Abstract: A plasma enhanced chemical vapor deposition method is provided for depositing an oxide film onto a substrate surface. Deposition is achieved even onto a surface of a glass or other relatively non-receptive substrate. A sub-film is deposited under plasma enhanced chemical vapor deposition conditions more strongly favoring deposition, followed by deposition of the desired oxide film under second plasma enhanced chemical vapor deposition conditions less strongly favoring deposition. High quality oxide films can be achieved by deposition at second plasma enhanced chemical vapor deposition conditions only marginally favoring deposition over etching.

Abstract: A glazing article comprises a substrate bearing a substantially transparent coating comprising an optically functional topcoat and a thinner anti-iridescence layer undercoat mediate the topcoat and the substrate. The anti-iridescence layer eliminates or substantially reduces iridescence and, in addition, is readily designed to make the overall coating either colorless or to provide a substantially uniform muted color. The anti-iridescence layer comprises a first thickness zone in which the refractive index is higher than that of the substrate. A low refractive index zone is positioned directly on the high refractive index zone. A second high refractive index zone is positioned on the low refractive index zone, such that the low refractive index zone is directly sandwiched between the two high refractive index zones. A fourth zone, a low refractive index zone, follows the second high refractive index zone.

Abstract: A substantially transparent glazing article has an optically functional coating on a transparent substrate. The coating has an optically functional topcoat layer and an anti-iridescence layer between the topcoat and the substrate. The refractive index anti-iridescence layer is (i) higher than the refractive index of the substrate in a first high refractive index zone directly on the substrate surface, (ii) lower than that of the first high refractive index zone in a low refractive index zone directly on the first high refractive index zone, and (iii) higher than that of the low refractive index zone in a second high refractive index zone directly on the low refractive index zone. The refractive index of the anti-iridescence layer varies in at least one of the zones substantially continuously with distance from the substrate surface. Contiguous zones may together form a single gradient index zone.

Abstract: A titanium tetrahalide is reacted with a primary alkyl or aryl amine to prepare a metallo-organic precursor, which thereafter may be volatilized to form a gaseous chemical vapor deposition precursor to titanium nitride, or may be pyrolyzed to form bulk titanium nitride.

Abstract: A glazing article comprises a substrate bearing a substantially transparent coating comprising an optically functional layer and a thinner anti-iridescence layer undercoat mediate the optically functional layer and the substrate. The anti-iridescence layer eliminates or substantially reduces iridescence and, in addition, is readily designed to make the overall coating colorless or to provide a substantially uniform, muted color. The anti-iridescence layer comprises a high refractive index zone on the substrate, having a refractive index higher than that of the substrate. Multiple gradient step zones are stacked on the high refractive index zone, including a low refractive index zone. A second gradient step zone having a refractive index higher than that of the first gradient step zone is positioned on the low refractive index zone, such that the low refractive index zone is directly sandwiched between the two higher refractive index zones.

Abstract: The invention relates to a method of producing a substantially haze free, fluorine doped metal oxide coating on a substrate such as glass. The method includes the steps of heating a surface of the substrate to be coated, contacting the surface with a vapor including a metal oxide precursor, an oxidizing agent, and a dopant containing a chemically reactive vinylic fluorine atom, and thermally oxidizing the vapor into a fluorine containing metal oxide film.Another feature of the invention is an apparatus for producing a uniform, substantially haze free, fluorine containing metal oxide thin film coating on a substrate such as glass. The apparatus includes a heater to heat the substrate to between approximately 450.degree. and 600.degree. C. and a conveyor to convey the heated substrated to a reaction zone adjacent an injector head. The injector head produces a vapor containing a metal oxide precursor, an oxidizing agent, and a dopant containing a chemically reactive vinylic fluorine atom.