Abstract: A system and method for job queue management. A job queue management apparatus acquires multiple wafer lot records individually regarding a plurality of wafers processed by a recipe, clusters the wafer lots by the common recipe into a group, creates a process job corresponding to the group, and stores the process job in a job queue of a fabrication tool.

Abstract: A system and method for carrier transport traffic management. A host computer connects to a fabrication tool, configured to acquire an available number of a resource type for the fabrication tool upon detecting a fabrication tool loadport of the fabrication tool is available. A material transport system connects to the host computer, receives the available number of a resource type for the fabrication tool, acquires a carrier identity corresponding to a carrier, acquires a required number of the resource type corresponding to the carrier, and issues a load command to an automated material handling system (AMHS) to transport the carrier to the fabrication tool if the available number of the resource type exceeds or equals to the required number of the resource type.

Abstract: A system for manufacturing control using radio frequency identification (RFID). A trigger issues a trigger signal when activated by user contact. A RFID interrogator retrieves information from a RFID tag when activated. A controller is configured to activate the RFID interrogator, get the relative information from associated systems and control the indicator according to the trigger signal. An indicator provides operating status of the RFID interrogator and/or information getting from the controller.

Abstract: A system for manufacturing control using radio frequency identification (RFID). A trigger issues a trigger signal when activated by user contact. A RFID interrogator retrieves information from a RFID tag when activated. A controller is configured to activate the RFID interrogator, get the relative information from associated systems and control the indicator according to the trigger signal. An indicator provides operating status of the RFID interrogator and/or information getting from the controller.

Abstract: A method for switch dual Id verification systems for installing another carrier ID system on an equipment installation complying with SEMI E87. A first identification access system has internally installed on an equipment installation on which a second identification access system is then installed. Both systems are switched using a control flow and a wafer carrier ID is obtained by the chosen verification system.

Abstract: A system and method for job queue management. A job queue management apparatus acquires multiple wafer lot records individually regarding a plurality of wafers processed by a recipe, clusters the wafer lots by the common recipe into a group, creates a process job corresponding to the group, and stores the process job in a job queue of a fabrication tool.

Abstract: A system and method for carrier transport traffic management. A host computer connects to a fabrication tool, configured to acquire an available number of a resource type for the fabrication tool upon detecting a fabrication tool loadport of the fabrication tool is available. A material transport system connects to the host computer, receives the available number of a resource type for the fabrication tool, acquires a carrier identity corresponding to a carrier, acquires a required number of the resource type corresponding to the carrier, and issues a load command to an automated material handling system (AMHS) to transport the carrier to the fabrication tool if the available number of the resource type exceeds or equals to the required number of the resource type.

Abstract: A method for switch dual Id verification systems for installing another carrier ID system on an equipment installation complying with SEMI E87. A first identification access system has internally installed on an equipment installation on which a second identification access system is then installed. Both systems are switched using a control flow and a wafer carrier ID is obtained by the chosen verification system.