Patents by Inventor James W. Wilkinson

James W. Wilkinson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion beam measurement system and method
    Patent number: 8698108
    Abstract: A system of measuring ion beam current in a process chamber using conductive liners is disclosed. A conductive liner is used to shield the walls of the process chamber. An ion measuring device, such as an ammeter, is used to measure the current created by the ions that impact the conductive liner. In some embodiments, a mechanism to contain secondary electrons generated in the process chamber is employed. Additionally, the ions that impact the scan system or workpiece may also be measured, thereby allowing the current of the entire ion beam to be measured.
    Type: Grant
    Filed: March 8, 2013
    Date of Patent: April 15, 2014
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Joseph P. Dzengeleski, Eric Hermanson, Robert J. Mitchell, Tyler Rockwell, James W. Wilkinson, James Paul Buonodono, Frank Sinclair