Abstract: A silicon valve for controlling the flow of a fluid includes two generally planar silicon members. One has an orifice for passing the fluid and the other has a relatively moveable surface to selectively open and close the orifice thereby controlling the flow of fluid through the orifice.

Abstract: A silicon valve for controlling the flow of a fluid includes two generally planar silicon members. One has an orifice for passing the fluid and the other has a relatively moveable surface to selectively open and close the orifice thereby controlling the flow of fluid through the orifice.

Abstract: A silicon valve for controlling the flow of a fluid includes two generally planar silicon members. One has an orifice for passing the fluid and the other has a relatively moveable surface to selectively open and close the orifice thereby controlling the flow of fluid through the orifice. A method is disclosed which method addresses the fabrication of the aforementioned silicon valve, wherein an oxide is grown on the surface of a wafer and the wafer then is etched to define a valve seat pattern. Both a top and a bottom plate are fabricated from wafer material and the profiled wafers are bonded together in a manner which will allow fluid passage therethrough.