure includes a center body portion and an outer body portion. Tethers extend radially from the center body portion to the outer body portion of the optical membrane structure. The center body portion has an area that is about equal or smaller than the area of the optical port.Type: GrantFiled: May 25, 2012Date of Patent: January 23, 2018Assignee: Axsun Technologies, Inc.Inventors: Vaibhav Mathur, Peter S. Whitney, James W. Getz
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Patent number: 9036235Abstract: An optical membrane device comprises a substrate, at least one support block on a surface of the substrate, and at least one plate. A torsion beam supports the plate above the substrate on the support block. The optical membrane device also includes an optical membrane structure supported by the plate above the substrate and at least one electrode on the substrate underneath the plate. In one implementation, the optical membrane device further comprises a tether for coupling the optical membrane structure to the plate. The tether extends between the optical membrane structure and the plate. In another implementation, the substrate of the optical membrane device has an optical port through the substrate directly below the optical membrane structure. The plate is substantially balanced around the torsion beam to minimize a sensitivity to orientation in a gravitational field.Type: GrantFiled: May 9, 2012Date of Patent: May 19, 2015Assignee: Axsun Technologies, Inc.Inventors: Vaibhav Mathur, Dale C. Flanders, Peter S. Whitney, James W. Getz
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Patent number: 8781287Abstract: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. The refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.Type: GrantFiled: July 19, 2013Date of Patent: July 15, 2014Assignee: Axsun Technologies, Inc.Inventors: Dale C. Flanders, James W. Getz, Walid A. Atia, Peter S. Whitney, Mark E. Kuznetsov
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Patent number: 8675293Abstract: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for a forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. The refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.Type: GrantFiled: January 25, 2010Date of Patent: March 18, 2014Assignee: Axsun Technologies, Inc.Inventors: Dale C. Flanders, James W. Getz, Peter S. Whitney, Mark E. Kuznetsov, Christopher C. Cook
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Publication number: 20130314794Abstract: A Fabry-Perot tunable filter comprises a membrane device. The membrane device includes a support structure having an optical port. Also, the membrane device has an optical membrane structure separated from the support structure over the optical port. The optical membrane structure includes a center body portion and an outer body potion. Tethers extend radially from the center body portion to the outer body portion of the optical membrane structure. The center body portion has an area that is about equal or smaller than the area of the optical port.Type: ApplicationFiled: May 25, 2012Publication date: November 28, 2013Applicant: AXSUN TECHNOLOGIES, INC.Inventors: Vaibhav Mathur, Peter S. Whitney, James W. Getz
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Publication number: 20130305513Abstract: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. The refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.Type: ApplicationFiled: July 19, 2013Publication date: November 21, 2013Applicant: Axsun Technologies, Inc.Inventors: Dale C. Flanders, James W. Getz, Walid A. Atia, Peter S. Whitney, Mark E. Kuznetsov
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Publication number: 20130301098Abstract: An optical membrane device comprises a substrate, at least one support block on a surface of the substrate, and at least one plate. A torsion beam supports the plate above the substrate on the support block. The optical membrane device also includes an optical membrane structure supported by the plate above the substrate and at least one electrode on the substrate underneath the plate. In one implementation, the optical membrane device further comprises a tether for coupling the optical membrane structure to the plate. The tether extends between the optical membrane structure and the plate. In another implementation, the substrate of the optical membrane device has an optical port through the substrate directly below the optical membrane structure. The plate is substantially balanced around the torsion beam to minimize a sensitivity to orientation in a gravitational field.Type: ApplicationFiled: May 9, 2012Publication date: November 14, 2013Applicant: AXSUN TECHNOLOGIES, INC.Inventors: Vaibhav Mathur, Dale C. Flanders, Peter S. Whitney, James W. Getz
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Patent number: 8515221Abstract: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.Type: GrantFiled: January 25, 2010Date of Patent: August 20, 2013Assignee: Axsun Technologies, Inc.Inventors: Dale C. Flanders, James W. Getz, Walid A. Atia, Peter S. Whitney, Mark E. Kuznetsov
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Patent number: 8203207Abstract: Provided are electronic device packages and their methods of formation. The electronic device packages include an electronic device mounted on a substrate, a conductive via and a locally thinned region in the substrate. The invention finds application, for example, in the electronics industry for hermetic packages containing an electronic device such as an IC, optoelectronic or MEMS device.Type: GrantFiled: February 25, 2008Date of Patent: June 19, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: James W. Getz, David W. Sherrer, John J. Fisher
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Publication number: 20110181966Abstract: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.Type: ApplicationFiled: January 25, 2010Publication date: July 28, 2011Applicant: AXSUN TECHNOLOGIES, INC.Inventors: Dale C. Flanders, James W. Getz, Peter S. Whitney, Mark E. Kuznetsov, Christopher C. Cook
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Publication number: 20110182550Abstract: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.Type: ApplicationFiled: January 25, 2010Publication date: July 28, 2011Applicant: AXSUN TECHNOLOGIES, INC.Inventors: Dale C. Flanders, James W. Getz, Walid A. Atia, Peter S. Whitney, Mark E. Kuznetsov
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Publication number: 20090256251Abstract: Provided are electronic device packages and their methods of formation. The electronic device packages include an electronic device mounted on a substrate, a conductive via and a locally thinned region in the substrate. The invention finds application, for example, in the electronics industry for hermetic packages containing an electronic device such as an IC, optoelectronic or MEMS device.Type: ApplicationFiled: February 25, 2008Publication date: October 15, 2009Applicant: Rohm and Haas Electronic Materials LLCInventors: James W. Getz, David W. Sherrer, John J. Fisher
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Publication number: 20090154872Abstract: Provided are electronic device packages and their methods of formation. The electronic device packages include a sealed volume enclosing an electronic device and a feedthrough into the sealed volume for electrical connection of the electronic device. Provided are optoelectronic device packages and their methods of formation. The optoelectronic device packages include a first substrate and lid attached to the first substrate forming an enclosed volume. An optoelectronic device is disposed within the enclosed volume and a wick stop for preventing solder flow is provided. Provided are prism-coupled optical assemblies which allow for the coupling of light between an optical component, such as a laser, and an integrated optical waveguide through a prism.Type: ApplicationFiled: December 18, 2008Publication date: June 18, 2009Inventors: David S. Sherrer, Carl E. Gaebe, James W. Getz, Larry J. Rasnake, William K. Hogan